JPH0128933B2 - - Google Patents

Info

Publication number
JPH0128933B2
JPH0128933B2 JP56147807A JP14780781A JPH0128933B2 JP H0128933 B2 JPH0128933 B2 JP H0128933B2 JP 56147807 A JP56147807 A JP 56147807A JP 14780781 A JP14780781 A JP 14780781A JP H0128933 B2 JPH0128933 B2 JP H0128933B2
Authority
JP
Japan
Prior art keywords
layer
hod
optical density
parts
lod
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56147807A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5849941A (ja
Inventor
Kotaro Nagasawa
Kunio Morikubo
Tsuyoshi Matsuda
Masaaki Kawakami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Somar Corp
Original Assignee
Somar Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Somar Corp filed Critical Somar Corp
Priority to JP56147807A priority Critical patent/JPS5849941A/ja
Publication of JPS5849941A publication Critical patent/JPS5849941A/ja
Publication of JPH0128933B2 publication Critical patent/JPH0128933B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/54—Absorbers, e.g. of opaque materials
    • G03F1/56—Organic absorbers, e.g. of photo-resists

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Polymerisation Methods In General (AREA)
JP56147807A 1981-09-21 1981-09-21 ネガ型画像形成材料 Granted JPS5849941A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56147807A JPS5849941A (ja) 1981-09-21 1981-09-21 ネガ型画像形成材料

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56147807A JPS5849941A (ja) 1981-09-21 1981-09-21 ネガ型画像形成材料

Publications (2)

Publication Number Publication Date
JPS5849941A JPS5849941A (ja) 1983-03-24
JPH0128933B2 true JPH0128933B2 (cg-RX-API-DMAC7.html) 1989-06-06

Family

ID=15438653

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56147807A Granted JPS5849941A (ja) 1981-09-21 1981-09-21 ネガ型画像形成材料

Country Status (1)

Country Link
JP (1) JPS5849941A (cg-RX-API-DMAC7.html)

Also Published As

Publication number Publication date
JPS5849941A (ja) 1983-03-24

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