CN1821743A - Atomic force microscopic detecting method and device for moonscape environment locating measurement - Google Patents
Atomic force microscopic detecting method and device for moonscape environment locating measurement Download PDFInfo
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- CN1821743A CN1821743A CNA2006100658312A CN200610065831A CN1821743A CN 1821743 A CN1821743 A CN 1821743A CN A2006100658312 A CNA2006100658312 A CN A2006100658312A CN 200610065831 A CN200610065831 A CN 200610065831A CN 1821743 A CN1821743 A CN 1821743A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
- G01Q10/04—Fine scanning or positioning
- G01Q10/06—Circuits or algorithms therefor
- G01Q10/065—Feedback mechanisms, i.e. wherein the signal for driving the probe is modified by a signal coming from the probe itself
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Abstract
This invention discloses an atomic force microscope test method and a device for carrying out spot measurement to the moon surface environment including probes, a signal and process circuit, a microprocessor, a control circuit controlling the probes and a feedback control circuit, in which, the control circuit outputs voltage signals of X-Y directions to a 3-D scanner of the probe to drive a micro-cantilever probe to scan the substances on the moon surface and the micro-cantilever deforms during the scanning, size of the deformation is tested by a signal test and process circuit to be output to the feed control circuit then to be sent to the microprocessor. This invention applies a self-sensing micro-cantilever to test its deformation by a precision pre-amplifying and signal test and process circuit, applies array micro-cantilevers having the function of self-testing and automatic exchanging the damaged probes, drives the probes to realize large sphere scanning to substances of the moon surface and applies a tap/phase mode to obtain 3-D images.
Description
Technical field
The present invention relates to a kind of atomic force microscope measuring method in place and device that is applicable to lunar surface environment.This measurement pick-up unit in place can be realized size is carried out researching and analysing of aspects such as microscopic appearance, size, hardness, adhesion, wearing and tearing from micron until particulate samples such as the lunar soil of nanometer scale, lunar rock, sandstones.
Background technology
The atomic force microscope (AFM) that come out the eighties in 20th century has and can observe non-conductive sample, can carry out the advantage that imaging is observed under atmosphere, vacuum and liquid environment condition, and volume is little, in light weight, characteristic of low energy consumption.The field such as control at macromolecular material, nano material and Surface Science (as semiconductor material, catalyzer etc.) and atom, molecule and obtained widespread use.Atomic force microscope not only can provide the information of three-dimensional structure intuitively of sample surfaces microscopic appearance, but also the physics that detectable sample surfaces or interface show on nanoscale, chemical property distribute and surface charge etc. as skin hardness, viscoelasticity (adhesion), tribological properties, the magnetic domain of sample.The nineties in 20th century, atomic force microscope has begun to be applied to comprise in the environmental geology field mineral surface imaging observation and the structural research of the corrosion, weathering phenomenon of mineral etc., for the mechanism of action of deeply probing into environment micro-interface process on higher level levels such as nanoscale and atom, molecule high-resolution imaging is intuitively laid a good foundation.
Moonscape is 10
-14Atmospheric pressure (10
-9Pa), almost do not have atmospheric envelope and atmosphere activity, do not have the heat conduction of atmosphere, so the temperature difference at moonscape daytime and night is very big, from daytime temperature be 130～150 ℃, shadow region that the sun can not shine and the Lunar surface temperature during night are-180～-150 ℃.Therefore for realizing the moonscape test analysis, move prospecting, sampling on the spot, on-the-spot test, data processing and control and obtain the various microns of moonscape, the material pattern of nanoscale, structure, should develop a kind of ultrahigh vacuum, temperature variation of being applicable to is the remote-controlled intelligent atomic force microscope system of-180～+ 150 ℃ the following work of moonscape special environment condition.
