JPH01298631A - 電子銃 - Google Patents

電子銃

Info

Publication number
JPH01298631A
JPH01298631A JP1088164A JP8816489A JPH01298631A JP H01298631 A JPH01298631 A JP H01298631A JP 1088164 A JP1088164 A JP 1088164A JP 8816489 A JP8816489 A JP 8816489A JP H01298631 A JPH01298631 A JP H01298631A
Authority
JP
Japan
Prior art keywords
bushing
electron gun
high vacuum
screw
hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1088164A
Other languages
English (en)
Japanese (ja)
Inventor
Emil Ing Cs Vratnicek
エミル　ブラートニーチェク
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tesla Koncernovy Podnik
Original Assignee
Tesla Koncernovy Podnik
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tesla Koncernovy Podnik filed Critical Tesla Koncernovy Podnik
Publication of JPH01298631A publication Critical patent/JPH01298631A/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/067—Replacing parts of guns; Mutual adjustment of electrodes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
JP1088164A 1988-04-08 1989-04-10 電子銃 Pending JPH01298631A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CS2400-88 1988-04-08
CS882400A CS268377B1 (en) 1988-04-08 1988-04-08 Electron gun for electron microscope

Publications (1)

Publication Number Publication Date
JPH01298631A true JPH01298631A (ja) 1989-12-01

Family

ID=5361045

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1088164A Pending JPH01298631A (ja) 1988-04-08 1989-04-10 電子銃

Country Status (5)

Country Link
JP (1) JPH01298631A (cs)
CN (1) CN1037615A (cs)
CS (1) CS268377B1 (cs)
DE (1) DE3911446A1 (cs)
GB (1) GB2217104A (cs)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE903017C (de) * 1951-01-31 1954-02-01 Sueddeutsche Lab G M B H Herstellung kleiner Kugeln aus hochschmelzbaren Materialien
US3636346A (en) * 1968-03-17 1972-01-18 Hitachi Ltd Electron beam generator for electron microscope or the like apparatus
BE793443A (fr) * 1971-12-29 1973-04-16 Aquitaine Petrole Tube a gaz d'emission d'electrons pour spectrometrie a rayons xpar excitation directe
JPS5937540B2 (ja) * 1974-09-06 1984-09-10 株式会社日立製作所 電界放射形走査電子顕微鏡

Also Published As

Publication number Publication date
CS268377B1 (en) 1990-03-14
DE3911446A1 (de) 1989-10-19
CS240088A1 (en) 1989-08-14
CN1037615A (zh) 1989-11-29
GB8907103D0 (en) 1989-05-10
GB2217104A (en) 1989-10-18

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