JPH01247772A - 真空装置 - Google Patents

真空装置

Info

Publication number
JPH01247772A
JPH01247772A JP63072562A JP7256288A JPH01247772A JP H01247772 A JPH01247772 A JP H01247772A JP 63072562 A JP63072562 A JP 63072562A JP 7256288 A JP7256288 A JP 7256288A JP H01247772 A JPH01247772 A JP H01247772A
Authority
JP
Japan
Prior art keywords
cryopump
vacuum
pump
air
load
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP63072562A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0355678B2 (enExample
Inventor
Mutsuo Mukuda
睦夫 椋田
Yasuo Kataoka
靖雄 片岡
Toshihiko Nakase
俊彦 中瀬
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Precision Products Co Ltd
Original Assignee
Sumitomo Precision Products Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Precision Products Co Ltd filed Critical Sumitomo Precision Products Co Ltd
Priority to JP63072562A priority Critical patent/JPH01247772A/ja
Publication of JPH01247772A publication Critical patent/JPH01247772A/ja
Publication of JPH0355678B2 publication Critical patent/JPH0355678B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B64—AIRCRAFT; AVIATION; COSMONAUTICS
    • B64G—COSMONAUTICS; VEHICLES OR EQUIPMENT THEREFOR
    • B64G7/00—Simulating cosmonautic conditions, e.g. for conditioning crews
    • B64G2007/005—Space simulation vacuum chambers

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP63072562A 1988-03-26 1988-03-26 真空装置 Granted JPH01247772A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63072562A JPH01247772A (ja) 1988-03-26 1988-03-26 真空装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63072562A JPH01247772A (ja) 1988-03-26 1988-03-26 真空装置

Publications (2)

Publication Number Publication Date
JPH01247772A true JPH01247772A (ja) 1989-10-03
JPH0355678B2 JPH0355678B2 (enExample) 1991-08-26

Family

ID=13492926

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63072562A Granted JPH01247772A (ja) 1988-03-26 1988-03-26 真空装置

Country Status (1)

Country Link
JP (1) JPH01247772A (enExample)

Also Published As

Publication number Publication date
JPH0355678B2 (enExample) 1991-08-26

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