By moving prospecting, sampling on the spot, on-the-spot test, data processing and control, at the true nature state of environment test moon sight ball surface masses such as moonscape ultrahigh vacuum, high temperature, low temperature; Size under the lunar surface environment is carried out researching and analysing of material pattern, structure and properties such as microscopic appearance, size, hardness, adhesion, wearing and tearing from micron until particulate samples such as the lunar soil of nanometer scale, lunar rock, sandstones, understanding is to the influence of mechanical moving elements such as lunar rover gear and be absorbed in degree of depth of lunar soil etc., provides data necessary for setting up station, lunar space etc.; The moonscape local analysis: grind off surperficial waste mantle, detecting material outside surface and inner difference are avoided the pollution of taking back the earth and bringing in the preparation sample process at lunar material under ground surface environment.Promote the research of material and material under the environmental baseline of space-like, in-depth is to the understanding of lunar rock, lunar soil structure, for space material research in future provides scientific basis and method.
In the prior art, introduced a kind of horizontal atomic force microscope probe among the publication number CN1445790A, in its instructions clear and definite introduction the principle of work and the device architecture thereof of atomic force microscope.Introduced a kind of displacement measuring device that is installed on the atomic force microscope micro-cantilever in publication number CN1632519A, this displacement measuring device has adopted optical differences dynamic formula angular transducer, and its advantage has been to enlarge the sweep limit of testee.The probe that the core component of atomic force microscope is made up of scanning and feedback controller and photodetector system, described probe directly influence the performances such as detection resolution, accuracy of detection, sweep limit and signal to noise ratio (S/N ratio) of atomic force microscope.Described scanning and feedback controller generally are made up of XYZ piezoelectric ceramics and sample stage, described photodetector system generally is made up of micro-cantilever probe, laser instrument and position sensor (PSD), adopts in atomic force microscope the extremely responsive micro-cantilever of faint power is popped one's head in as force transducer.
Above-mentioned atomic force microscope, there are some limitation in itself, can not be used for the measurement in place of lunar surface environment, and main cause is: sweep limit is less; Utilize laser measurement etc. to add the deformation that measurement mechanism detects micro-cantilever, inconvenient operation can not realize that automatic remote control measures; Volume is bigger; Adopt scanner to drive the working method of sample, the size of sample is limited to some extent, need special preparation sample probe scanning; Strict etc. to environment temperature.
We propose a kind of atomic force microscopic detecting method and device that can carry out measurement in place to lunar surface environment.This device with from the perception micro-cantilever as the acting force between sensor measurement testing sample and the probe; Drive the large area scanning of micro-cantilever probe realization with the large area scanning device to sample surfaces; Employing raps/and phase pattern obtains the three-dimensional surface shape image; Device has that volume is little, and operable automatically is easy to carry, and does not need the particular sample preparation, has the micro-cantilever probe from detecting and changing function automatically; The characteristics that adapt to the working environment of ultrahigh vacuum and high low temperature variation.
Summary of the invention
The purpose of this invention is to provide a kind of atomic force microscopic detecting method and device that lunar surface environment is carried out measurement in place, the signal Processing and the control system of this measurement pick-up unit in place mainly comprise: be the control core circuit with DSP, accurate pre-amplification circuit that deformation detects to micro-cantilever and input and treatment circuit, feedback control circuit, image storage circuit, and the oscillation control circuit that slightly, carefully approaches control, micro-cantilever of micro-cantilever scan control, micro-cantilever probe and sample; This system adopts from the perception micro-cantilever, to substitute traditional optical detection cantilever that declines.The resistance value of himself or the change of magnitude of voltage when detecting micro-cantilever deformation, thereby the different electrical signals of exporting when measuring different micro-cantilever deformation, and then obtain the sample surfaces pattern.
