CN109870593A - A kind of method of excitation probe vibration in atomic force microscope - Google Patents
A kind of method of excitation probe vibration in atomic force microscope Download PDFInfo
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- CN109870593A CN109870593A CN201711249013.2A CN201711249013A CN109870593A CN 109870593 A CN109870593 A CN 109870593A CN 201711249013 A CN201711249013 A CN 201711249013A CN 109870593 A CN109870593 A CN 109870593A
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Abstract
The present invention provides a kind of method of excitation probe vibration in atomic force microscope, and PZT (piezoelectric transducer) is arranged below the probe, which generates the mechanical oscillation of vertical direction under signal source effect, and probe issues raw vibration in the mechanical oscillation wave excitation.It is vibrated with existing using probe driver excitation cantilever arm, to which the method for driving probe to vibrate is compared, middle probe needle point of the present invention is easier to shake off the adhesion strength of sample surfaces and the effect of capillary force carries out stable vibration, be conducive to steadily scanning imagery, high-resolution scan image is obtained, and reduces the high performance requirements to cantilever.
Description
Technical field
The present invention relates to excitation probes in atomic force microscope technology field more particularly to a kind of atomic force microscope to vibrate
Method.
Background technique
Atomic force microscope (Atomic Force Microscope, AFM) is after scanning tunneling microscope (Scanning
Tunneling Microscope, STM) after invent one kind have the high-resolution new instrument of atom level, can be in atmosphere
With the physical property for carrying out nano-area to a variety of materials and sample under liquid environment include that pattern detects, or directly into
Row nano-manipulation；It has been widely used in semiconductor, nano-functional material, biology, chemical industry, food, medical research and Research Center
In the fields such as the research experiment of various nanometer related disciplines, become the basic tool of nano science research.
Have in atomic force microscope a nanoscale probe be fixed on can on the micron order elastic cantilever of sensitive manipulation,
When probe is close to sample, the atom and the interatomic active force of sample surfaces on top can make cantilever bending, deviate original
Position.3-D image is rebuild according to the bias of probe when scanning sample or vibration amplitude, sample surfaces can be obtained indirectly
Pattern or composition information.
According to the difference of probe and sample effect power property, there are mainly three types of imaging patterns by AFM: contact mode (contact
Mod), noncontact mode (non-contact mode) and tapping-mode (tapping mode).
Contact mode AFM, probe tip are kept in contact with sample surfaces always, when flying-spot tube guidance needle point is above sample
When inswept (or sample moves below needle point), existing coulomb repulsion power keeps cantilever generation curved between contacting with each other the electronics of atom
Song, to reflect the fluctuating of pattern.Contact mode can be stablized, high-resolution image, however due to needle point and sample
Between contact with each other and active force is very big, so be easy to causeing the deformation and tip wear of sample.
In noncontact mode, needle point and sample work in attraction effect section, and needle point is not contacted always with sample room, visited
Needle vibrates near its resonant frequency, and the height by adjusting needle point controls tip vibration amplitude or frequency-invariant, to keep needle point
With the constant space of sample.Noncontact mode is suitble to scan soft sample, but realizes this mode very under atmosphere at room temperature environment
It is difficult.Because sample surfaces inevitably gather one layer of very thin water, it can set up one layer small between sample and needle point
Small wick bridge inhales on needle point and surface together, to increase tip to the pressure on surface, cause image data unstable and
Destruction to sample.Therefore, the success rate that noncontact mode operates in air is lower, and use is less.
Tapping-mode is between contact mode and noncontact mode.Compared with contact mode, tapping-mode contacts sample
When generated lateral force be obviously reduced.Compared with noncontact mode, its main feature is that scanning process middle probe is also oscillation, and
With the amplitude (be greater than 20nm) bigger than noncontact mode.Needle point taps sample, needle point and sample in the bottom of vibration period
Interaction its amplitude or resonant frequency can be changed, protected using amplitude or frequency as feedback signal by adjusting the height of needle point
Hold the constant space of needle point and sample.When therefore detecting soft sample in air, the tapping-mode of AFM is preferably to select
It selects.
As shown in Figure 1, generally being vibrated using probe driver excitation cantilever arm in noncontact mode and tapping-mode.
The probe driver routinely used at present is piezoelectric ceramic actuator, and piezoelectric ceramic actuator generates one under signal source effect
Exchange vibration, which directly acts on cantilever root, is transferred to probe tip from cantilever root, thus drive cantilever with it is whole
A probe oscillation.Since driving force acts only on the root of cantilever, during probe tip scans sample, sample surfaces
Adhesion strength and capillary force will generate downward suction to needle point, to inhibit probe oscillation, cause under probe oscillation amplitude
Drop, or even zero is fallen to, and then influence scanning imagery, cause imaging to fail.
