CN211601854U - Detection device - Google Patents

Detection device Download PDF

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Publication number
CN211601854U
CN211601854U CN201921890031.3U CN201921890031U CN211601854U CN 211601854 U CN211601854 U CN 211601854U CN 201921890031 U CN201921890031 U CN 201921890031U CN 211601854 U CN211601854 U CN 211601854U
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China
Prior art keywords
detection
bearing
translation
probe
detection device
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CN201921890031.3U
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Chinese (zh)
Inventor
方一
李青格乐
邓旺财
陈鲁
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Shenzhen Zhongke Feice Technology Co Ltd
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Shenzhen Zhongke Flying Test Technology Co ltd
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Abstract

The utility model provides a detection device, detection device includes: the bearing table is used for bearing an object to be tested, the object to be tested comprises a main plane and an auxiliary surface connected with the main plane, the auxiliary surface is provided with a normal line of at least one point, the normal line of the auxiliary surface is perpendicular to the normal line of the main plane or has an acute included angle, the bearing table comprises a bearing surface, and the bearing surface is parallel to the main plane of the object to be tested; the detection device comprises a probe, an acute included angle is formed between the optical axis of the probe and the bearing surface, and the probe is used for detecting the area to be detected of the auxiliary surface of the object to be detected so as to acquire the three-dimensional coordinate information of the area to be detected. This check out test set can detect the district to be measured of determinand auxiliary surface under the circumstances of irrotational determinand or probe, has saved check-out time, has promoted detection efficiency.