A kind of atomic force microscope pick-up unit that lunar surface environment is carried out measurement in place of the present invention comprises probe, input and treatment circuit, microprocessor, also comprises control circuit and feedback control circuit that probe is controlled.Described control circuit is to the voltage signal of the three-dimensional scanner output X-Y of probe direction, driving micro-cantilever by three-dimensional scanner scans lunar surface material, deformation takes place in micro-cantilever in scanning process, the size of deformation quantity is recorded by input and treatment circuit, export feedback control circuit again to, send into microprocessor through feedback control circuit.
The atomic force microscope pick-up unit of described measurement in place, its microprocessor is forced into replacing treatment circuit and micro-cantilever by I/O mouth control probe in detecting, microprocessor is extremely popped one's head in by frequency converter V/F output micro-cantilever oscillator signal, microprocessor is extremely popped one's head in by D/A converter output X-Y direction control signal and output Z direction control signal, the deformation quantity size of input and treatment circuit output micro-cantilever, again through A/D converter to microprocessor.
The atomic force microscope pick-up unit of described measurement in place, the detection method of its measurement in place is: (A) adopt from the force sensitive element of perception micro-cantilever as atomic force microscope, the magnitude of voltage of resistance value of himself or generation can change during micro-cantilever deformation, resistance variations or change in voltage by input and treatment circuit detection micro-cantilever obtain an electric signal that characterizes the micro-cantilever deformation quantity; Micro-cantilever adopts the mode of operation of rapping, and a piezoelectric ceramic piece drives micro-cantilever with its resonant frequency vibration; (B) realize approaching of micro-cantilever and lunar surface material slightly to advance and carefully to advance two kinds of functions, slightly advance and carefully advance respectively and wait and realize by control step motor, control voice coil motor; When micro-cantilever and lunar surface material are close to the working range of atomic force microscope, the amplitude of micro-cantilever or position will change mutually; With this amplitude or position mutually the change of value detect, send into feedback control circuit, and then the control three-dimensional scanner, to keep amplitude or to be certain value mutually; (C) realize X-Y to lunar surface material to scanning by three-dimensional scanner control micro-cantilever, sweep limit from 0.1 μ m * 0.1 μ m to 800 μ m * 800 μ m; (D) in order to guarantee operate as normal, micro-cantilever is made the one-dimensional array formula, for sample one angle of inclination is arranged, and for the micro-cantilever probe that has damaged, can change automatically.
The advantage of the atomic force microscope of measurement in place of the present invention is: adopt from perception self check micrometer cantilever, need not add the micro-cantilever measurement mechanism; Adopt accurate preposition amplification and input and treatment circuit to detect the size of micro-cantilever deformation; Has the micro-cantilever probe from detecting and changing function automatically; Apparatus is small and exquisite, and is simple; Have high measurement stability and measuring accuracy; The overall dimensions of device are less than Φ 120 * 30; Can adapt to high low temperature and ultra-high vacuum environment; Can work in the lunar surface environment, realize measurement in place lunar surface material.
Description of drawings
Fig. 1 is the measuring principle synoptic diagram of pick-up unit of the present invention.
Fig. 2 is the connection diagram of microprocessor and other parts.
Fig. 3 is an array micro-cantilever structural drawing.
Fig. 4 is the workflow diagram of pick-up unit of the present invention.
Among the figure: 1. micro-cantilever 2. potsherds, 3. three-dimensional scanner 4. lunar surface materials, 5. control circuit 6. feedback control circuits, 7. input and treatment circuit 8. microprocessors 801. probes detect and change treatment circuit 802. micro-cantilevers and slightly force into 803. micro-cantilever oscillator signal 804.X-Y direction control signal 805.Z to control signal
Embodiment
The present invention is described in further detail below in conjunction with accompanying drawing.