In order to avoid such case, usually require that cantilever has high coefficient of elasticity (20-60N/m), resonant frequency and big
Driving force, destroy the original of sample when but will increase equipment requirement in this way, while also will cause in tapping-mode imaging
Structure, especially for soft sample, such as hanging graphene film, gel sample etc., it is also possible to destruction or mobile sample
Product, and needle point can be polluted, increase the contact area of needle point and sample, stable high-resolution imaging is made to become more difficult.
Summary of the invention
Status in view of the above technology, the method that the present invention proposes excitation probe vibration in a kind of atomic force microscope, the party
Method is simple and easy, can directly excitation probe make its vibration.
The technical solution of the present invention is as follows: a kind of method that excitation probe is vibrated in atomic force microscope, it is characterized in that: in institute
It states and PZT (piezoelectric transducer) is set below probe, which generates the mechanical oscillation of vertical direction under signal source effect,
The mechanical oscillation wave excitation test needle vibrates.
The signal source is unlimited, can be function generator.
As a kind of implementation, sample is fixed on PZT (piezoelectric transducer) surface.Preferably, sample passes through coupling
Mixture is fixed on PZT (piezoelectric transducer) surface.
It is vibrated with existing using probe driver excitation cantilever arm, so that the method for driving probe to vibrate is compared, the present invention
It has the following beneficial effects:
(1) motivational techniques of the invention are used, probe is directly vibrated by the excitation of mechanical vibration wave, realization pair
The direct precise and tiny control of probe, thus vibrated with existing using probe driver excitation cantilever arm, so that probe be driven to shake
Dynamic method is compared, and probe tip is easier to shake off the adhesion strength of sample surfaces and the effect of capillary force carries out stable vibration
It is dynamic, be conducive to steadily scanning imagery, obtain high-resolution scan image, and reduces the high performance requirements to cantilever.
(2) method of the invention is suitable for the probe vibrational excitation of all vibration mode atomic force microscope, including non-connects
Other spin-off models of touch formula and tapping-mode and tapping-mode: such as magnetic force microscopy, electrostatic force microscope.The party
When method is imaged for tapping-mode, the realization possibility of stable high-resolution imaging is increased, especially for soft sample,
Such as hanging graphene film, gel sample etc., there is imaging advantage；When for noncontact mode imaging, it can be improved in sky
The success rate of noncontact mode is realized in gas.
(3) motivational techniques of the invention are used, without requiring cantilever that there is very high coefficient of elasticity, resonant frequency and big
Driving force reduces the requirement to equipment.
In order to avoid such case, usually require that cantilever has high coefficient of elasticity (20-60N/m), resonant frequency and big
Driving force, destroy the original of sample when but will increase equipment requirement in this way, while also will cause in tapping-mode imaging
Structure, especially for soft sample, such as hanging graphene film, gel sample etc., it is also possible to destruction or mobile sample
Product, and needle point can be polluted, increase the contact area of needle point and sample, stable high-resolution imaging is made to become more difficult.
Detailed description of the invention
Fig. 1 is the energisation mode structural schematic diagram of conventional AFM probe vibration；
Fig. 2 is in the embodiment of the present invention 1 using the structural schematic diagram of mechanical vibration wave excitation probe vibration；
Fig. 3 is the probe vibration frequency-amplitude obtained in the embodiment of the present invention 1 using the vibration of mechanical vibration wave excitation probe
Response curve；
Fig. 4 is the probe vibration frequency-vibration obtained in comparative example 1 using conventional energisation mode excitation probe vibration
Width response curve；
Fig. 5 is the hanging graphene sample shape obtained in the embodiment of the present invention 1 using the vibration of mechanical vibration wave excitation probe
Looks figure；
Fig. 6 is the hanging graphene sample obtained in comparative example 1 using conventional energisation mode excitation probe vibration
Shape appearance figure.
Specific embodiment
Below with reference to embodiment, present invention is further described in detail, it should be pointed out that embodiment described below purport
It is being convenient for the understanding of the present invention, and is not playing any restriction effect to it.
Embodiment 1:
In the present embodiment, using the atomic force microscope of model Aglient 5500, there is one in atomic force microscope
Nanoscale probe is fixed on micron order elastic cantilever, which is the silicon probe that force constant is 0.1N/m.
In the present embodiment, sample is graphene, which is covered on the silicon substrate of the hole configurations with 250nm depth
On bottom, the hanging graphene sample in part is formed.