Description

Detection device
Technical Field
The utility model relates to a detection technology, especially a check out test set.
Background
With the development of modern industry, precision machining is used in more and more fields, and meanwhile, people also put higher requirements on machining precision. In order to meet the requirement of machining precision and improve the qualification rate of machined samples, the shape distortion test of workpieces and machined finished products in the machining process is usually required to ensure that the distortion is within a tolerable range.
The existing distortion detection methods can be divided into two-dimensional detection and three-dimensional detection, wherein the two-dimensional detection obtains the distribution of the outline of an article under a two-dimensional coordinate system by means of imaging and the like, and obtains distortion information by means of comparison, so that the two-dimensional detection method is the most common detection method at present. Because many detection requirements require knowing the height distortion of a sample, and two-dimensional detection cannot be realized, three-dimensional detection development is carried out. Common three-dimensional detection methods comprise optical measurement methods such as contact point scanning (such as a three-coordinate measuring instrument), a laser triangulation method, an interference method, a confocal method and the like, and the three-dimensional detection method has a good detection index effect on the resolution of height distribution.
Because the three-dimensional measuring equipment has high precision and small field of view, the surface of the detection area needs to be scanned by the three-dimensional measuring equipment, so that the appearance of the object to be detected or the detection area is obtained.
In addition, because the angle range of the three-dimensional measuring equipment is small, for objects to be measured with large radian, such as a mobile phone shell, a mobile phone screen, a watch screen and the like, the probe of the three-dimensional measuring equipment needs to be rotated or the objects to be measured need to be rotated, so that the detection of the whole arc surface morphology of the objects to be measured is realized. Then, the rotation mode can greatly prolong the detection time and reduce the detection efficiency.
SUMMERY OF THE UTILITY MODEL
In view of the above situation, it is necessary to provide a detection apparatus with high detection efficiency to solve the above problems.
The application provides a detection device, the detection device includes: the bearing table is used for bearing an object to be tested, the object to be tested comprises a main plane and an auxiliary surface connected with the main plane, the auxiliary surface is provided with a normal line of at least one point, the normal line of the auxiliary surface is perpendicular to the normal line of the main plane or has an acute included angle, the bearing table comprises a bearing surface, and the bearing surface is parallel to the main plane of the object to be tested; the detection device comprises a probe, an acute included angle is formed between the optical axis of the probe and the bearing surface, and the probe is used for detecting the area to be detected of the auxiliary surface of the object to be detected so as to acquire the three-dimensional coordinate information of the area to be detected.
Furthermore, the included angle between the optical axis of the probe and the bearing surface is 60-70 degrees; the angle range of the probe is +/-20 degrees to +/-40 degrees.
Further, the check out test set still includes the translation device, the translation device includes a translation face, the translation device with the plummer is connected and is used for driving the plummer along being on a parallel with the direction of translation face removes, the translation face with the bearing surface is parallel or has acute angle contained angle.
Furthermore, the translation device comprises a first translation table and a second translation table arranged on the first translation table, and the bearing table is arranged on the second translation table; the first translation platform is used for driving the second translation platform and the bearing platform to translate positively and/or negatively along a first direction; the second translation stage is used for driving the bearing stage to translate positively and/or negatively along a second direction; the first direction and the second direction are perpendicular or have an acute or obtuse included angle.
Further, check out test set still includes the revolving stage, the plummer is located on the revolving stage, the revolving stage is used for driving the plummer is rotatory around the rotation axis, the rotation axis with the contained angle has between the optical axis of probe.
Further, the rotating shaft is perpendicular to the bearing surface.
Further, the region to be detected comprises at least two detection lines extending from the auxiliary surface to the main plane; the at least two detection lines comprise a first detection line and a second detection line; the first detection line and the second detection line have a first included angle between projections in a plane perpendicular to the rotation axis; the detection apparatus further includes: and the controller is used for controlling the rotating platform, and after the detection device detects the first detection line, the controller controls the rotating platform to rotate around the rotating shaft by the first included angle.
Furthermore, the detection equipment further comprises an imaging device, and the imaging device is used for acquiring the image of the object to be detected so as to acquire the position information of the object to be detected.
Furthermore, the imaging device comprises a lens, and an optical axis of the lens is parallel to the bearing surface.
Furthermore, the detection equipment further comprises a backlight source, the image device and the backlight source are respectively positioned on two sides of the bearing surface, and the backlight source is used for providing backlight illumination for the image device.
Further, the central axis of the light beam emitted by the backlight source is parallel to the optical axis of the probe.
Further, the detection device is a chromatic dispersion confocal device, a white light interference device, a differential displacement interference device or a confocal microscope device.
Further, the object to be measured is a mobile phone shell, a mobile phone screen or a watch screen.
Further, the detection device also comprises a turnover mechanism, and the turnover mechanism is at least used for turning over the bearing table by 180 degrees.