The present invention is a kind of atomic force microscopic detecting method and device that carries out measurement in place at lunar surface environment, with pressure resistance type or piezoelectric type micro-cantilever 1 as from the perception force transducer, when deformation takes place in micro-cantilever 1, resistance value of self or magnitude of voltage will change, by input and treatment circuit 7, the charge value that changes is detected the deformation that can determine micro-cantilever 1.Rapping vibration with natural resonance frequency from perception micro-cantilever 1 on lunar surface material 4 under the incentive action of piezoelectric ceramic piece 2, the needle point of micro-cantilever 1 is in the process of vibrating up and down each time, and the bottom all contacts gently with lunar surface material 4.This contact is very of short duration, can damage not arranged to lunar surface material 4.When probe during near lunar surface material, micro-cantilever 1 changes the amplitude of probe and position with the interaction force of lunar surface material 4 mutually.Control this amplitude just can control probe in each oscillatory process with the acting force of moonscape.Feedback control circuit 6 is by regulating three-dimensional scanner 3, make it when doing X-Y scanning, moves up and down according to the dipping and heaving of lunar surface material, thereby amplitude is remained unchanged in scanning process.The fluctuating information of lunar surface material every bit place scanner obtains lunar material surface topography image by computer recording after signal conversion processes, also can obtain the phase image of lunar surface material according to the variation of phase place, and its measuring principle as shown in Figure 1.
The atomic force microscope pick-up unit that under lunar surface environment, carries out measurement in place of the present invention, comprise probe, input and treatment circuit 7, microprocessor 8 and control circuit 5 and feedback control circuit 6 that probe is controlled, the voltage signal of described control circuit 5 output X-Y directions is given the three-dimensional scanner 3 of probe, driving 1 pair of lunar surface material 4 of micro-cantilever by three-dimensional scanner 3 scans, deformation takes place in micro-cantilever 1 in scanning process, FEEDBACK CONTROL 6 is measured and exported to the size of deformation quantity by input and treatment circuit 7, sends into microprocessor 8 through FEEDBACK CONTROL 6.
Detection method of carrying out the atomic force microscope pick-up unit of measurement in place of the present invention is:
(A) adopt from the force sensitive element of perception micro-cantilever 1 as atomic force microscope, the magnitude of voltage of resistance value of himself or generation can change during micro-cantilever 1 deformation, resistance variations or change in voltage by input and treatment circuit 7 detection micro-cantilevers 1 obtain an electric signal that characterizes micro-cantilever 1 deformation quantity; Micro-cantilever 1 adopts the mode of operation of rapping, and piezoelectric ceramic piece 2 drives micro-cantilever 1 with its resonance frequency vibration;
(B) realize approaching of micro-cantilever 1 and lunar surface material 4 slightly to advance and carefully to advance two kinds of functions, slightly advance and carefully advance respectively and wait and realize by control step motor, control voice coil motor; When micro-cantilever 1 and lunar surface material 4 are close to the working range of atomic force microscope, the amplitude of micro-cantilever 1 or position will change mutually; With this amplitude or position mutually the change of value detect, send into feedback control circuit 6, and then control three-dimensional scanner 3, to keep amplitude or to be certain value mutually;
(C) realize X-Y to lunar surface material 4 to scanning by three-dimensional scanner 3 control micro-cantilevers 1, sweep limit from 0.1 μ m * 0.1 μ m to 800 μ m * 800 μ m;
(D) in order to guarantee operate as normal, micro-cantilever 1 is made the one-dimensional array formula, and it has an angle of inclination with respect to lunar surface material 4, for the probe that damages in the micro-cantilever 1, adopt probe in detecting and replacing system to change automatically.
Atomic force microscope pick-up unit of the present invention has following characteristics:
1, adopt pressure resistance type or piezoelectric type from the perception micro-cantilever, to substitute traditional optical detection cantilever that declines.Characteristics are that resistance value of himself or voltage signal values can change during micro-cantilever deformation, by detecting variation its resistance or voltage to detect the deformation of micro-cantilever, need not add pick-up unit;
2, cantilever adopts and to rap/mode of operation of phase place;
3, by control micro-cantilever scanning realize the scanning of atomic force microscope to lunar surface material, X-Y to the maximum scan scope can reach: 800 μ m * 800 μ m;
4, adopt the micro-cantilever of array, it has an angle of inclination with respect to lunar surface material.After the micro-cantilever probe that is used for imaging damages, adopt a special device that it is cleared up, work on the next micro-cantilever that is close to;
5, the image of gathering is stored, beamed back the earth then; The operation of instrument is straighforward operation fully, finishes automatically.
