JPH0124034B2 - - Google Patents

Info

Publication number
JPH0124034B2
JPH0124034B2 JP57203168A JP20316882A JPH0124034B2 JP H0124034 B2 JPH0124034 B2 JP H0124034B2 JP 57203168 A JP57203168 A JP 57203168A JP 20316882 A JP20316882 A JP 20316882A JP H0124034 B2 JPH0124034 B2 JP H0124034B2
Authority
JP
Japan
Prior art keywords
voltage
bimorph
signal
piezoelectric element
present
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP57203168A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5996880A (ja
Inventor
Tatsuo Konishi
Shigeru Araki
Hideaki Kato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP57203168A priority Critical patent/JPS5996880A/ja
Publication of JPS5996880A publication Critical patent/JPS5996880A/ja
Publication of JPH0124034B2 publication Critical patent/JPH0124034B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/802—Circuitry or processes for operating piezoelectric or electrostrictive devices not otherwise provided for, e.g. drive circuits

Landscapes

  • Adjustment Of The Magnetic Head Position Track Following On Tapes (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
JP57203168A 1982-11-19 1982-11-19 電気機械変換装置 Granted JPS5996880A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57203168A JPS5996880A (ja) 1982-11-19 1982-11-19 電気機械変換装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57203168A JPS5996880A (ja) 1982-11-19 1982-11-19 電気機械変換装置

Publications (2)

Publication Number Publication Date
JPS5996880A JPS5996880A (ja) 1984-06-04
JPH0124034B2 true JPH0124034B2 (enrdf_load_stackoverflow) 1989-05-09

Family

ID=16469570

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57203168A Granted JPS5996880A (ja) 1982-11-19 1982-11-19 電気機械変換装置

Country Status (1)

Country Link
JP (1) JPS5996880A (enrdf_load_stackoverflow)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07109566B2 (ja) * 1985-04-20 1995-11-22 洋太郎 畑村 微細位置決め装置
JPH07109567B2 (ja) * 1986-02-14 1995-11-22 日立建機株式会社 微細位置決め装置
JPS62214413A (ja) * 1986-03-15 1987-09-21 Hitachi Constr Mach Co Ltd 微細位置決め装置
JPS62214412A (ja) * 1986-03-15 1987-09-21 Hitachi Constr Mach Co Ltd 微細位置決め装置
JPS632390A (ja) * 1986-06-20 1988-01-07 Murata Mfg Co Ltd 積層型セラミツク変位装置
JPH071448B2 (ja) * 1986-11-29 1995-01-11 日立建機株式会社 微細位置決め装置
JPH071450B2 (ja) * 1986-11-29 1995-01-11 日立建機株式会社 微細位置決め装置
JPH071449B2 (ja) * 1986-11-29 1995-01-11 日立建機株式会社 微細位置決め装置
JPS6366613A (ja) * 1986-09-09 1988-03-25 Hitachi Constr Mach Co Ltd 微細位置決め装置
JPH071447B2 (ja) * 1986-09-09 1995-01-11 日立建機株式会社 微細位置決め装置
JPS6366615A (ja) * 1986-09-09 1988-03-25 Hitachi Constr Mach Co Ltd 微細位置決め装置
JPH01202178A (ja) * 1988-02-08 1989-08-15 Res Dev Corp Of Japan 圧電アクチュエータの特性線形化方法
JPH07104723B2 (ja) * 1993-09-10 1995-11-13 洋太郎 畑村 微細位置決め装置
JP7691252B2 (ja) * 2021-03-02 2025-06-11 ローム株式会社 制御システムおよび制御方法

Also Published As

Publication number Publication date
JPS5996880A (ja) 1984-06-04

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