Among the above-mentioned check out test set, acute angle contained angle has between the optical axis of detection device's the probe and the loading end, and the optical axis of probe and loading end slope set up promptly to can detect the three-dimensional coordinate information in order to acquire the district of awaiting measuring to the waited measuring district of complementary surface under the circumstances of irrotational determinand or probe, save check-out time, promote detection efficiency.
Drawings
Fig. 1 is a schematic structural diagram of a detection apparatus in an embodiment of the present application.
FIG. 2 is a schematic diagram of an analyte in an embodiment of the present application.
Fig. 3 is a schematic structural diagram of a probe and an object to be measured of a detection apparatus in an embodiment of the present application.
Description of the main elements
Detection device 100
Bearing platform 10
Bearing surface 11
Detection device 20
Probe head 21
Translation device 30
First translation stage 31
Second translation stage 32
Translation surface 301
Base seat 40
Rotary table 50
Image device 60
Back light source 70
Test object 200
Principal plane 210
Auxiliary surface 220
First detection line 231
Second detection line 232
The following detailed description of the invention will be further described in conjunction with the above-identified drawings.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.
It will be understood that when an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. When an element is referred to as being "disposed on" another element, it can be directly on the other element or intervening elements may also be present.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used in the description of the invention herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.
Referring to fig. 1 and fig. 2, an embodiment of the present application provides a detection apparatus 100 for detecting a region of an object 200 to be detected to obtain a feature of the object 200.
The object 200 includes a main plane 210 and a sub-plane 220 connected to the main plane 210. The minor face 220 has at least one point normal perpendicular or at an acute angle to the normal of the major plane 210. In one embodiment, the minor face 220 is a curved face, and the maximum curvature of the curved face is 40 ° to 80 °. It is understood that the object 200 may be a mobile phone shell, a mobile phone screen or a watch screen with an arc surface, but is not limited thereto, and the object 200 may also be other devices with an arc surface.
The radian is an included angle between a tangent plane of the cambered surface and the main plane.
In the present embodiment, the main plane 210 is substantially rectangular, the number of the minor surfaces 220 is four, and the four minor surfaces 220 are respectively connected to four sides of the main plane 210.
The inspection apparatus 100 includes a stage 10 and an inspection device 20. The supporting stage 10 is used for supporting the object 200, and the supporting stage 10 includes a supporting surface 11, and the supporting surface 11 is parallel to the main plane 210 of the object. The detecting device 20 is used for detecting the object 200. The detecting device 20 includes a probe 21, an acute included angle is formed between an optical axis of the probe 21 and the bearing surface 11, and the probe 21 is used for detecting the auxiliary surface 220 to-be-detected area of the object 200 to be detected so as to obtain three-dimensional coordinate information of the to-be-detected area.
Preferably, the included angle between the optical axis of the probe 21 and the bearing surface 11 is 60-70 °. It should be understood that the included angle between the optical axis of the probe 21 and the bearing surface 11 may be other angles, as long as the included angle is an acute angle, according to the detection requirement.
In one embodiment, the angular range of the probe 21 is ± 20 ° to ± 40 °, but is not limited thereto, and the angular range of the probe 21 may be set as desired. The angle range is the range of the included angle between the normal of the object to be detected which can be detected by the probe 21 and the optical axis of the probe 21.
Because the optical axis of the probe 21 and the bearing surface 11 form an acute included angle, the optical axis of the probe 21 is inclined with respect to the main plane 210 and the bearing surface 11 of the object 200, and the included angle between the optical axis of the probe 21 and the main plane 210 is preferably 60-70 °.
When the detection device 100 detects the object 200 to be detected, because the probe 21 is obliquely arranged relative to the bearing surface 11, the probe 21 can detect a point on the whole auxiliary surface 220 of the object 200 to be detected without rotating the probe 21 or the object 200 to be detected, so that the detection time is saved, and the detection efficiency is improved.
In an embodiment, the detecting apparatus 100 further includes a translating device 30, the translating device 30 includes a translating surface 301, and the translating device 30 is connected to the carrier 10 and is configured to move the carrier 10 along a direction parallel to the translating surface 301. The translating surface 301 is parallel to or has an acute angle with the bearing surface 11.
In an embodiment, the detection apparatus 100 further comprises a base 40, and the translation device 30 is slidably disposed on the base 40.
The translation device 30 includes a first translation stage 31 disposed on the base 40 and a second translation stage 32 disposed on the first translation stage 31, and the carrier 10 is disposed on the second translation stage 32. The first translation stage 31 is used to bring the second translation stage 32 and the carrier stage 10 into positive and/or negative translation in a first direction. The second translation stage 32 is used to translate the carrier stage 10 in a second direction, positively and/or negatively. The translation surface 301 is an upper surface of the second translation stage 32. The first translation stage 31 and the second translation stage 32 can move respectively, that is, the translation in the first direction is completed first and then the translation in the second direction is completed; the first translation stage 31 and the second translation stage 32 can also translate simultaneously, so that the bearing table 10 and the object 200 to be measured can move along the direction of the included angle between the first direction and the second direction, and can reach the preset position more quickly.
It is understood that the first direction and the second direction are perpendicular or have an acute or obtuse included angle. In this embodiment, the first direction is an X direction, and the second direction is a Y direction.
