CN109444474A - A kind of adaptive step-scan module and its Three-dimensional atom force microscope and control method - Google Patents
A kind of adaptive step-scan module and its Three-dimensional atom force microscope and control method Download PDFInfo
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- CN109444474A CN109444474A CN201811559582.1A CN201811559582A CN109444474A CN 109444474 A CN109444474 A CN 109444474A CN 201811559582 A CN201811559582 A CN 201811559582A CN 109444474 A CN109444474 A CN 109444474A
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- probe
- driver
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- data collecting
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
Abstract
The invention discloses a kind of adaptive step-scan module and its Three-dimensional atom force microscope and control methods, the adaptive step-scan module includes Intelligence Feedback controller, six axle position moving stage, data collecting card and control module, wherein, the probe driver of the atomic force microscope is driven by the six axle positions moving stage with run-off the straight, the probe driver is connect with the Intelligence Feedback controller communication, the Intelligence Feedback controller passes through the data collecting card and the control module communication connection, the data collecting card and the six axle positions moving stage communication connection.The module can realize the precise measurement of sample two sides side wall.
Description
Technical field
The present invention relates to atomic force microscope technology field, more particularly to it is a kind of towards Three-dimensional atom force microscope from
Adapt to step-scan module.
Background technique
Atomic force microscope (AFM) can be used for testing the surface topography of the micro-nano structures such as insulator, conductor, semiconductor, survey
It is higher (longitudinal up to 0.01nm) to try resolution ratio, and in test process to sample without damage, be applied widely.At present
Semi-conductor industry production field, the groove processing dimension in ic processing is smaller and smaller (within 30nm), atomic force
Microscope is with its high-resolution advantage by favor.
The basic functional principle of atomic force microscope is: sample surface is contacted using the micro-cantilever of Integrated Probe,
The two apart from it is close when, generate active force between probe tip atom and sample surfaces atom, which causes micro-cantilever
Deformation, deflection amplify through optical lever and are converted to electric signal by photodetector, acquire through computer and read and show.It utilizes
Piezoelectric ceramic actuator driving probe carries out the scanning in tri- directions X, Y and Z on sample, Z-direction setting force value, using anti-
Feedback controller controls the constant two dimensional image for obtaining sample surface morphology of the active force.
Traditional AFM is there are three types of scan pattern: contact, tapping and non-contact.Under contact mode, needle point during the scanning process one
Sample is directly touched, repulsive force its main function between the two atom, but sample is easily damaged under the mode.Noncontact mode
Under, attraction is mainly shown as between needle point and sample, test is unstable, and resolution ratio is lower.Under tapping-mode, needle point is in humorous
Vibration state, periodic contact sample surfaces, resolution ratio is higher, but scanning speed is lower.
Semiconductor industry, micro-nano structure groove side wall dimensions (such as sidewall roughness, side wall inclination angle) directly affect device
The electric property of part.However, side side can only be measured when AFM measures semiconductor structure groove size under three of the above mode
Wall pattern, and accuracy is lower.This severely limits AFM further applying on semi-conductor industry production line.Therefore, a kind of
It can realize that the scanning technique that sidewall profile is accurately tested is very necessary towards 3D-AFM.
Summary of the invention
The purpose of the present invention is all can only for contact existing in the prior art, tapping and non-contact three kinds of scan patterns
The problem of measuring side sidewall profile, and provide it is a kind of be integrated in traditional AFM system towards Three-dimensional atom force microscope
Adaptive step-scan module add the module on the basis of conventional atom force microscope, sample two sides side can be realized
The accurate test of wall pattern.
Another aspect of the present invention is to provide the control method of the adaptive step-scan module, passes through adaptive scanning
Method realizes the precise measurement of sidewall profile, improves the accuracy of measurement.
The present invention also provides application of the control method in semiconductor topography measurement, can accurately carry out to side wall
Measurement.
The technical solution adopted to achieve the purpose of the present invention is:
Adaptive step-scan module towards Three-dimensional atom force microscope, which is characterized in that controlled including Intelligence Feedback
Device, six axle position moving stage, data collecting card and control module, wherein the probe driver of the atomic force microscope is by described six
Axle position moving stage drives with run-off the straight, and the probe driver is connect with the Intelligence Feedback controller communication, and the intelligence is anti-
Controller is presented by the data collecting card and the control module communication connection, the data collecting card and six axial displacement
Platform communication connection.
