JPH0129400B2 - - Google Patents
Info
- Publication number
- JPH0129400B2 JPH0129400B2 JP24222484A JP24222484A JPH0129400B2 JP H0129400 B2 JPH0129400 B2 JP H0129400B2 JP 24222484 A JP24222484 A JP 24222484A JP 24222484 A JP24222484 A JP 24222484A JP H0129400 B2 JPH0129400 B2 JP H0129400B2
- Authority
- JP
- Japan
- Prior art keywords
- film
- boron
- solid lubricant
- atomic beam
- molybdenum sulfide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000314 lubricant Substances 0.000 claims description 46
- 239000007787 solid Substances 0.000 claims description 43
- 239000000758 substrate Substances 0.000 claims description 36
- CWQXQMHSOZUFJS-UHFFFAOYSA-N molybdenum disulfide Chemical compound S=[Mo]=S CWQXQMHSOZUFJS-UHFFFAOYSA-N 0.000 claims description 27
- 229910052796 boron Inorganic materials 0.000 claims description 23
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims description 21
- 150000001639 boron compounds Chemical class 0.000 claims description 21
- 238000004544 sputter deposition Methods 0.000 claims description 17
- 239000002131 composite material Substances 0.000 claims description 8
- 238000004519 manufacturing process Methods 0.000 claims description 8
- 229910052717 sulfur Inorganic materials 0.000 claims description 7
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 claims description 6
- 229910052750 molybdenum Inorganic materials 0.000 claims description 6
- 239000011593 sulfur Substances 0.000 claims description 6
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 5
- 239000011733 molybdenum Substances 0.000 claims description 5
- 239000000126 substance Substances 0.000 claims description 4
- 230000001050 lubricating effect Effects 0.000 claims description 3
- 229910052982 molybdenum disulfide Inorganic materials 0.000 claims description 3
- 230000001678 irradiating effect Effects 0.000 claims 1
- 239000000203 mixture Substances 0.000 claims 1
- 230000005855 radiation Effects 0.000 description 10
- 239000000463 material Substances 0.000 description 9
- 230000000052 comparative effect Effects 0.000 description 7
- 238000000034 method Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- 238000004891 communication Methods 0.000 description 4
- 239000007789 gas Substances 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- 229910000831 Steel Inorganic materials 0.000 description 3
- 238000000151 deposition Methods 0.000 description 3
- 230000008020 evaporation Effects 0.000 description 3
- 238000001704 evaporation Methods 0.000 description 3
- 229910002804 graphite Inorganic materials 0.000 description 3
- 239000010439 graphite Substances 0.000 description 3
- 239000012528 membrane Substances 0.000 description 3
- 239000010959 steel Substances 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005461 lubrication Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 230000007935 neutral effect Effects 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 206010010904 Convulsion Diseases 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 239000002178 crystalline material Substances 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 230000013011 mating Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000007781 pre-processing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000013077 target material Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Landscapes
- Lubricants (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24222484A JPS61120897A (ja) | 1984-11-19 | 1984-11-19 | 固体潤滑膜および作製方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24222484A JPS61120897A (ja) | 1984-11-19 | 1984-11-19 | 固体潤滑膜および作製方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61120897A JPS61120897A (ja) | 1986-06-07 |
| JPH0129400B2 true JPH0129400B2 (enExample) | 1989-06-09 |
Family
ID=17086076
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP24222484A Granted JPS61120897A (ja) | 1984-11-19 | 1984-11-19 | 固体潤滑膜および作製方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61120897A (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63195259A (ja) * | 1987-02-06 | 1988-08-12 | Sumitomo Electric Ind Ltd | 二硫化モリブデン薄膜の形成方法 |
| JPH01119683A (ja) * | 1987-10-30 | 1989-05-11 | Nissan Motor Co Ltd | 固体潤滑被膜処理方法 |
| JP2778265B2 (ja) * | 1991-02-21 | 1998-07-23 | 日産自動車株式会社 | 真空用潤滑部材 |
| CN111876732B (zh) * | 2020-06-17 | 2023-06-06 | 西安交通大学 | 一种硼氮化钼/硫化钼纳米复合涂层及其制备方法 |
-
1984
- 1984-11-19 JP JP24222484A patent/JPS61120897A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61120897A (ja) | 1986-06-07 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |