JPH0125665Y2 - - Google Patents
Info
- Publication number
- JPH0125665Y2 JPH0125665Y2 JP18792583U JP18792583U JPH0125665Y2 JP H0125665 Y2 JPH0125665 Y2 JP H0125665Y2 JP 18792583 U JP18792583 U JP 18792583U JP 18792583 U JP18792583 U JP 18792583U JP H0125665 Y2 JPH0125665 Y2 JP H0125665Y2
- Authority
- JP
- Japan
- Prior art keywords
- wall
- case
- solvent
- spinner
- coating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000000576 coating method Methods 0.000 claims description 47
- 239000011248 coating agent Substances 0.000 claims description 43
- 239000002904 solvent Substances 0.000 claims description 28
- 239000007788 liquid Substances 0.000 claims description 16
- 239000010408 film Substances 0.000 description 11
- 238000000034 method Methods 0.000 description 6
- 239000004065 semiconductor Substances 0.000 description 4
- 239000012634 fragment Substances 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 239000002244 precipitate Substances 0.000 description 2
- 238000001556 precipitation Methods 0.000 description 2
- 239000000047 product Substances 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000001376 precipitating effect Effects 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18792583U JPS6095979U (ja) | 1983-12-05 | 1983-12-05 | 塗布装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18792583U JPS6095979U (ja) | 1983-12-05 | 1983-12-05 | 塗布装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6095979U JPS6095979U (ja) | 1985-06-29 |
| JPH0125665Y2 true JPH0125665Y2 (enrdf_load_stackoverflow) | 1989-08-01 |
Family
ID=30405533
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18792583U Granted JPS6095979U (ja) | 1983-12-05 | 1983-12-05 | 塗布装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6095979U (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2593465B2 (ja) * | 1987-01-30 | 1997-03-26 | 株式会社東芝 | 半導体ウエーハの液処理装置 |
-
1983
- 1983-12-05 JP JP18792583U patent/JPS6095979U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6095979U (ja) | 1985-06-29 |
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