JPS6095979U - 塗布装置 - Google Patents

塗布装置

Info

Publication number
JPS6095979U
JPS6095979U JP18792583U JP18792583U JPS6095979U JP S6095979 U JPS6095979 U JP S6095979U JP 18792583 U JP18792583 U JP 18792583U JP 18792583 U JP18792583 U JP 18792583U JP S6095979 U JPS6095979 U JP S6095979U
Authority
JP
Japan
Prior art keywords
coating
wall
coating device
plate shape
treated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18792583U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0125665Y2 (enrdf_load_stackoverflow
Inventor
中山　宗雄
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Ohka Kogyo Co Ltd
Original Assignee
Tokyo Ohka Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Ohka Kogyo Co Ltd filed Critical Tokyo Ohka Kogyo Co Ltd
Priority to JP18792583U priority Critical patent/JPS6095979U/ja
Publication of JPS6095979U publication Critical patent/JPS6095979U/ja
Application granted granted Critical
Publication of JPH0125665Y2 publication Critical patent/JPH0125665Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
  • Electron Beam Exposure (AREA)
JP18792583U 1983-12-05 1983-12-05 塗布装置 Granted JPS6095979U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18792583U JPS6095979U (ja) 1983-12-05 1983-12-05 塗布装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18792583U JPS6095979U (ja) 1983-12-05 1983-12-05 塗布装置

Publications (2)

Publication Number Publication Date
JPS6095979U true JPS6095979U (ja) 1985-06-29
JPH0125665Y2 JPH0125665Y2 (enrdf_load_stackoverflow) 1989-08-01

Family

ID=30405533

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18792583U Granted JPS6095979U (ja) 1983-12-05 1983-12-05 塗布装置

Country Status (1)

Country Link
JP (1) JPS6095979U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63187630A (ja) * 1987-01-30 1988-08-03 Toshiba Corp 半導体ウエ−ハの液処理装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63187630A (ja) * 1987-01-30 1988-08-03 Toshiba Corp 半導体ウエ−ハの液処理装置

Also Published As

Publication number Publication date
JPH0125665Y2 (enrdf_load_stackoverflow) 1989-08-01

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