CS240088A1 - Electron gun for electron microscope - Google Patents

Electron gun for electron microscope

Info

Publication number
CS240088A1
CS240088A1 CS882400A CS240088A CS240088A1 CS 240088 A1 CS240088 A1 CS 240088A1 CS 882400 A CS882400 A CS 882400A CS 240088 A CS240088 A CS 240088A CS 240088 A1 CS240088 A1 CS 240088A1
Authority
CS
Czechoslovakia
Prior art keywords
electron
gun
microscope
electron microscope
electron gun
Prior art date
Application number
CS882400A
Other languages
Czech (cs)
Other versions
CS268377B1 (en
Inventor
Emil Ing Vratnicek
Original Assignee
Emil Ing Vratnicek
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Emil Ing Vratnicek filed Critical Emil Ing Vratnicek
Priority to CS882400A priority Critical patent/CS268377B1/en
Priority to CN 89101491 priority patent/CN1037615A/en
Priority to GB8907103A priority patent/GB2217104A/en
Priority to DE19893911446 priority patent/DE3911446A1/en
Priority to JP1088164A priority patent/JPH01298631A/en
Publication of CS240088A1 publication Critical patent/CS240088A1/en
Publication of CS268377B1 publication Critical patent/CS268377B1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/067—Replacing parts of guns; Mutual adjustment of electrodes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
CS882400A 1988-04-08 1988-04-08 Electron gun for electron microscope CS268377B1 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
CS882400A CS268377B1 (en) 1988-04-08 1988-04-08 Electron gun for electron microscope
CN 89101491 CN1037615A (en) 1988-04-08 1989-03-15 Be mainly used in the electron gun structure of electron microscope
GB8907103A GB2217104A (en) 1988-04-08 1989-03-29 Electron gun assembly, especially for an electron microscope
DE19893911446 DE3911446A1 (en) 1988-04-08 1989-04-07 ELECTRONIC CANNON FOR ELECTRONIC MICROSCOPE
JP1088164A JPH01298631A (en) 1988-04-08 1989-04-10 Electron gun

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CS882400A CS268377B1 (en) 1988-04-08 1988-04-08 Electron gun for electron microscope

Publications (2)

Publication Number Publication Date
CS240088A1 true CS240088A1 (en) 1989-08-14
CS268377B1 CS268377B1 (en) 1990-03-14

Family

ID=5361045

Family Applications (1)

Application Number Title Priority Date Filing Date
CS882400A CS268377B1 (en) 1988-04-08 1988-04-08 Electron gun for electron microscope

Country Status (5)

Country Link
JP (1) JPH01298631A (en)
CN (1) CN1037615A (en)
CS (1) CS268377B1 (en)
DE (1) DE3911446A1 (en)
GB (1) GB2217104A (en)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE903017C (en) * 1951-01-31 1954-02-01 Sueddeutsche Lab G M B H Manufacture of small balls from high-fusible materials
US3636346A (en) * 1968-03-17 1972-01-18 Hitachi Ltd Electron beam generator for electron microscope or the like apparatus
BE793443A (en) * 1971-12-29 1973-04-16 Aquitaine Petrole ELECTRON EMISSION GAS TUBE FOR XPAR RAY SPECTROMETRY DIRECT EXCITATION
JPS5937540B2 (en) * 1974-09-06 1984-09-10 株式会社日立製作所 Field emission scanning electron microscope

Also Published As

Publication number Publication date
CS268377B1 (en) 1990-03-14
GB2217104A (en) 1989-10-18
CN1037615A (en) 1989-11-29
JPH01298631A (en) 1989-12-01
GB8907103D0 (en) 1989-05-10
DE3911446A1 (en) 1989-10-19

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