The atomic force microscope pick-up unit of measurement in place of the present invention can be under the UHV condition of moonscape, and promptly vacuum tightness is 10
-14Atmospheric pressure (10
-9Pa) operate as normal under; Can be operate as normal under-180～+ 150 ℃ the condition in Lunar surface temperature; Can under moonscape cosmic ray and solar wind intense radiation conditions, work, have, and components and parts are carried out redundant configuration from detection, self-protection function; The acceleration of 6g in the time of standing rocket launching and landing moonscape; Self check, automatic control, recovery, computer control certainly can be carried out, straighforward operation can be carried out on earth; Probe size weighs less than 500 grams less than Φ 120 * 30, and energy consumption is less than 10W, can be as the useful load on soft landing platform and the lunar rover.
Fig. 2 is a system chart of the present invention.Variation from the variation electric signal of perception micro-cantilever 1 output is measured micro-cantilever Oscillation Amplitude or phase place behind input and treatment circuit 7 is input to microprocessor unit 8 by the A/D conversion circuit.In microprocessor unit 8, to carry out soft closed loop PID and signal Processing and calculate, calculated amount is after the D/A conversion, and output Z to component, is an often value to keep micro-cantilever Oscillation Amplitude or phase place to the Z of control signal 805 control three-dimensional scanners.Output sine-wave oscillation signal drives piezoelectric ceramic piece 2 in the microprocessor unit 8, and then drives micro-cantilever with its resonance frequency vibration.By output certain voltage signal to the X-Y of three-dimensional scanner 3 to, control micro-cantilever 1 at X-Y to scanning.
Fig. 3 is an array micro-cantilever synoptic diagram.This array micro-cantilever 1 is made up of from perception micro-cantilever probe 4～10 band needle points.When on lunar surface material 4, scanning,, can then use the adjacent next one successively if one has been damaged.
Fig. 4 is the system operation programs block diagram.After atomic force microscope is placed on the moonscape, system at first carries out initialization, carry out System self-test then, after confirming that all normally, begin the micro-cantilever probe is carried out self check, if there is a probe to damage, then change automatically damaging probe, up to confirm the micro-cantilever probe all normal after, enter duty, the micro-cantilever probe is started vibration.Start automatic inserting needle function, realize approaching of micro-cantilever probe and lunar surface material, enter the atomic force reach, under the soft closed-loop working state of system, three-dimensional scanner Z is to the control micro-cantilever.System enters X-Y to the scanning work state then.The X-Y of computer acquisition three-dimensional scanner to voltage signal, deposits video memory to voltage signal and Z in, and wait command sends to lunar rover, is transferred to the earth again.
Claims (10)
1, a kind of atomic force microscope pick-up unit that lunar surface environment is carried out measurement in place, comprise probe, input and treatment circuit 7, microprocessor 8, it is characterized in that: also comprise control circuit 5 and feedback control circuit 6 that probe is controlled, the voltage signal of described control circuit 5 output X-Y directions is given the three-dimensional scanner 3 of probe, driving 1 pair of lunar surface material 4 of micro-cantilever by three-dimensional scanner 3 scans, deformation takes place in micro-cantilever 1 in scanning process, feedback control circuit 6 is measured and exported to the size of deformation quantity by input and treatment circuit 7, sends into microprocessor 8 through feedback control circuit 6.
