JPH0130101B2 - - Google Patents

Info

Publication number
JPH0130101B2
JPH0130101B2 JP60175368A JP17536885A JPH0130101B2 JP H0130101 B2 JPH0130101 B2 JP H0130101B2 JP 60175368 A JP60175368 A JP 60175368A JP 17536885 A JP17536885 A JP 17536885A JP H0130101 B2 JPH0130101 B2 JP H0130101B2
Authority
JP
Japan
Prior art keywords
sample
electrons
minute
cma
regions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP60175368A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6150045A (ja
Inventor
Toshitaka Torikai
Masaki Ogawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP60175368A priority Critical patent/JPS6150045A/ja
Publication of JPS6150045A publication Critical patent/JPS6150045A/ja
Publication of JPH0130101B2 publication Critical patent/JPH0130101B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP60175368A 1985-08-09 1985-08-09 オージエ電子分光スペクトル測定方法 Granted JPS6150045A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60175368A JPS6150045A (ja) 1985-08-09 1985-08-09 オージエ電子分光スペクトル測定方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60175368A JPS6150045A (ja) 1985-08-09 1985-08-09 オージエ電子分光スペクトル測定方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP491078A Division JPS54139593A (en) 1978-01-19 1978-01-19 Measuring method of auger electron spectral spectra

Publications (2)

Publication Number Publication Date
JPS6150045A JPS6150045A (ja) 1986-03-12
JPH0130101B2 true JPH0130101B2 (OSRAM) 1989-06-16

Family

ID=15994868

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60175368A Granted JPS6150045A (ja) 1985-08-09 1985-08-09 オージエ電子分光スペクトル測定方法

Country Status (1)

Country Link
JP (1) JPS6150045A (OSRAM)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1403946A (en) * 1973-05-23 1975-08-28 Mullard Ltd Spectroscopy
JPS5218392A (en) * 1975-08-02 1977-02-10 Jeol Ltd Apparatus for analysis of electrn beam energy

Also Published As

Publication number Publication date
JPS6150045A (ja) 1986-03-12

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