DE3911446A1 - Elektronenkanone fuer elektronenmikroskope - Google Patents

Elektronenkanone fuer elektronenmikroskope

Info

Publication number
DE3911446A1
DE3911446A1 DE19893911446 DE3911446A DE3911446A1 DE 3911446 A1 DE3911446 A1 DE 3911446A1 DE 19893911446 DE19893911446 DE 19893911446 DE 3911446 A DE3911446 A DE 3911446A DE 3911446 A1 DE3911446 A1 DE 3911446A1
Authority
DE
Germany
Prior art keywords
anode
electron gun
cathode
groove
voltage vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE19893911446
Other languages
German (de)
English (en)
Inventor
Emil Dipl Ing Vratnicek
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tesla Koncernovy Podnik
Original Assignee
Tesla Koncernovy Podnik
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tesla Koncernovy Podnik filed Critical Tesla Koncernovy Podnik
Publication of DE3911446A1 publication Critical patent/DE3911446A1/de
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/067—Replacing parts of guns; Mutual adjustment of electrodes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
DE19893911446 1988-04-08 1989-04-07 Elektronenkanone fuer elektronenmikroskope Withdrawn DE3911446A1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CS882400A CS268377B1 (en) 1988-04-08 1988-04-08 Electron gun for electron microscope

Publications (1)

Publication Number Publication Date
DE3911446A1 true DE3911446A1 (de) 1989-10-19

Family

ID=5361045

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19893911446 Withdrawn DE3911446A1 (de) 1988-04-08 1989-04-07 Elektronenkanone fuer elektronenmikroskope

Country Status (5)

Country Link
JP (1) JPH01298631A (cs)
CN (1) CN1037615A (cs)
CS (1) CS268377B1 (cs)
DE (1) DE3911446A1 (cs)
GB (1) GB2217104A (cs)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE903017C (de) * 1951-01-31 1954-02-01 Sueddeutsche Lab G M B H Herstellung kleiner Kugeln aus hochschmelzbaren Materialien
US3636346A (en) * 1968-03-17 1972-01-18 Hitachi Ltd Electron beam generator for electron microscope or the like apparatus
BE793443A (fr) * 1971-12-29 1973-04-16 Aquitaine Petrole Tube a gaz d'emission d'electrons pour spectrometrie a rayons xpar excitation directe
JPS5937540B2 (ja) * 1974-09-06 1984-09-10 株式会社日立製作所 電界放射形走査電子顕微鏡

Also Published As

Publication number Publication date
CS268377B1 (en) 1990-03-14
CS240088A1 (en) 1989-08-14
GB2217104A (en) 1989-10-18
GB8907103D0 (en) 1989-05-10
CN1037615A (zh) 1989-11-29
JPH01298631A (ja) 1989-12-01

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Legal Events

Date Code Title Description
8139 Disposal/non-payment of the annual fee