In the above-mentioned technical solutions, the six axle positions moving stage is the sufficient displacement platform H840 of six axis six.
In the above-mentioned technical solutions, the Intelligence Feedback controller is dsp chip.
In the above-mentioned technical solutions, the dsp chip passes through external modulus conversion chip AD7725 and analog-digital chip
AD5542 is connected with the probe driver.
In the above-mentioned technical solutions, the dsp chip by the CLKR pin of built-in multichannel buffer interface McBSP0,
FSR pin, DR0 pin are connected with the SCO pin of the modulus conversion chip AD7725, FSO pin, pin SDO respectively；
The CLKX pin of the dsp chip, FSX pin, DX0 pin are respectively with the analog-digital chip AD5542's
SCLK pin, REFS pin, DIN pin are connected；
The external modulus conversion chip AD7725 connects the probe with the output end of analog-digital chip AD5542 and drives
The input terminal of dynamic device.
In the above-mentioned technical solutions, the data collecting card is PXI-6366 high-speed data acquisition card.
In the above-mentioned technical solutions, the control module passes through the 0th channel pin of the data collecting card PXI-6366
AI0 is connected with the pin Vout of the analog-digital chip AD5542.
Another aspect of the present invention further includes Three-dimensional atom force microscope, including the adaptive step-scan module,
Probe driver, micro-cantilever, sample driver and traverse driver, wherein the bottom of the probe driver is fixed with micro-
Cantilever beam is integrated with probe on the micro-cantilever, the sample driver for driving sample mobile in X-axis, Y direction,
The sample driver and the Lateral Controller communication connection, the Lateral Controller by the data collecting card with it is described
Control module communication connection.
In the above-mentioned technical solutions, the probe driver is high rigidity piezoelectric ceramics actuator P-841.1,
Another aspect of the present invention further includes the control method of the adaptive step-scan module, which is characterized in that
The following steps are included:
Step 1, integrally carry out blind sweep to sample: probe driver drives probe to approach sample with constant force, and probe contacts sample
When product, the elevation information of this scanning element is obtained by the output of Intelligence Feedback controller, probe driver drives probe in Z axis side
It is lifted up operational height, while sample driver driving sample moves in the x and y directions, wait move on to next scanning element,
The elevation information of the scanning element is acquired, while recording three coordinate informations of the scanning element, is so recycled, pre-scan images number is obtained
According to being stored in control module after being exported by data collecting card；
Step 2, control module positions sidewall locations according to pre-scan images data, and according to the scanning element Z-direction
The variation size of altitude information determines to be stored after each scanning element needs inclined angle；
Step 3, scan sidewall locations: control module is corresponding by each scanning element of sidewall locations by the data collecting card
Tilt angle be sent to the six axle positions moving stage, atomic force microscope acquires the location information of the scanning element of sidewall locations, tool
Body, the six axle positions moving stage drives probe driver rotation to drive the probe to rotate, and realizes probe to the adaptive of side wall
It should tilt, the probe after inclination is moved in the Z-axis direction by the driving of probe driver, the height letter of sidewall locations at acquisition one
Breath acquires three coordinate informations of all sidewall locations, obtains as sample driver driving sample moves in X, Y direction
The three-dimensional appearance information of sample.
In the above-mentioned technical solutions, in the step 2, when altitude information variation is less than 50nm, probe tilt angle is
5 °, when altitude information variation, which is greater than 50nm, is less than 200nm, probe tilt angle is 10 °, when altitude information variation is greater than
When 200nm is less than 300nm, probe tilt angle is 15 °, when altitude information, which is greater than 300nm, is less than 500nm, probe inclination angle
Degree is 20 °.
Another aspect of the present invention, application of the control method in semiconductor topography measurement.
Compared with prior art, the beneficial effects of the present invention are:
1, present invention can apply to traditional AFM is improved to 3D-AFM, is realized to semiconductor junction in traditional AFM system
The accurate test of structure bilateral side wall, and then realize the topography analyzer.
2, the present invention is greatly improved the scanning speed of AFM, improves the working efficiency of AFM.
3, the present invention can eliminate the influence of needle point cross force and frictional force to test result, improve test accuracy, simultaneously
Destruction of the needle point to sample surface morphology and characteristic can also be greatly reduced, while improving the service life of needle point.
Detailed description of the invention
Fig. 1 is Three-dimensional atom power microscopic system structure chart.
