CN1035583A - Postable scanning electron microscope - Google Patents
Postable scanning electron microscope Download PDFInfo
- Publication number
- CN1035583A CN1035583A CN 88108716 CN88108716A CN1035583A CN 1035583 A CN1035583 A CN 1035583A CN 88108716 CN88108716 CN 88108716 CN 88108716 A CN88108716 A CN 88108716A CN 1035583 A CN1035583 A CN 1035583A
- Authority
- CN
- China
- Prior art keywords
- substrate
- postable
- opening
- scanning electron
- electron microscope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
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- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Abstract
A kind of Postable scanning electron microscope, its sample room 5 are positioned at its pedestal middle part and have visual opening 6, and the size of this opening is swung greater than the maximum point territory in this plane of the opening.Sample vacuum chamber is airtight can be placed on the substrate again with traversing, at this substrate middle part one through hole that communicates with visual opening is arranged, and also has first sealing gasket 3 around above-mentioned through hole in the bottom surface of this substrate.The present invention can preferably be used for the non-destructive surface analysis on big surface, for example to aircraft wing, and the detecting of missile component and other heavy parts fatigue phenomenon.
Description
The present invention relates to Postable scanning electron microscope.
Recently the quantity of electronic scanner microscope has had remarkable increase, because their depth of focus is big, should be used for the check of production process, to the research of areal deformation, particularly to the check of fatigue phenomenon.
Its major defect of the electronic scanner microscope of prior art is; the size of the object of checking is restricted; need utilize the destructive method of inspection; wherein the sample size of being checked can not surpass the opening in the sample room, therefore through regular meeting the destruction situation that the part to institute's sample thief causes wearing and tearing maybe can't remedy takes place.
For eliminating this shortcoming, former designed electron microscope, used the very little diaphragm of a diameter (being generally 30 microns) should microscopical vacuum section and surrounding environment separate, described vacuum section is evacuated with powerful pump, and compensate constantly because of the people be the vacuum leak that causes.
The major defect of this solution is, since the microscopic size of described diaphragm, the vacuum inhomogeneities in the optical axis district, and owing to the electron diffusion effect of being returned by the object scattering makes the visual field very limited, the result causes the image quality extreme difference.
For eliminating these defectives, design once has a kind of Postable scanning electron microscope, and this microscopical sample room is arranged in its bottom opening, and is placed on the solid state surface of institute's region probed object with adapting to vacuum tightness.The shank of described electronic scanner microscope can have the zone that will detect preferably to be selected, and the former is embedded in the sample room through spherical base, and the shank in this structure can tilt, thereby can change the incidence point of center electron beam.
The defective of this solution is, the bigger inclination of shank can make image fault, again because the variation of distance between the terminal lens of observed surface and optical system can make the multiplication factor of image change.Another defective of this scheme be observed point around must be a plane, the size on this plane must be greater than the sealing gasket size of above-mentioned electronic scanner microscope sample room bottom.
The defective of the various solutions of above-mentioned prior art, in fact eliminated by Postable scanning electron microscope according to the present invention, this microscopical characteristics are, its sample room is positioned at the pedestal middle part that has visual opening, and this visual opening size is swung greater than the maximum point territory in the described visual plane of the opening, the sample room is that the airtight of vacuum can place on the substrate again with traversing, the middle part of this substrate has the through hole that is communicated with described visual opening, has first gasket ring to put described through hole on the spot in the bottom surface of this substrate.In a most preferred embodiment, have adjustment screw on the described substrate and/or described sample room is furnished with translation screws.Another most preferred embodiment is equipped with a group substrate, detects the surface and the shape and size of each substrate bottom surface and first sealing gasket adapt to a kind of specific quilt.
Advantage according to Postable scanning electron microscope of the present invention is, when seeking an optimum with this kind microscopic examination, neither can cause image distortion, also can not change the multiplication factor of image because of the inclination of electron beam.Another advantage of this solution is, for the different surfaces of detecting, can provide interchangeable at an easy rate and have the various substrates of sealing gasket, and the size and dimension of these substrates adapts to the certain environmental conditions of making an inventory of of seeing.
Now describe the present invention in detail, the figure shows the most preferred embodiment of a kind of Postable scanning electron microscope according to the present invention for helping accompanying drawing.
In the accompanying drawing, the surface 1 of being detected places under the substrate 2 that has the first vacuum seal pad 3, and described sealing gasket 3 is around the through hole 4 in the described substrate 2.Sample room 5 is embedded on the described substrate 2, and a visual opening 6 is arranged at the bottom of described sample room 5.Sample room 5 supporting shanks 7, the both is connected to a pump 8.Described substrate 2 band adjustment screws 9, described sample room 5 then has translation screws 10.Between described sample room 5 and described substrate 2, dispose the second vacuum seal pad 11.
According to Postable scanning electron microscope of the present invention in use, by operating personnel described microscope is placed surperficial 1 place of detecting, and with its substrate 2 be placed on described detect the surface 1 on, thereby make detect the surface and 1 be within the through hole 4 of described substrate 2,3 on the first vacuum seal pad with its whole periphery around detected a little place described detect surperficial 1 above.Vacuumize with 8 pairs of these microscopes of pump then, and make by described surface 1 the trip bolt 9 of detecting of ejection that microscope is stable firmly to make it have bigger antivibration power.At this moment can use this microscope, electron beam is scanned near a point territory of electro-optical system axle detect surface 1, by means of translation screws 10, sample room 5 can be in together with shank 7 and slip over described preferable inspecting in the amplification mode of detecting the surface, behind the optimum position of finding operating personnel just desiring to seek, detect and to begin.