Preferably, the first translation stage 31 is slidably connected with the base 40 through a sliding rail and a sliding chute; the second translation stage 32 is slidably connected with the first translation stage 31 through a slide rail and a slide groove.
In one embodiment, the detecting apparatus 100 further comprises a rotating table 50, the carrier table 10 is disposed on the rotating table 50, and the rotating table 50 is used for driving the carrier table 10 to rotate around a rotating axis, which forms an included angle with the optical axis of the probe 21. The rotating table 50 can be connected to the translation device 30, so that the translation device 30 can move the rotating table 50.
In one embodiment, the rotation axis is perpendicular to the carrying surface 11, i.e. the rotation table 50 drives the carrying table 10 to rotate around the rotation axis in the Z direction, so that different sub-surfaces 220 of the object 200 are disposed toward the probe 21.
The detection apparatus 100 further includes an imaging device 60, wherein the imaging device 60 is configured to obtain an image of the object 200 to obtain the position information of the object 200. The imaging device 60 includes a lens, and an optical axis of the lens is parallel to the bearing surface 11.
The imaging device 60 may be a CCD camera or a CMOS camera, but is not limited thereto.
The inspection apparatus 100 further includes a backlight 70, wherein the imaging device 60 and the backlight 70 are respectively disposed on two sides of the carrying surface 11, and the backlight 70 is used for providing backlight illumination for the imaging device 60. The central axis of the light beam emitted by the backlight 70 is parallel to the optical axis of the probe 21. Preferably, the backlight 70 has a rectangular plate shape or a ring plate shape.
In one embodiment, the detecting device 20 is a dispersive confocal apparatus, the probe 21 is a dispersive confocal type probe, and the three-dimensional coordinate information of the region of the dut 200 acquired by the detecting device 20 at least includes height information of the sub-surface 220 of the dut 200. In other embodiments, the detection device 20 can also be a white light interference device, a differential displacement interference device, or a confocal microscope device.
Referring to fig. 1 to 3, the region of the object 200 includes at least two detection lines extending from the auxiliary surface 220 to the main surface 210. The at least two detection lines include a first detection line 231 and a second detection line 232, and a first angle is formed between projections of the first detection line 231 and the second detection line 232 in a plane perpendicular to the rotation axis.
The inspection apparatus 100 further includes a controller (not shown) for controlling the rotary table 50, and after the inspection device 20 inspects the first inspection line 231, the controller controls the rotary table 50 to rotate around the rotation axis by the first included angle, so that the inspection device 20 inspects the second inspection line 232.
The first detection line 231 and the second detection line 232 are both located on the same side of the main plane 210. Specifically, the auxiliary surfaces 220 are located on the same side of the plane of the main plane 210, and are all convex in a direction away from the main plane 210.
Minor face 220 may be convex or concave; that is, the first sensing lines 231 are located on the concave or convex surfaces; the second sensing lines 232 are located on the concave or convex surfaces.
In one embodiment, the region to be measured of the object 200 includes four first detection lines 231 and four second detection lines 232, a first included angle between projections of the first detection lines 231 and the second detection lines 232 in a plane perpendicular to the rotation axis is 45 °, the first detection line 231 is located in the middle of the auxiliary surface 220, and the second detection line 232 is located at a junction of two adjacent auxiliary surfaces 220.
During the detection, the supporting platform 10 supports the object 200 to be detected, and the main plane 210 of the object 200 to be detected is parallel to the supporting surface 11. The rotating table 50 drives the bearing table 10 to rotate 45 ° around the rotating shaft perpendicular to the bearing surface 11 each time, and the translation device 30 adjusts the positions of the bearing table 10 and the object 200 to be tested relative to the probe 21, so that an auxiliary surface 220 of the object 200 to be tested is located within the detection range of the probe 21, and the auxiliary surface 220 is opposite to and obliquely arranged with respect to the probe 21. The rotary table 50 can rotate clockwise by 45 ° in turn, so that the probes 21 can scan eight detection lines respectively to obtain the feature of the object 200.
It is understood that if only one inspection line is required, the rotation stage 50 may be omitted without rotating the object 200.
An acute included angle is formed between the probe 21 and the bearing surface 11 in the detection device 100, that is, the probe 21, the bearing surface 11 and the main plane 210 of the object 200 to be detected are obliquely arranged, so that the area to be detected of the auxiliary surface 220 of the object 200 to be detected can be detected and the three-dimensional coordinate information of the area to be detected can be acquired without rotating the object 200 to be detected or the probe 21, the detection time is saved, and the detection efficiency is improved.
In addition, the detecting apparatus 100 further includes a translation device 30 and a rotating table 50, so that the carrier table 10 can be driven by the translation device 30 to move relative to the probe 21, and driven by the rotating table 50 to rotate relative to the probe 21, so that the probe 21 can acquire three-dimensional coordinate information of a plurality of auxiliary surfaces 220, and further acquire the feature of the object 200 to be detected, and the detecting efficiency is high.
In other embodiments, if the first detecting line 231 and the second detecting line 232 are respectively located at two sides of the plane of the main plane 210, and the first detecting line 231 and the second detecting line 232 are both located on the convex or concave surface of the auxiliary surface 220, the first detecting line 231 and the second detecting line 232 can be detected by mechanically or manually turning the object 200.
The area to be detected comprises two opposite surfaces, and the bearing table 10 is exposed out of the area to be detected; the detection device 100 further comprises a tilting mechanism for tilting the carrier table 10 at least by 180 °.
In addition, other changes may be made by those skilled in the art without departing from the spirit of the invention, and it is intended that all such changes be considered within the scope of the invention.