As shown in Fig. 2, PZT (piezoelectric transducer) is fixed on the sample stage of atomic force microscope, sample is passed through into glycerol
It is fixed on PZT (piezoelectric transducer) surface；
Probe is located above sample, by probe close to sample surfaces.It can make first with the contact mode of atomic force microscope
Needle point contacts sample, then raises needle point again, raising distance may be configured as 5um-100um.In the present embodiment, it is set as
10um。
It is generated using atomic force microscope and drives piezoelectricity using the continuous continuous sinusoidal excitation voltage of function generator generation
Energy converter generates the mechanical oscillation of vertical direction, and probe issues raw vibration in the mechanical oscillation wave excitation.
Using the frequency-amplitude response curve of atomic force microscope test mechanical vibration wave excitation test needle vibration, as a result
As shown in figure 3, display does not have miscellaneous peak interference using the formant that mechanical vibration wave driving obtains, signal-to-noise ratio is high.
The driving voltage frequency and amplitude that PZT (piezoelectric transducer) is arranged are respectively 11.2KHz and 5v, at this time probe free vibration
Amplitude be about 50nm, be imaged using atomic force microscope tapping-mode.It can using mechanical vibration wave driving probe vibration
Obtain clearly feature image, high resolution, as shown in Figure 5.
Comparative example 1:
In the present embodiment, atomic force microscope, probe and sample with it is identical in embodiment 1.
Sample is placed on the sample stage of atomic force microscope.Probe is located above sample, by probe close to sample
Surface.Needle point can be made to contact sample first with the contact mode of atomic force microscope, then raise needle point again, raising distance can
It is set as 5um-100um.In the present embodiment, it is set as 10um.
As shown in Figure 1, an exchange vibration, the vibration are generated under the effect of function generator source using piezoelectric ceramic actuator
Power directly acts on cantilever root, is transferred to probe tip from cantilever root, so that cantilever and entire probe be driven to vibrate.
Using the frequency-amplitude response curve of atomic force microscope test mechanical vibration wave excitation test needle vibration, as a result
As shown in Figure 4.Figure 4, it is seen that compared with Fig. 3, using Conventional piezoelectric ceramics motivate the lower formant obtained exist compared with
More miscellaneous peak interference, signal-to-noise ratio are low.
Setting probe driver driving voltage frequency and amplitude are respectively 11.2KHz and 1v, probe free vibration at this time
Amplitude is about 50nm, is imaged using atomic force microscope tapping-mode, image is as shown in Figure 6.From fig. 6 it can be seen that
Compared with Fig. 5, image is fuzzy, there is noise.That is, vibrated using identical probe using excitation probe under conventional energisation mode,
Under tapping-mode, identical region can not obtain full resolution pricture.
Technical solution of the present invention is described in detail in embodiment described above, it should be understood that the above is only
For specific embodiments of the present invention, it is not intended to restrict the invention, all any modifications made in spirit of the invention,
Supplement or similar fashion substitution etc., should all be included in the protection scope of the present invention.
Claims (8)
1. a kind of method that excitation probe is vibrated in atomic force microscope is changed it is characterized in that: piezoelectricity is arranged below the probe
Energy device, the PZT (piezoelectric transducer) generate the mechanical oscillation of vertical direction under signal source effect, and probe is in the mechanical oscillation wave excitation
It is lower to vibrate.
2. the method that excitation probe is vibrated in atomic force microscope as described in claim 1, it is characterized in that: the signal source
It is function generator.
3. the method that excitation probe is vibrated in atomic force microscope as described in claim 1, it is characterized in that: sample is fixed
In PZT (piezoelectric transducer) surface.
4. the method that excitation probe is vibrated in atomic force microscope as described in claim 1, it is characterized in that: sample passes through
Couplant is fixed on PZT (piezoelectric transducer) surface.
5. the method that excitation probe is vibrated in atomic force microscope as described in claim 1, it is characterized in that: using non-contact mould
Formula is scanned imaging to sample.
6. the method that excitation probe is vibrated in atomic force microscope as described in claim 1, it is characterized in that: using tapping-mode
Imaging is scanned to sample.
7. such as the method for excitation probe vibration in atomic force microscope described in claim 5 or 6, it is characterized in that: sample
It is soft sample.
8. the method that excitation probe is vibrated in atomic force microscope as claimed in claim 7, it is characterized in that: sample is outstanding
Graphene film, the gel sample of sky.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| WO2022151645A1 (en) * | 2021-01-15 | 2022-07-21 | 长鑫存储技术有限公司 | Dimension measurement method and device for semiconductor structure |
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