Fig. 2 is that ((a) is blind sweep to adaptive step-scan mode working principle diagram, (b) is 3-D scanning mould of the invention
Formula).
Specific embodiment
The present invention is described in further detail below in conjunction with the drawings and specific embodiments.It should be appreciated that described herein
Specific embodiment be only used to explain the present invention, be not intended to limit the present invention.
Embodiment 1
Adaptive step-scan module towards Three-dimensional atom force microscope, including Intelligence Feedback controller, six axial displacements
Platform, data collecting card and control module, wherein the probe driver of the atomic force microscope is driven by the six axle positions moving stage
With run-off the straight, the probe driver is connect with the Intelligence Feedback controller communication, and the Intelligence Feedback controller passes through
The data collecting card and the control module communication connection, the data collecting card and the six axle positions moving stage communication connection.
The bottom of the probe driver of conventional atom force microscope is fixed with micro-cantilever, is integrated on the micro-cantilever
Probe, the probe driver drive the probe in the present embodiment for driving the probe to do Z-direction movement in sample surfaces
Dynamic device is fixed in the six axle positions moving stage, and the Intelligence Feedback controller is with the probe driver communication connection to guarantee to visit
Active force is constant between needle and sample, and the data collecting card is electrically connected with the Intelligence Feedback controller to acquire the sample
Product Z-direction elevation information；The data collecting card drives the probe driver to tilt with the six axle positions moving stage communication connection,
The data collecting card and control module (computer) communication connection, for transmitting collected X, Y, Z axis three to computer
The location information in direction, and the movement instruction that computer transmission comes is received, play the role of intermediate hub.
Working method:
For probe driver to drive micro-cantilever (being integrated with probe) to scan sample along Z-direction, Intelligence Feedback controller can
Guarantee probe is constant with sample surfaces active force, and output Z-direction elevation information is sent to data collecting card.
Sample driver (traditional AFM carries module) drives sample to make scanning motion along X, Y-direction, and Lateral Controller (passes
The AFM that unites carries module) it can guarantee the accuracy of X, Y-direction Scan orientation, Lateral Controller and the data collecting card communication connection,
The location information of X, Y-direction are sent to data collecting card.
By the above, X, Y, Z-direction information in computer reading data collecting card, and it is shown as one three in the display
Tie up image.
Step-scan mode is controlled by control module (computer) and is realized, is sent to Intelligence Feedback control by data collecting card
Device processed, controller control the flexible of probe driver, realize the step-by-step movement scanning of probe (Z-direction is mobile).Probe inclines to sample
Rake angle realizes that probe is answered inclined angle to be sent to six axial displacements by data collecting card by computer by presetting method
Platform, six axle position moving stage drive probe to tilt corresponding angle.
Embodiment 2
The present embodiment on the basis of embodiment 1, is described in detail the model of each component.
The probe driver is high rigidity piezoelectric ceramics actuator P-841.1 (German PI Corp.), and Z-direction driving range is
15 μm, resonant frequency reaches 18kHz, can meet the high-velocity scanning of Z-direction.
The Intelligence Feedback controller is that (DSP develops the control of version TMS320VC5509A digital intelligent feedback to dsp chip
Device).The digital intelligent feedback controller collection is at a kind of feed-forward control algorithm and a kind of base based on piezoelectric ceramics sluggishness inversion model
In the feedback control algorithm of fuzzy controller, realize probe to the quick response of sample Z-direction elevation information.The DSP passes through outer
It meets modulus conversion chip AD7725 and analog-digital chip AD5542 is connected with the probe driver.
Specifically, the dsp chip by the CLKR pin of built-in multichannel buffer interface McBSP0, FSR pin,
DR0 pin is connected with the SCO pin of the modulus conversion chip AD7725, FSO pin, pin SDO respectively；
The CLKX pin of the dsp chip, FSX pin, DX0 pin are respectively with the analog-digital chip AD5542's
SCLK pin, REFS pin, DIN pin are connected.Through such a connection manner, be achieved in dsp chip and AD7725 and
The output end of the serial data communication of AD5542, the external modulus conversion chip AD7725 and analog-digital chip AD5542 connects
Connect the input terminal of the probe driver.
The data collecting card is the PXI-6366 high-speed data acquisition card of American National instrument (NI) Co., Ltd.