2, the atomic force microscope pick-up unit of measurement in place according to claim 1, it is characterized in that: described microprocessor 8 by I/O mouth control probe in detecting with change treatment circuit 801 and micro-cantilever and slightly force into 802, microprocessor 8 is exported micro-cantilever oscillator signal 803 to probe by frequency converter V/F, microprocessor 8 by D/A converter output X-Y direction control signal 804 and output Z direction control signal 805 to probe, the deformation quantity size that input and treatment circuit 7 are exported micro-cantilevers through A/D converter to microprocessor 8.
3, the atomic force microscope pick-up unit of measurement in place according to claim 1 is characterized in that: described microprocessor 8 is chosen the TMS320C family chip, D/A converter chip model DAC8412, A/D converter chip model AD7532.
4, the atomic force microscope pick-up unit of measurement in place according to claim 1 is characterized in that the detection method of measurement in place is:
(A) adopt from the force sensitive element of perception micro-cantilever 1 as atomic force microscope, resistance value of himself or voltage signal values can change during micro-cantilever 1 deformation, resistance variations or change in voltage by input and treatment circuit 7 detection micro-cantilevers 1 obtain an electric signal that characterizes micro-cantilever 1 deformation quantity; Micro-cantilever 1 adopts the mode of operation of rapping, and a piezoelectric ceramic piece 2 drives micro-cantilever 1 with its resonant frequency vibration;
(B) realize approaching of micro-cantilever 1 and lunar surface material 4 slightly to advance and carefully to advance two kinds of functions, slightly advance by the stepper motor in the control three-dimensional scanner 3 and realize, carefully advance by the control voice coil motor and finish; When micro-cantilever 1 and lunar surface material 4 are close to the working range of atomic force microscope, the amplitude of micro-cantilever 1 or position will change mutually; The change of this amplitude or position phase is detected, send into feedback control circuit 6, and then control three-dimensional scanner 3, be certain value mutually to keep amplitude or position;
(C) realize X-Y to lunar surface material 4 to scanning by three-dimensional scanner 3 control micro-cantilevers 1, sweep limit from 0.1 μ m * 0.1 μ m to 800 μ m * 800 μ m;
(D) in order to guarantee operate as normal, micro-cantilever 1 is made the one-dimensional array formula, and it has an angle of inclination with respect to lunar surface material 4, for the probe that damages in the micro-cantilever 1, adopt probe in detecting and replacing system to change automatically.
5, the atomic force microscope pick-up unit of measurement in place according to claim 1 is characterized in that: can be under the UHV condition of moonscape, and promptly vacuum tightness is 10
-14Atmospheric pressure (10
-9Pa) operate as normal under.
6, the atomic force microscope pick-up unit of measurement in place according to claim 1 is characterized in that: can be operate as normal under-180～+ 150 ℃ the condition in Lunar surface temperature.
7, the atomic force microscope pick-up unit of measurement in place according to claim 1 is characterized in that: can work under moonscape cosmic ray and solar wind intense radiation conditions, have from detection, self-protection function, and components and parts are carried out redundant configuration.
8, the atomic force microscope pick-up unit of measurement in place according to claim 1 is characterized in that: the acceleration of the 6g in the time of standing rocket launching and landing moonscape.
9, the atomic force microscope pick-up unit of measurement in place according to claim 1 is characterized in that: can carry out self check, automatic control, recovery, computer control certainly, can carry out straighforward operation on earth.
10, the atomic force microscope pick-up unit of measurement in place according to claim 1 is characterized in that: probe size weighs less than 500 grams less than Φ 120 * 30, and energy consumption is less than 10W, can be as the useful load on soft landing platform and the lunar rover.
