JPH01282194A - 単結晶製造方法 - Google Patents

単結晶製造方法

Info

Publication number
JPH01282194A
JPH01282194A JP13514788A JP13514788A JPH01282194A JP H01282194 A JPH01282194 A JP H01282194A JP 13514788 A JP13514788 A JP 13514788A JP 13514788 A JP13514788 A JP 13514788A JP H01282194 A JPH01282194 A JP H01282194A
Authority
JP
Japan
Prior art keywords
raw material
granular
single crystal
crucible
amount
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13514788A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0477712B2 (enrdf_load_stackoverflow
Inventor
Tsutomu Kajimoto
梶本　努
Daizo Horie
堀江　大造
Shinichi Sakurada
桜田　晋一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KYUSHU ELECTRON METAL CO Ltd
Osaka Titanium Co Ltd
Original Assignee
KYUSHU ELECTRON METAL CO Ltd
Osaka Titanium Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by KYUSHU ELECTRON METAL CO Ltd, Osaka Titanium Co Ltd filed Critical KYUSHU ELECTRON METAL CO Ltd
Priority to JP13514788A priority Critical patent/JPH01282194A/ja
Priority to US07/357,717 priority patent/US5037503A/en
Publication of JPH01282194A publication Critical patent/JPH01282194A/ja
Priority to US07/953,630 priority patent/USRE35242E/en
Publication of JPH0477712B2 publication Critical patent/JPH0477712B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP13514788A 1988-01-19 1988-05-31 単結晶製造方法 Granted JPH01282194A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP13514788A JPH01282194A (ja) 1988-01-19 1988-05-31 単結晶製造方法
US07/357,717 US5037503A (en) 1988-05-31 1989-05-26 Method for growing silicon single crystal
US07/953,630 USRE35242E (en) 1988-05-31 1992-09-30 Method for growing silicon single crystal

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP63-10407 1988-01-19
JP1040788 1988-01-19
JP13514788A JPH01282194A (ja) 1988-01-19 1988-05-31 単結晶製造方法

Publications (2)

Publication Number Publication Date
JPH01282194A true JPH01282194A (ja) 1989-11-14
JPH0477712B2 JPH0477712B2 (enrdf_load_stackoverflow) 1992-12-09

Family

ID=26345665

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13514788A Granted JPH01282194A (ja) 1988-01-19 1988-05-31 単結晶製造方法

Country Status (1)

Country Link
JP (1) JPH01282194A (enrdf_load_stackoverflow)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1991013192A1 (en) * 1990-03-02 1991-09-05 Nkk Corporation Single crystal production apparatus
JPH059097A (ja) * 1991-06-28 1993-01-19 Shin Etsu Handotai Co Ltd シリコン単結晶の引上方法
JPH05148073A (ja) * 1991-11-29 1993-06-15 Nkk Corp シリコン単結晶の製造方法
JPH05208889A (ja) * 1992-01-30 1993-08-20 Shin Etsu Handotai Co Ltd シリコン単結晶の製造方法
JP2008266017A (ja) * 2007-03-29 2008-11-06 Sharp Corp 固体材料供給装置、固体材料処理装置および固体材料供給方法
WO2023007830A1 (ja) * 2021-07-30 2023-02-02 グローバルウェーハズ・ジャパン株式会社 シリコン単結晶の製造方法及び単結晶引上装置

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50155423A (enrdf_load_stackoverflow) * 1974-05-13 1975-12-15
JPS57183392A (en) * 1981-05-01 1982-11-11 Tohoku Metal Ind Ltd Apparatus for preparation of single crystal
JPS5945917A (ja) * 1982-09-02 1984-03-15 Denki Kagaku Kogyo Kk 多結晶シリコンの連続的製法
JPS6117537A (ja) * 1984-04-27 1986-01-25 インペリアル・ケミカル・インダストリ−ズ・ピ−エルシ− フエノ−ル誘導体、その製造法及び該化合物を含有する、抗エストロゲン作用を有する医薬品
JPS61242984A (ja) * 1985-04-19 1986-10-29 Shinetsu Sekiei Kk シリコン単結晶引上げ用ルツボ

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50155423A (enrdf_load_stackoverflow) * 1974-05-13 1975-12-15
JPS57183392A (en) * 1981-05-01 1982-11-11 Tohoku Metal Ind Ltd Apparatus for preparation of single crystal
JPS5945917A (ja) * 1982-09-02 1984-03-15 Denki Kagaku Kogyo Kk 多結晶シリコンの連続的製法
JPS6117537A (ja) * 1984-04-27 1986-01-25 インペリアル・ケミカル・インダストリ−ズ・ピ−エルシ− フエノ−ル誘導体、その製造法及び該化合物を含有する、抗エストロゲン作用を有する医薬品
JPS61242984A (ja) * 1985-04-19 1986-10-29 Shinetsu Sekiei Kk シリコン単結晶引上げ用ルツボ

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1991013192A1 (en) * 1990-03-02 1991-09-05 Nkk Corporation Single crystal production apparatus
JPH059097A (ja) * 1991-06-28 1993-01-19 Shin Etsu Handotai Co Ltd シリコン単結晶の引上方法
JPH05148073A (ja) * 1991-11-29 1993-06-15 Nkk Corp シリコン単結晶の製造方法
JPH05208889A (ja) * 1992-01-30 1993-08-20 Shin Etsu Handotai Co Ltd シリコン単結晶の製造方法
JP2008266017A (ja) * 2007-03-29 2008-11-06 Sharp Corp 固体材料供給装置、固体材料処理装置および固体材料供給方法
WO2023007830A1 (ja) * 2021-07-30 2023-02-02 グローバルウェーハズ・ジャパン株式会社 シリコン単結晶の製造方法及び単結晶引上装置
JP2023020503A (ja) * 2021-07-30 2023-02-09 グローバルウェーハズ・ジャパン株式会社 シリコン単結晶の製造方法及び単結晶引上装置

Also Published As

Publication number Publication date
JPH0477712B2 (enrdf_load_stackoverflow) 1992-12-09

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