JPH0127106Y2 - - Google Patents
Info
- Publication number
- JPH0127106Y2 JPH0127106Y2 JP1984142479U JP14247984U JPH0127106Y2 JP H0127106 Y2 JPH0127106 Y2 JP H0127106Y2 JP 1984142479 U JP1984142479 U JP 1984142479U JP 14247984 U JP14247984 U JP 14247984U JP H0127106 Y2 JPH0127106 Y2 JP H0127106Y2
- Authority
- JP
- Japan
- Prior art keywords
- air
- airtight chamber
- ventilation passage
- intake
- partition plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000009423 ventilation Methods 0.000 claims description 63
- 238000005192 partition Methods 0.000 claims description 50
- 238000012360 testing method Methods 0.000 claims description 39
- 230000002093 peripheral effect Effects 0.000 claims description 32
- 238000001816 cooling Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000007599 discharging Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000003756 stirring Methods 0.000 description 2
- 230000005611 electricity Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 238000012216 screening Methods 0.000 description 1
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1984142479U JPH0127106Y2 (zh) | 1984-09-20 | 1984-09-20 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1984142479U JPH0127106Y2 (zh) | 1984-09-20 | 1984-09-20 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6157875U JPS6157875U (zh) | 1986-04-18 |
JPH0127106Y2 true JPH0127106Y2 (zh) | 1989-08-14 |
Family
ID=30700802
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1984142479U Expired JPH0127106Y2 (zh) | 1984-09-20 | 1984-09-20 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0127106Y2 (zh) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2511205Y2 (ja) * | 1989-06-16 | 1996-09-25 | 株式会社藤田製作所 | バ―ンイン処理装置 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5928347A (ja) * | 1982-08-09 | 1984-02-15 | Nec Corp | 半導体装置のスクリ−ニング装置 |
-
1984
- 1984-09-20 JP JP1984142479U patent/JPH0127106Y2/ja not_active Expired
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5928347A (ja) * | 1982-08-09 | 1984-02-15 | Nec Corp | 半導体装置のスクリ−ニング装置 |
Also Published As
Publication number | Publication date |
---|---|
JPS6157875U (zh) | 1986-04-18 |
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