CS944987A1 - Portable rastering electron microscope - Google Patents

Portable rastering electron microscope

Info

Publication number
CS944987A1
CS944987A1 CS879449A CS944987A CS944987A1 CS 944987 A1 CS944987 A1 CS 944987A1 CS 879449 A CS879449 A CS 879449A CS 944987 A CS944987 A CS 944987A CS 944987 A1 CS944987 A1 CS 944987A1
Authority
CS
Czechoslovakia
Prior art keywords
portable
electron microscope
rastering
rastering electron
microscope
Prior art date
Application number
CS879449A
Other languages
Czech (cs)
Other versions
CS267642B1 (en
Inventor
Josef Ing Melkes
Lubomir Rndr Tuma
Jaroslav Ing Klima
Emil Ing Vratnicek
Jiri Ing Petr
Original Assignee
Josef Ing Melkes
Tuma Lubomir
Klima Jaroslav
Emil Ing Vratnicek
Petr Jiri
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Josef Ing Melkes, Tuma Lubomir, Klima Jaroslav, Emil Ing Vratnicek, Petr Jiri filed Critical Josef Ing Melkes
Priority to CS879449A priority Critical patent/CS267642B1/en
Priority to JP63298426A priority patent/JPH01251546A/en
Priority to GB8828748A priority patent/GB2213984A/en
Priority to CN 88108716 priority patent/CN1035583A/en
Priority to DE19883842757 priority patent/DE3842757A1/en
Publication of CS944987A1 publication Critical patent/CS944987A1/en
Publication of CS267642B1 publication Critical patent/CS267642B1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
CS879449A 1987-12-18 1987-12-18 Portable rastering electron microscope CS267642B1 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
CS879449A CS267642B1 (en) 1987-12-18 1987-12-18 Portable rastering electron microscope
JP63298426A JPH01251546A (en) 1987-12-18 1988-11-28 Portable scanning electron microscope
GB8828748A GB2213984A (en) 1987-12-18 1988-12-08 A portable scanning electron microscope
CN 88108716 CN1035583A (en) 1987-12-18 1988-12-17 Postable scanning electron microscope
DE19883842757 DE3842757A1 (en) 1987-12-18 1988-12-19 PORTABLE GRID ELECTRON MICROSCOPE

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CS879449A CS267642B1 (en) 1987-12-18 1987-12-18 Portable rastering electron microscope

Publications (2)

Publication Number Publication Date
CS944987A1 true CS944987A1 (en) 1989-06-13
CS267642B1 CS267642B1 (en) 1990-02-12

Family

ID=5444734

Family Applications (1)

Application Number Title Priority Date Filing Date
CS879449A CS267642B1 (en) 1987-12-18 1987-12-18 Portable rastering electron microscope

Country Status (5)

Country Link
JP (1) JPH01251546A (en)
CN (1) CN1035583A (en)
CS (1) CS267642B1 (en)
DE (1) DE3842757A1 (en)
GB (1) GB2213984A (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL1026547C2 (en) * 2004-07-01 2006-01-03 Fei Co Device for evacuating a sample.
CN101221882B (en) * 2007-12-14 2010-09-01 中国科学院物理研究所 Adapter of transmission electron microscope example bench, its substrate and manufacturing method thereof
JP5259688B2 (en) 2010-12-09 2013-08-07 本田技研工業株式会社 Scanning electron microscope
CN102426269B (en) * 2011-08-31 2013-05-08 北京大学 Low-temperature scanning near field optical microscope
NL2013432B1 (en) * 2014-09-05 2016-09-28 Delmic B V Compact inspection apparatus comprising a combination of a Scanning Electron Microscope and an Optical microscope.
CN107991512B (en) * 2017-11-09 2021-03-26 Tcl华星光电技术有限公司 Detection platform based on atomic force microscope
CN115116812B (en) * 2022-08-29 2022-11-11 深圳市宗源伟业科技有限公司 High-precision electron microscope

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE630465A (en) * 1962-04-02
JPS5523746Y2 (en) * 1976-02-05 1980-06-06

Also Published As

Publication number Publication date
JPH01251546A (en) 1989-10-06
CS267642B1 (en) 1990-02-12
GB2213984A (en) 1989-08-23
DE3842757A1 (en) 1989-06-29
CN1035583A (en) 1989-09-13
GB8828748D0 (en) 1989-01-11

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