Optimum of the present invention is used for the non-destructive surface analysis on big surface, for example to aircraft wing, and the detecting of missile component and other big machinery part fatigue phenomenon.
Claims (4)
1, a kind of desk-top electronic scanner microscope, it is characterized in that described microscopical sample room 5 has a visual opening 6, this opening is positioned at the middle part of its pedestal, the size of visual opening 6 is swung greater than the maximum point territory in these visual opening 6 planes, described sample vacuum chamber is airtight and can place on the substrate 2 with traversing, there is a through hole 4 coaxial with visual opening 6 at the middle part of this substrate, also has first sealing gasket 3 to be used for that the corresponding surface that will check is sealed in the bottom surface of this substrate 2 and around described through hole 4.
2, according to the Postable scanning electron microscope of claim 1, it is characterized in that described substrate 2 has the thin nail 9 of adjusting, this screw roof pressure is on the surface that will check.
3, according to the Postable scanning electron microscope of claim 1 or 2, it is characterized in that sample room 5 has translation screws 10, the sample room is moved with respect to substrate 2.
4, according to the arbitrary described Postable scanning electron microscope of claim 1 to 3, it is characterized in that described microscope has a group substrate 2, the size and dimension of the bottom surface of each substrate 2 and first sealing gasket 3 is suitable for cooperating with the surface 1 of the variant type that will check.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CSPV9449-87 | 1987-12-18 | ||
| CS879449A CS267642B1 (en) | 1987-12-18 | 1987-12-18 | Portable rastering electron microscope |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN1035583A true CN1035583A (en) | 1989-09-13 |
Family
ID=5444734
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 88108716 Pending CN1035583A (en) | 1987-12-18 | 1988-12-17 | Postable scanning electron microscope |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JPH01251546A (en) |
| CN (1) | CN1035583A (en) |
| CS (1) | CS267642B1 (en) |
| DE (1) | DE3842757A1 (en) |
| GB (1) | GB2213984A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101221882B (en) * | 2007-12-14 | 2010-09-01 | 中国科学院物理研究所 | Adapter of transmission electron microscope example bench, its substrate and manufacturing method thereof |
| CN1715862B (en) * | 2004-07-01 | 2010-12-22 | Fei公司 | Apparatus for evacuating a sample |
| CN102426269A (en) * | 2011-08-31 | 2012-04-25 | 北京大学 | Low-temperature scanning near field optical microscope |
| CN107991512A (en) * | 2017-11-09 | 2018-05-04 | 深圳市华星光电技术有限公司 | Detection platform based on atomic force microscope |
| CN115116812A (en) * | 2022-08-29 | 2022-09-27 | 深圳市宗源伟业科技有限公司 | High-precision electron microscope |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5259688B2 (en) | 2010-12-09 | 2013-08-07 | 本田技研工業株式会社 | Scanning electron microscope |
| NL2013432B1 (en) * | 2014-09-05 | 2016-09-28 | Delmic B V | Compact inspection apparatus comprising a combination of a Scanning Electron Microscope and an Optical microscope. |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| BE630465A (en) * | 1962-04-02 | |||
| JPS5523746Y2 (en) * | 1976-02-05 | 1980-06-06 |
-
1987
- 1987-12-18 CS CS879449A patent/CS267642B1/en unknown
-
1988
- 1988-11-28 JP JP63298426A patent/JPH01251546A/en active Pending
- 1988-12-08 GB GB8828748A patent/GB2213984A/en not_active Withdrawn
- 1988-12-17 CN CN 88108716 patent/CN1035583A/en active Pending
- 1988-12-19 DE DE19883842757 patent/DE3842757A1/en not_active Withdrawn
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1715862B (en) * | 2004-07-01 | 2010-12-22 | Fei公司 | Apparatus for evacuating a sample |
| CN101221882B (en) * | 2007-12-14 | 2010-09-01 | 中国科学院物理研究所 | Adapter of transmission electron microscope example bench, its substrate and manufacturing method thereof |
| CN102426269A (en) * | 2011-08-31 | 2012-04-25 | 北京大学 | Low-temperature scanning near field optical microscope |
| CN102426269B (en) * | 2011-08-31 | 2013-05-08 | 北京大学 | Low-temperature scanning near field optical microscope |
| CN107991512A (en) * | 2017-11-09 | 2018-05-04 | 深圳市华星光电技术有限公司 | Detection platform based on atomic force microscope |
| CN115116812A (en) * | 2022-08-29 | 2022-09-27 | 深圳市宗源伟业科技有限公司 | High-precision electron microscope |
| CN115116812B (en) * | 2022-08-29 | 2022-11-11 | 深圳市宗源伟业科技有限公司 | High-precision electron microscope |
Also Published As
| Publication number | Publication date |
|---|---|
| DE3842757A1 (en) | 1989-06-29 |
| CS267642B1 (en) | 1990-02-12 |
| GB8828748D0 (en) | 1989-01-11 |
| CS944987A1 (en) | 1989-06-13 |
| JPH01251546A (en) | 1989-10-06 |
| GB2213984A (en) | 1989-08-23 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C01 | Deemed withdrawal of patent application (patent law 1993) | ||
| WD01 | Invention patent application deemed withdrawn after publication |