JPH0127106Y2 - - Google Patents

Info

Publication number
JPH0127106Y2
JPH0127106Y2 JP1984142479U JP14247984U JPH0127106Y2 JP H0127106 Y2 JPH0127106 Y2 JP H0127106Y2 JP 1984142479 U JP1984142479 U JP 1984142479U JP 14247984 U JP14247984 U JP 14247984U JP H0127106 Y2 JPH0127106 Y2 JP H0127106Y2
Authority
JP
Japan
Prior art keywords
air
airtight chamber
ventilation passage
intake
partition plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1984142479U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6157875U (zh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984142479U priority Critical patent/JPH0127106Y2/ja
Publication of JPS6157875U publication Critical patent/JPS6157875U/ja
Application granted granted Critical
Publication of JPH0127106Y2 publication Critical patent/JPH0127106Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
JP1984142479U 1984-09-20 1984-09-20 Expired JPH0127106Y2 (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984142479U JPH0127106Y2 (zh) 1984-09-20 1984-09-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984142479U JPH0127106Y2 (zh) 1984-09-20 1984-09-20

Publications (2)

Publication Number Publication Date
JPS6157875U JPS6157875U (zh) 1986-04-18
JPH0127106Y2 true JPH0127106Y2 (zh) 1989-08-14

Family

ID=30700802

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984142479U Expired JPH0127106Y2 (zh) 1984-09-20 1984-09-20

Country Status (1)

Country Link
JP (1) JPH0127106Y2 (zh)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2511205Y2 (ja) * 1989-06-16 1996-09-25 株式会社藤田製作所 バ―ンイン処理装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5928347A (ja) * 1982-08-09 1984-02-15 Nec Corp 半導体装置のスクリ−ニング装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5928347A (ja) * 1982-08-09 1984-02-15 Nec Corp 半導体装置のスクリ−ニング装置

Also Published As

Publication number Publication date
JPS6157875U (zh) 1986-04-18

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