CN102426269A - Low-temperature scanning near field optical microscope - Google Patents
Low-temperature scanning near field optical microscope Download PDFInfo
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- CN102426269A CN102426269A CN2011102556691A CN201110255669A CN102426269A CN 102426269 A CN102426269 A CN 102426269A CN 2011102556691 A CN2011102556691 A CN 2011102556691A CN 201110255669 A CN201110255669 A CN 201110255669A CN 102426269 A CN102426269 A CN 102426269A
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Abstract
The invention discloses a low-temperature scanning near field optical microscope, which belongs to the manufacturing field of near field optical equipment. The microscope is provided with a vacuum chamber, wherein the vacuum chamber is divided into an upper part and a lower part, the upper part is a scanning chamber, the lower part is a low-temperature Dewar chamber, a scanning head is arranged in the scanning chamber, optical paths of the scanning head include an illumination optical fiber, a pinpoint optical fiber and a scanning control electronic circuit, the illumination optical fiber is connected with a laser outside the vacuum chamber, the pinpoint optical fiber is connected with an external spectrograph and a photomultiplier, the spectrograph and the photomultiplier are connected with a scanning controller, and the scanning control electronic circuit is connected with the scanning controller. According to the invention, an efficient low-temperature scanning near field optical microscope is manufactured.
Description
Technical field
The invention belongs to the near field optic instrument and make the field, be specifically related to a kind of global design of low temperature scanning near-field optical microscope system.
Background technology
Near field optic microscopy (SNOM) utilizes the near field to interact, and can be less than the resolution of 100nm, is far superior to receive the far field microscopy of diffracting obstacles restriction.The idea of utilization near field optic imaging is proposed in nineteen twenty-eight by Synge for the first time, and he points out through the sub-wavelength apertures irradiating object with very can to obtain high resolving power near the combining of the detector of sample through non-diffraction limit procedure.The experimental apparatus of the routine that principle is come true is that people such as Pohl et al. accomplished in 1984, thereby optical microscope for scanning near field is achieved, and optical diffraction limit obtains real the breakthrough.Optical microscope for scanning near field (SNOM) is at the nanoscale optical imagery of material, the characteristics of luminescence of quantum device, and the numerous areas such as near field detection of surface phasmon are able to use.Under low temperature environment, the problem of the SNOM of some normal temperature can improve.Imaging like SNOM is slower, floats sensitivity with these various parameter temperature to system, and at low temperatures, thermonoise is little, and various drift parameters are inhibited, and help obtaining long-time imaging of high-quality and spectral information.During optical detection, the signal to noise ratio (S/N ratio) of light signal significantly improves, and may detect covered feeble signal under the normal temperature.The optic spectrum line width reduces, and helps differentiating meticulous level structure.For some samples, closely related like the phenomenon and the temperature of many recombination luminescences in semiconductor, the organic fluorescence molecule.The probability of some non-radiative recombination process generations reduces at low temperatures; The average energy of charge carrier thermal motion reduces, so luminescence efficiency is than greatly improving under the room temperature, and spectral width reduces; Signal to noise ratio (S/N ratio) is high; And such as exciton is compound etc. phenomenon also can only could occur at low temperatures, in the life-span of charge carrier, other character of mobility or the like is also often closely related with temperature.Utilize the high spatial resolution of near field optic,, can carry out deep research these luminescence phenomenons in conjunction with the means of low temperature.
Tradition SNOM is operated under the atmospheric environment, the wiring of its electronic circuit, light path build and Vibration Absorption Designing all is to carry out in the open space.And low temperature SNOM need be in the vacuum chamber interscan, and will consider the cooling problem of sample, and therefore the design of traditional SNOM can't be applied in the working environment of low temperature SNOM.Though other scanning probe microscopies like PSTM, have the design proposal of a few thing at the cryogenic vacuum environment, because it does not relate to building of light path, so be difficult to be applied on the low temperature SNOM.The low temperature SNOM of a smaller number of in the world seminar research and development is owing to its complex design, and difficulty of processing is big, and system is difficult to safeguard, does not form a kind of low temperature SNOM system design scheme of maturation at present.
Summary of the invention
Based on above-mentioned situation, the purpose of this invention is to provide a kind of low temperature NSOM.
Concrete technical scheme of the present invention is following:
Low temperature NSOM is provided with vacuum chamber, and this microscope is provided with vacuum chamber, and this vacuum chamber is divided into two parts up and down; Top is the scanning room; The bottom is the cooled cryostat chamber, is provided with scanner head in the scanning room, and the light path of scanner head comprises lighting fiber, needle point optical fiber and scan control electronic circuit; Lighting fiber is connected with the outside laser instrument of vacuum chamber; Needle point optical fiber is connected with photomultiplier with outside spectrometer, and spectrometer is connected with scanning monitor with photomultiplier, and the scan control electronic circuit is connected with scanning monitor.
