JPH0128673Y2 - - Google Patents
Info
- Publication number
- JPH0128673Y2 JPH0128673Y2 JP19092585U JP19092585U JPH0128673Y2 JP H0128673 Y2 JPH0128673 Y2 JP H0128673Y2 JP 19092585 U JP19092585 U JP 19092585U JP 19092585 U JP19092585 U JP 19092585U JP H0128673 Y2 JPH0128673 Y2 JP H0128673Y2
- Authority
- JP
- Japan
- Prior art keywords
- lid
- opening
- closing
- processing tank
- tank
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000012545 processing Methods 0.000 claims description 32
- 239000000126 substance Substances 0.000 description 45
- 239000007788 liquid Substances 0.000 description 13
- 238000010586 diagram Methods 0.000 description 4
- 238000002203 pretreatment Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 238000012993 chemical processing Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 238000012805 post-processing Methods 0.000 description 1
Landscapes
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19092585U JPH0128673Y2 (OSRAM) | 1985-12-11 | 1985-12-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19092585U JPH0128673Y2 (OSRAM) | 1985-12-11 | 1985-12-11 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6298229U JPS6298229U (OSRAM) | 1987-06-23 |
| JPH0128673Y2 true JPH0128673Y2 (OSRAM) | 1989-08-31 |
Family
ID=31144591
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19092585U Expired JPH0128673Y2 (OSRAM) | 1985-12-11 | 1985-12-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0128673Y2 (OSRAM) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100344092B1 (ko) * | 1998-12-29 | 2002-11-23 | 주식회사 에스아이테크 | 반도체 장비의 덮개 구조 |
| JP6581808B2 (ja) * | 2015-05-22 | 2019-09-25 | 川崎重工業株式会社 | カメラカバー及びそれを備えた撮像システム |
-
1985
- 1985-12-11 JP JP19092585U patent/JPH0128673Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6298229U (OSRAM) | 1987-06-23 |
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