JPS57155535A - Image forming material - Google Patents

Image forming material

Info

Publication number
JPS57155535A
JPS57155535A JP56040554A JP4055481A JPS57155535A JP S57155535 A JPS57155535 A JP S57155535A JP 56040554 A JP56040554 A JP 56040554A JP 4055481 A JP4055481 A JP 4055481A JP S57155535 A JPS57155535 A JP S57155535A
Authority
JP
Japan
Prior art keywords
layer
metallic
active light
resin
metallic compound
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56040554A
Other languages
Japanese (ja)
Other versions
JPH0131173B2 (en
Inventor
Takeo Kodaira
Takao Taguchi
Koji Kumagai
Kuniomi Eto
Toshio Tanaka
Yoshio Kato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyobo Co Ltd
Toppan Inc
Original Assignee
Toppan Printing Co Ltd
Toyobo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toppan Printing Co Ltd, Toyobo Co Ltd filed Critical Toppan Printing Co Ltd
Priority to JP56040554A priority Critical patent/JPS57155535A/en
Publication of JPS57155535A publication Critical patent/JPS57155535A/en
Publication of JPH0131173B2 publication Critical patent/JPH0131173B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/54—Absorbers, e.g. of opaque materials
    • G03F1/58—Absorbers, e.g. of opaque materials having two or more different absorber layers, e.g. stacked multilayer absorbers

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)

Abstract

PURPOSE:To enable the use of a metallic or metallic compound layer even if the layer contains pinholes having <=50mum size and to prevent halation by interposing an active light absorbing layer between the metallic or metallic compound layer and a photosensitive resin layer. CONSTITUTION:A metallic or metallic compound layer 2 such as an Al layer is formed on the surface of a smooth resin film with high transparency and low heat expandability as a support 1 by vapor deposition in about 500Angstrom thickness. At this time, pinholes may exist in the layer 2 in some degree. On the layer 2 an active light absorbing layer 3 is formed in 1-5mum thickness. The layer 3 contains 5-50wt% active light absorber such as black pigment or dye in the binder resin to the amount of the resin, and the density of active light is regulated to >=1. On the layer 3 a photosensitive resin layer 4 is formed. After exposing and developing the layer 4, the disclosed layers 2, 3 are dissolved to obtain a final image.
JP56040554A 1981-03-20 1981-03-20 Image forming material Granted JPS57155535A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56040554A JPS57155535A (en) 1981-03-20 1981-03-20 Image forming material

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56040554A JPS57155535A (en) 1981-03-20 1981-03-20 Image forming material

Publications (2)

Publication Number Publication Date
JPS57155535A true JPS57155535A (en) 1982-09-25
JPH0131173B2 JPH0131173B2 (en) 1989-06-23

Family

ID=12583661

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56040554A Granted JPS57155535A (en) 1981-03-20 1981-03-20 Image forming material

Country Status (1)

Country Link
JP (1) JPS57155535A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0706088A1 (en) * 1990-05-09 1996-04-10 Canon Kabushiki Kaisha Photomask for use in etching patterns

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0706088A1 (en) * 1990-05-09 1996-04-10 Canon Kabushiki Kaisha Photomask for use in etching patterns

Also Published As

Publication number Publication date
JPH0131173B2 (en) 1989-06-23

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