Cooled cryostat is a double-decker, and skin is the liquid nitrogen chamber, and internal layer is the liquid helium chamber, and the top of cooled cryostat is provided with a heat conduction copper dish, and this copper dish connects a copper rod, and it extends to the bottom of liquid helium Dewar always.
Offered the interface of scanning electron circuit and light path turnover vacuum chamber on the top flange of scanning room, whole scanner head is suspended on the crotch place that is in top flange center elevating lever lower end.
The advantage that the present invention had is:
The low temperature scanning NFM is provided with vacuum chamber, and be convenient in the scanning room outer wall and offer view window scanning room in this vacuum chamber and cooled cryostat chamber independence, has avoided on cooled cryostat, opening the difficult problem of cold window.And whole optical system turnover vacuum chamber has only 2 optical fiber, and light path is simplified, and is convenient to debugging.It is a SNOM of low temperature efficiently system.
Description of drawings
Below in conjunction with accompanying drawing and embodiment the present invention is described further:
Accompanying drawing is a structural representation of the present invention.
Wherein: the 1-top flange; The 2-scanning room; 3-cooled cryostat chamber; The 4-cooled cryostat; 5-heat conduction copper dish; The 6-scanner head; The 7-scanning monitor; 8-spectrometer/photomultiplier; The 9-helium-neon laser; The 10-elevating lever.
Embodiment
Shown in accompanying drawing, the vacuum chamber of low temperature scanning NFM is divided into two parts up and down, and top is scanning room 2, and the bottom is cooled cryostat chamber 3.Cooled cryostat 4 is a double-decker, and skin is the liquid nitrogen chamber, and internal layer is the liquid helium chamber, and the top in liquid helium chamber is that a diameter is the heat conduction copper dish 5 of 80mm, and it is 20mm that this heat conduction copper dish connects a diameter, and length is the copper rod of 70mm, and this copper rod extends to the bottom of liquid helium Dewar always.Whole scanner head 6 is suspended on the crotch place of elevating lever 10 lower ends that are in top flange 1 center, and diameter is an interface of having offered scanning electron circuit and light path turnover vacuum chamber on the top flange 1 of 150mm.
The course of work of this low temperature SNOM:
Because scan control electronic circuit and optical fiber can be used as whole from 1 taking-up of top flange mouth, therefore can outside vacuum chamber, carry out the prescan and the replacing of needle point earlier.After debugging finishes; Scanner head is hung on the crotch place of elevating lever 9 lower ends; Process vacuumizes, and after cooled cryostat injects liquid nitrogen/liquid helium, through can scanner head 6 being positioned on the heat conduction copper dish 5 at vacuum chamber field operation elevating lever sample stage is lowered the temperature.Be provided with vibration absorber in the scanner head 6, can eliminate the vibration effect of system.The light path of scanner head comprises lighting fiber, needle point optical fiber and scan control electronic circuit, and the scan control electronic circuit is external on the scanning monitor 7, and this low temperature SNOM adopts far field excitation, near field collection mode.Whole optical path turnover vacuum chamber has only two optical fiber; Wavelength is that the helium-neon laser 9 of 442nm gets into scanner head 6 as lighting source through lighting fiber; The near field optic signal is linked into spectrometer/photomultiplier 8 through optical fiber after by the needle point collecting fiber, gets at last again and realizes the synchronous of pattern picture and optical signalling on the scanning monitor 7.
Claims (4)
1. a low temperature scanning NFM is characterized in that, this microscope is provided with vacuum chamber; This vacuum chamber is divided into two parts up and down, and top is the scanning room, and the bottom is the cooled cryostat chamber; Be provided with scanner head in the scanning room; The light path of scanner head comprises lighting fiber, needle point optical fiber and scan control electronic circuit, and lighting fiber is connected with the outside laser instrument of vacuum chamber, and needle point optical fiber is connected with photomultiplier with outside spectrometer; Spectrometer is connected with scanning monitor with photomultiplier, and the scan control electronic circuit is connected with scanning monitor.
2. low temperature scanning NFM as claimed in claim 1; It is characterized in that cooled cryostat is indoor to be provided with double-deck cooled cryostat, the cooled cryostat skin is the liquid nitrogen chamber; The cooled cryostat internal layer is the liquid helium chamber; The top in liquid helium chamber is a heat conduction copper dish, and heat conduction copper dish connects a copper rod, and this copper rod extends to the bottom in liquid helium chamber always.