The 0th channel pin AI0 and the digital-to-analogue conversion core that the computer passes through the data collecting card PXI-6366
The pin Vout of piece AD5542 is connected, and realizes the communication with the dsp chip, and control probe completes step-scan operation.
The six axle positions moving stage is the sufficient displacement platform H840 of six axis six.The six axle positions moving stage can drive probe driver to rotate
Maximum angle reaches 30 °, meets the application, to realize adaptive inclination of the probe to side wall.
Embodiment 3
Three-dimensional atom force microscope, including such as embodiment 1 or adaptive step-scan module as described in example 2, are also wrapped
Include probe driver, micro-cantilever, sample driver, traverse driver, wherein the bottom of the probe driver is fixed with micro-
Cantilever beam is integrated with probe on the micro-cantilever, the sample driver for driving sample mobile in X-axis, Y direction,
The sample driver and the Lateral Controller communication connection, the Lateral Controller by the data collecting card with it is described
Control module communication connection.
Probe driver drives probe to scan sample along Z-direction, and sample driver drives sample to make scanning fortune along X, Y-direction
Dynamic, Lateral Controller can guarantee the accuracy of X, Y-direction Scan orientation, Lateral Controller and the data collecting card communication connection,
The location information of X, Y-direction are sent to data collecting card, Intelligence Feedback controller output Z-direction elevation information is sent to data and adopts
Truck.By the above, X, Y, Z-direction information in computer reading data collecting card, and shown in the display of control module
For a width 3-D image.
Embodiment 4
The control method of adaptive step-scan module in embodiment 1 or embodiment 2 towards Three-dimensional atom force microscope,
The following steps are included:
Step 1, integrally carry out blind sweep to sample: probe driver drives probe approaching sample, probe contact with constant force
When sample, the elevation information of this scanning element is obtained by the output of Intelligence Feedback controller, probe driver drives probe in Z axis
Side is lifted up operational height, while sample driver driving sample moves in the x and y directions, wait move on to next scanning
Point, acquires the elevation information of the scanning element, while recording three coordinate informations of the scanning element, so recycles, and obtains prescan figure
As data (the initial three-dimensional appearance data of sample), it is stored in after being exported by data collecting card in control module (computer)；
Step 2, control module (computer) is according to pre-scan images data, and positioning sidewall locations, (height occurs in Z-direction
Position, that is, side wall position of difference), and the variation size according to the scanning element Z-direction altitude information determines each scanning
Point stores after needing inclined angle；
Step 3, scan sidewall locations: control module is corresponding by each scanning element of sidewall locations by the data collecting card
Tilt angle be sent to the six axle positions moving stage, atomic force microscope acquires the location information of the scanning element of sidewall locations, tool
Body, the six axle positions moving stage drives probe driver rotation to drive the probe to rotate, and realizes probe to the adaptive of side wall
It should tilt, the probe after inclination is moved in the Z-axis direction by the driving of probe driver, the height letter of sidewall locations at acquisition one
Breath acquires three coordinate informations of all sidewall locations, obtains as sample driver driving sample moves in X, Y direction
The three-dimensional appearance information of sample.
It is preferred that in the step 2, it is assumed that the maximum value of institute's sample height change is 500nm, to guarantee side
The accuracy of wall sweep test is in Nano grade, and when altitude information variation is less than 50nm, probe tilt angle is 5 ° for setting, when
When altitude information variation is greater than 50nm less than 200nm, setting tilt angle is 10 °, is less than when altitude information changes greater than 200nm
When 300nm, setting tilt angle is 15 °, and when altitude information, which is greater than 300nm, is less than 500nm, setting tilt angle is 20 °.
Adaptive step-by-step movement scan method provides a kind of novel scan method for Three-dimensional atom force microscopy, and this method can
It realizes the accurate measurement to semiconductor reticle structure sidewall profile, improves the measurement efficiency of AFM, while needle point cross force can be eliminated
Influence with frictional force to test result improves test accuracy.
The above is only a preferred embodiment of the present invention, it is noted that for the common skill of the art
For art personnel, various improvements and modifications may be made without departing from the principle of the present invention, these improvements and modifications
Also it should be regarded as protection scope of the present invention.
Claims (10)
1. the adaptive step-scan module towards Three-dimensional atom force microscope, which is characterized in that including Intelligence Feedback controller,
Six axle position moving stage, data collecting card and control module, wherein the probe driver of the atomic force microscope is by six axle position
Moving stage drives with run-off the straight, and the probe driver is connect with the Intelligence Feedback controller communication, the Intelligence Feedback control
For device processed by the data collecting card and the control module communication connection, the data collecting card and the six axle positions moving stage are logical
News connection.