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| Application Number | Priority Date | Filing Date | Title |
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| CNA2006100658312A CN1821743A (en) | 2006-03-27 | 2006-03-27 | Atomic force microscopic detecting method and device for moonscape environment locating measurement |
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| CNA2006100658312A CN1821743A (en) | 2006-03-27 | 2006-03-27 | Atomic force microscopic detecting method and device for moonscape environment locating measurement |
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Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102426269A (en) * | 2011-08-31 | 2012-04-25 | 北京大学 | Low-temperature scanning near field optical microscope |
| CN102485640A (en) * | 2010-12-03 | 2012-06-06 | 中国科学院沈阳自动化研究所 | Task-oriented mixed mode nano operation method based on atomic force microscope |
| CN103185811A (en) * | 2011-12-29 | 2013-07-03 | 中国科学院沈阳自动化研究所 | Atomic force microscope probe expanding working method |
| CN104865409A (en) * | 2015-05-07 | 2015-08-26 | 天津大学 | Novel tuning fork probe-based dual-frequency atomic force test system and method |
| CN109444474A (en) * | 2018-12-19 | 2019-03-08 | 天津职业技术师范大学 | A kind of adaptive step-scan module and its Three-dimensional atom force microscope and control method |
| CN109870593A (en) * | 2017-12-01 | 2019-06-11 | 中国科学院宁波材料技术与工程研究所 | A kind of method of excitation probe vibration in atomic force microscope |
| CN109900930A (en) * | 2019-03-04 | 2019-06-18 | 河海大学 | A kind of asphalt modification effect evaluation method based on atomic force microscope |
| WO2020206826A1 (en) * | 2019-04-09 | 2020-10-15 | 天津大学 | Ultra-thin atomic force microscope head |
| CN114199743A (en) * | 2021-12-13 | 2022-03-18 | 深圳大学 | System and method for measuring lunar soil particle interaction force in simulated lunar environment |
| WO2023030472A1 (en) * | 2021-09-03 | 2023-03-09 | 百及纳米科技(上海)有限公司 | Probe device, and probe control apparatus and method |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102485640A (en) * | 2010-12-03 | 2012-06-06 | 中国科学院沈阳自动化研究所 | Task-oriented mixed mode nano operation method based on atomic force microscope |
| CN102426269B (en) * | 2011-08-31 | 2013-05-08 | 北京大学 | Low-temperature scanning near field optical microscope |
| CN102426269A (en) * | 2011-08-31 | 2012-04-25 | 北京大学 | Low-temperature scanning near field optical microscope |
| CN103185811A (en) * | 2011-12-29 | 2013-07-03 | 中国科学院沈阳自动化研究所 | Atomic force microscope probe expanding working method |
| CN104865409A (en) * | 2015-05-07 | 2015-08-26 | 天津大学 | Novel tuning fork probe-based dual-frequency atomic force test system and method |
| CN104865409B (en) * | 2015-05-07 | 2017-12-05 | 天津大学 | Double frequency atom force test system and method based on new tuning fork probe |
| CN109870593A (en) * | 2017-12-01 | 2019-06-11 | 中国科学院宁波材料技术与工程研究所 | A kind of method of excitation probe vibration in atomic force microscope |
| CN109444474A (en) * | 2018-12-19 | 2019-03-08 | 天津职业技术师范大学 | A kind of adaptive step-scan module and its Three-dimensional atom force microscope and control method |
| CN109900930A (en) * | 2019-03-04 | 2019-06-18 | 河海大学 | A kind of asphalt modification effect evaluation method based on atomic force microscope |
| WO2020206826A1 (en) * | 2019-04-09 | 2020-10-15 | 天津大学 | Ultra-thin atomic force microscope head |
| WO2023030472A1 (en) * | 2021-09-03 | 2023-03-09 | 百及纳米科技(上海)有限公司 | Probe device, and probe control apparatus and method |
| CN114199743A (en) * | 2021-12-13 | 2022-03-18 | 深圳大学 | System and method for measuring lunar soil particle interaction force in simulated lunar environment |
| CN114199743B (en) * | 2021-12-13 | 2024-05-10 | 深圳大学 | System and method for measuring lunar soil particle interaction force in pseudo-lunar environment |
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