3. low temperature scanning NFM as claimed in claim 1 is characterized in that, in the scanning room, is provided with top flange, and top flange is provided with the interface of scan control electronic circuit and light path.
4. low temperature scanning NFM as claimed in claim 1 is characterized in that, scanner head is suspended on the elevating lever lower end that is in top flange center.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201110255669 CN102426269B (en) | 2011-08-31 | 2011-08-31 | Low-temperature scanning near field optical microscope |
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| Application Number | Priority Date | Filing Date | Title |
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| CN 201110255669 CN102426269B (en) | 2011-08-31 | 2011-08-31 | Low-temperature scanning near field optical microscope |
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| CN102426269A true CN102426269A (en) | 2012-04-25 |
| CN102426269B CN102426269B (en) | 2013-05-08 |
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| CN 201110255669 Expired - Fee Related CN102426269B (en) | 2011-08-31 | 2011-08-31 | Low-temperature scanning near field optical microscope |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103954802A (en) * | 2014-05-13 | 2014-07-30 | 中国科学技术大学 | Long-wavelength scanning near-field microscopic analysis system |
| CN104880576A (en) * | 2015-06-02 | 2015-09-02 | 常州朗道科学仪器有限公司 | Device for measuring sample with scanning probe microscopy at low temperature |
| CN109564239A (en) * | 2016-05-27 | 2019-04-02 | 牛津仪器纳米技术工具有限公司 | Low-temperature cooling system |
| CN109738483A (en) * | 2019-01-23 | 2019-05-10 | 重庆理工大学 | Solder joint thermophoresis experimental provision and method under the conditions of extreme temperature gradient |
| CN111811939A (en) * | 2020-07-21 | 2020-10-23 | 上海交通大学 | High-precision nano-mechanics detection system in ultralow temperature environment |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1035583A (en) * | 1987-12-18 | 1989-09-13 | 特斯拉公司 | Postable scanning electron microscope |
| US6535474B1 (en) * | 1999-04-15 | 2003-03-18 | Lg Electronics Inc. | Near field optical recording/reproducing device |
| CN1805061A (en) * | 2006-01-06 | 2006-07-19 | 华南理工大学 | Method of producing photon scanning tunneling microscope probe with optical fiber and Indium-Tin-oxide |
| CN1808154A (en) * | 2005-06-23 | 2006-07-26 | 中国科学技术大学 | Method and apparatus for measuring material piezoelectric coefficient by using scanning near-field microwave microscopy |
| CN1821743A (en) * | 2006-03-27 | 2006-08-23 | 北京航空航天大学 | Atomic force microscopic detecting method and device for moonscape environment locating measurement |
-
2011
- 2011-08-31 CN CN 201110255669 patent/CN102426269B/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1035583A (en) * | 1987-12-18 | 1989-09-13 | 特斯拉公司 | Postable scanning electron microscope |
| US6535474B1 (en) * | 1999-04-15 | 2003-03-18 | Lg Electronics Inc. | Near field optical recording/reproducing device |
| CN1808154A (en) * | 2005-06-23 | 2006-07-26 | 中国科学技术大学 | Method and apparatus for measuring material piezoelectric coefficient by using scanning near-field microwave microscopy |
| CN1805061A (en) * | 2006-01-06 | 2006-07-19 | 华南理工大学 | Method of producing photon scanning tunneling microscope probe with optical fiber and Indium-Tin-oxide |
| CN1821743A (en) * | 2006-03-27 | 2006-08-23 | 北京航空航天大学 | Atomic force microscopic detecting method and device for moonscape environment locating measurement |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103954802A (en) * | 2014-05-13 | 2014-07-30 | 中国科学技术大学 | Long-wavelength scanning near-field microscopic analysis system |
| CN104880576A (en) * | 2015-06-02 | 2015-09-02 | 常州朗道科学仪器有限公司 | Device for measuring sample with scanning probe microscopy at low temperature |
| CN109564239A (en) * | 2016-05-27 | 2019-04-02 | 牛津仪器纳米技术工具有限公司 | Low-temperature cooling system |
| CN109738483A (en) * | 2019-01-23 | 2019-05-10 | 重庆理工大学 | Solder joint thermophoresis experimental provision and method under the conditions of extreme temperature gradient |
| CN111811939A (en) * | 2020-07-21 | 2020-10-23 | 上海交通大学 | High-precision nano-mechanics detection system in ultralow temperature environment |
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| CN102426269B (en) | 2013-05-08 |
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