Claims (14)

1. A detection apparatus, characterized by: the detection apparatus includes:
the bearing table is used for bearing an object to be tested, the object to be tested comprises a main plane and an auxiliary surface connected with the main plane, the auxiliary surface is provided with a normal line of at least one point, the normal line of the auxiliary surface is perpendicular to the normal line of the main plane or has an acute included angle, the bearing table comprises a bearing surface, and the bearing surface is parallel to the main plane of the object to be tested;
the detection device comprises a probe, an acute included angle is formed between the optical axis of the probe and the bearing surface, and the probe is used for detecting the area to be detected of the auxiliary surface of the object to be detected so as to acquire the three-dimensional coordinate information of the area to be detected.
2. The detection device of claim 1, wherein:
the included angle between the optical axis of the probe and the bearing surface is 60-70 degrees;
the angle range of the probe is +/-20 degrees to +/-40 degrees.
3. The detection device of claim 1, wherein: the detection equipment further comprises a translation device, the translation device comprises a translation surface, the translation device is connected with the bearing platform and is used for driving the bearing platform to move along the direction parallel to the translation surface, and the translation surface is parallel to the bearing surface or has an acute included angle.
4. A testing device according to claim 3, wherein:
the translation device comprises a first translation platform and a second translation platform arranged on the first translation platform, and the bearing platform is arranged on the second translation platform;
the first translation platform is used for driving the second translation platform and the bearing platform to translate positively and/or negatively along a first direction; the second translation stage is used for driving the bearing stage to translate positively and/or negatively along a second direction; the first direction and the second direction are perpendicular or have an acute or obtuse included angle.
5. A testing device according to claim 1 or 3, wherein: the detection equipment further comprises a rotary table, the bearing table is arranged on the rotary table, the rotary table is used for driving the bearing table to rotate around a rotating shaft, and an included angle is formed between the rotating shaft and an optical axis of the probe.
6. The detection device of claim 5, wherein: the rotating shaft is perpendicular to the bearing surface.
7. The detection device of claim 5, wherein: the area to be detected comprises at least two detection lines, and the detection lines extend from the auxiliary surface to the main plane; the at least two detection lines comprise a first detection line and a second detection line; the first detection line and the second detection line have a first included angle between projections in a plane perpendicular to the rotation axis;
the detection apparatus further includes:
and the controller is used for controlling the rotating platform, and after the detection device detects the first detection line, the controller controls the rotating platform to rotate around the rotating shaft by the first included angle.
8. The detection device of claim 1, wherein: the detection equipment further comprises an imaging device, and the imaging device is used for acquiring the image of the object to be detected so as to acquire the position information of the object to be detected.
9. The detection device of claim 8, wherein: the imaging device comprises a lens, and the optical axis of the lens is parallel to the bearing surface.
10. The detection device of claim 8, wherein: the detection equipment further comprises a backlight source, the image device and the backlight source are respectively located on two sides of the bearing surface, and the backlight source is used for providing backlight illumination for the image device.
11. The detection device of claim 10, wherein: the central axis of the light beam emitted by the backlight source is parallel to the optical axis of the probe.
12. The detection device of claim 1, wherein: the detection device is a dispersion confocal device, a white light interference device, a differential displacement interference device or a confocal microscope device.
13. The detection device of claim 1, wherein: the object to be measured is a mobile phone shell, a mobile phone screen or a watch screen.
14. The detection device of claim 1, wherein: the detection device also comprises a turnover mechanism, and the turnover mechanism is at least used for turning over the bearing table by 180 degrees.
CN201921890031.3U 2019-11-04 2019-11-04 Detection device Active CN211601854U (en)

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Application Number Priority Date Filing Date Title
CN201921890031.3U CN211601854U (en) 2019-11-04 2019-11-04 Detection device

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Application Number Priority Date Filing Date Title
CN201921890031.3U CN211601854U (en) 2019-11-04 2019-11-04 Detection device

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CN211601854U true CN211601854U (en) 2020-09-29

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113639661A (en) * 2021-08-11 2021-11-12 中国科学院长春光学精密机械与物理研究所 Morphology detection system and morphology detection method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113639661A (en) * 2021-08-11 2021-11-12 中国科学院长春光学精密机械与物理研究所 Morphology detection system and morphology detection method

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Address after: 518110 101, 201, 301, No.2, Shanghenglang fourth industrial zone, Tongsheng community, Dalang street, Longhua District, Shenzhen City, Guangdong Province

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