2. adaptive step-scan module as described in claim 1, which is characterized in that the six axle positions moving stage is six axis, six foot
Displacement platform H840.
3. adaptive step-scan module as described in claim 1, which is characterized in that the Intelligence Feedback controller is DSP
Chip.
4. adaptive step-scan module as claimed in claim 3, which is characterized in that the dsp chip passes through external modulus
Conversion chip AD7725 and analog-digital chip AD5542 are connected with the probe driver.
5. step-scan module as claimed in claim 4 adaptive, which is characterized in that the dsp chip passes through built-in more
The CLKR pin of channel buffer interface McBSP0, FSR pin, DR0 the pin SCO with the modulus conversion chip AD7725 respectively
Pin, FSO pin, pin SDO are connected；
SCLK of the CLKX pin, FSX pin, DX0 pin of the dsp chip respectively with the analog-digital chip AD5542 draws
Foot, REFS pin, DIN pin are connected；
The external modulus conversion chip AD7725 connects the probe driver with the output end of analog-digital chip AD5542
Input terminal.
6. adaptive step-scan module as claimed in claim 4, which is characterized in that the data collecting card is PXI-6366
High-speed data acquisition card.
7. adaptive step-scan module as claimed in claim 6, which is characterized in that the control module passes through the data
The 0th channel pin AI0 of capture card PXI-6366 is connected with the pin Vout of the analog-digital chip AD5542.
8. Three-dimensional atom force microscope, which is characterized in that swept including adaptive stepping such as of any of claims 1-7
Retouch module, probe driver, micro-cantilever, sample driver and traverse driver, wherein the bottom of the probe driver is solid
Surely there is micro-cantilever, probe is integrated on the micro-cantilever, the sample driver is for driving sample in X-axis, Y direction
Mobile, the sample driver and the Lateral Controller communication connection, the Lateral Controller pass through the data collecting card
With the control module communication connection.
9. the control method of Three-dimensional atom force microscope as claimed in claim 8, which comprises the following steps:
Step 1, integrally carry out blind sweep to sample: probe driver drives probe to approach sample with constant force, when probe contacts sample,
The elevation information of this scanning element is obtained by the output of Intelligence Feedback controller, probe driver drives probe in the Z-axis direction
Operational height is lifted, while sample driver driving sample moves in the x and y directions, wait move on to next scanning element, acquisition
The elevation information of the scanning element, while three coordinate informations of the scanning element are recorded, it so recycles, obtains pre-scan images data,
It is stored in control module after being exported by data collecting card；
Step 2, control module positions sidewall locations according to pre-scan images data, and according to the scanning element Z-direction height
The variation size of data determines to be stored after each scanning element needs inclined angle；
Step 3, scan sidewall locations: control module is inclined by the data collecting card by each scanning element of sidewall locations is corresponding
Rake angle is sent to the six axle positions moving stage, and atomic force microscope acquires the location information of the scanning element of sidewall locations, specifically,
The six axle positions moving stage drives probe driver rotation to drive the probe to rotate, and realizes probe adaptively inclining to side wall
Tiltedly, the probe after inclination is moved in the Z-axis direction by the driving of probe driver, the elevation information of sidewall locations at acquisition one,
As sample driver driving sample moves in X, Y direction, three coordinate informations of all sidewall locations are acquired, sample is obtained
Three-dimensional appearance information.
10. control method as claimed in claim 9, which is characterized in that in the step 2, when altitude information variation is less than
When 50nm, probe tilt angle is 5 °, and when altitude information variation, which is greater than 50nm, is less than 200nm, probe tilt angle is 10 °,
When altitude information variation, which is greater than 200nm, is less than 300nm, probe tilt angle is 15 °, when altitude information is less than greater than 300nm
When 500nm, probe tilt angle is 20 °.
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| CN201811559582.1A CN109444474A (en) | 2018-12-19 | 2018-12-19 | A kind of adaptive step-scan module and its Three-dimensional atom force microscope and control method |
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| CN201811559582.1A CN109444474A (en) | 2018-12-19 | 2018-12-19 | A kind of adaptive step-scan module and its Three-dimensional atom force microscope and control method |
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