JPH01220394A - High-intensity el element - Google Patents

High-intensity el element

Info

Publication number
JPH01220394A
JPH01220394A JP63044628A JP4462888A JPH01220394A JP H01220394 A JPH01220394 A JP H01220394A JP 63044628 A JP63044628 A JP 63044628A JP 4462888 A JP4462888 A JP 4462888A JP H01220394 A JPH01220394 A JP H01220394A
Authority
JP
Japan
Prior art keywords
light
mirror
insulating layer
electrode
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP63044628A
Other languages
Japanese (ja)
Inventor
Kazuo Taguchi
田口 和夫
Kenichi Kizawa
賢一 鬼沢
Katsu Tamura
田村 克
Takahiro Nakayama
隆博 中山
Yoshio Abe
良夫 阿部
Akira Sato
明 佐藤
Kenichi Hashimoto
健一 橋本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP63044628A priority Critical patent/JPH01220394A/en
Publication of JPH01220394A publication Critical patent/JPH01220394A/en
Pending legal-status Critical Current

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Abstract

PURPOSE:To efficiently extract the illuminated light and improve the intensity of a luminous layer by providing a lower electrode, an insulating layer, a luminous layer and an upper electrode in sequence on a substrate and providing a mirror reflecting the light on one face of the luminous layer. CONSTITUTION:A lower electrode 2 is formed in a stripe shape on a glass substrate 1. A Ta2O3 film with the thickness of 1mum is formed as the first insulating layer 3 on the electrode 2, then the surface is formed in a wave shape. The Ta2O3 film is formed by the spattering method, the wave shape is formed by the chemical etching method. A mirror 7 is formed on the insulating layer 3. A metal aluminum film with the thickness of 0.005mum, for example, is used for the mirror 7, the mirror 7 suppresses the luster at the cone-shaped bottom portion and prevents the reflection of the external light. A luminous layer 4 is formed on the mirror 7, the second insulating layer 2 is formed on the luminous layer 4, a back electrode 6 is formed on it. The illuminated light is efficiently extracted, thereby the intensity of the luminous layer can be improved.

Description

【発明の詳細な説明】 [産業上の利用分野] 本発明に、スペースファクタ、表示品質に優れた平面デ
イスプレィとして期待されている薄膜型KL素子に係シ
、特にその高4度化に関する。
DETAILED DESCRIPTION OF THE INVENTION [Industrial Field of Application] The present invention relates to a thin film type KL element that is expected to be used as a flat display with excellent space factor and display quality, and particularly relates to the increase in the height of 4 degrees.

〔従来の技術〕[Conventional technology]

III膜型模型L素子は、全固体、自己発光型、薄型及
び高品質表示等の曖れた特徴を有するために、情報端末
機器のデイスプレィとして適している。
The III-film model L element has vague characteristics such as being completely solid-state, self-luminous, thin, and having high quality display, so it is suitable as a display for information terminal equipment.

既に黄橙色単色のIIIIIデイスプレィ(II、D 
)は市場に出回っておシ、現在はマルチカラー、フルカ
ラーELDの研究が盛んである。マルチカラー、フルカ
ラー化においては、特に高輝度化のための研究が盛んで
ある。
III display (II, D) which is already monochrome yellow-orange
) has been on the market, and research into multi-color and full-color ELDs is currently active. In the field of multicolor and full color, research on increasing brightness is particularly active.

KL素子の構造としては、第2図に示すように発光層の
上下面を誘電体薄膜で被覆した二重絶縁膜構造とするの
が最も寿命が長く、長期的安定性に優れており一般的で
ある。
As shown in Figure 2, the structure of the KL element is a double insulating film structure in which the upper and lower surfaces of the light emitting layer are covered with dielectric thin films, which has the longest life and excellent long-term stability, and is the most common. It is.

変光駆動型二重絶縁膜EL素子の基本構造を第2図によ
シ説明する。すなわち、第2図は従来の薄−mr、+素
子の構造を示す断面概略囚であり、符号1はガラス基板
、2は下部電極、3は第1絶縁層、4tj発光層、5は
第2絶縁ノー、6は背面電極を意味する。ガラス基板1
上に下部電極として透明電極2、第1絶縁層5、発光層
4、第2絶縁層5、透明電極あるいは金属#膜から成る
背面電極6が順次子たんに形成されている。当然発光層
4から発光するが、これを取出す丸めに、下部電極ある
いは背面電極のどちらか一方を透明ic極にする必要が
ある。
The basic structure of a variable light drive type double insulating film EL device will be explained with reference to FIG. That is, FIG. 2 is a schematic cross-sectional view showing the structure of a conventional thin -mr, + element, where 1 is a glass substrate, 2 is a lower electrode, 3 is a first insulating layer, 4 is a light emitting layer, and 5 is a second Insulation No. 6 means back electrode. Glass substrate 1
A transparent electrode 2 as a lower electrode, a first insulating layer 5, a light emitting layer 4, a second insulating layer 5, and a back electrode 6 made of a transparent electrode or a metal #film are sequentially formed on top. Naturally, light is emitted from the light emitting layer 4, but in order to extract this light, it is necessary to make either the lower electrode or the back electrode a transparent IC electrode.

上記EL素子において、下部電極2と背面電極6との間
に交流電界(10’  V/3程度)を印加すると、絶
縁層と発光層との界面から出た電子が発光層4内で電界
によって伝導帯に励起され、かつ加速されて十分なエネ
ルギーを得て発光センターを衝突励起する。励起された
発光センターが基底状態に戻る際にEL発光が起こると
されている。
In the above EL element, when an alternating current electric field (approximately 10' V/3) is applied between the lower electrode 2 and the back electrode 6, electrons emitted from the interface between the insulating layer and the light-emitting layer are moved inside the light-emitting layer 4 by the electric field. It is excited into the conduction band and accelerated to obtain sufficient energy to collide and excite the luminescent center. EL light emission is said to occur when the excited light-emitting center returns to its ground state.

発光センターとしては、Mn、 06% l1fu、 
Tb。
As the luminescent center, Mn, 06% l1fu,
Tb.

Bm 等を、0ehB、 ar8、ZnB等の母体材料
中に少量ドープしたものである。母体材料と発光センタ
ーの組合せによって発光波長の異なる色を得ることがで
きる。例えば、Oe8 ic mu  をドープした場
合は深赤色が得られ、8r8にOe  をドープした場
合は、背緑色、ZnB Ic Tb  をドープすると
緑色、Zn8 KMn  をドープすると黄橙色が得ら
れる。
A small amount of Bm or the like is doped into a base material such as OehB, ar8, or ZnB. Colors with different emission wavelengths can be obtained depending on the combination of the host material and the luminescent center. For example, doping with Oe8 ic mu gives a deep red color, doping 8r8 with Oe gives a dark green color, doping with ZnB Ic Tb gives a green color, and doping with Zn8 KMn gives a yellow-orange color.

〔発明が解決しよりとする課題] 従来のEIJ素子構造では、発光し九光が必要とする方
向以外に散乱するために効率良く光を引出せないという
欠点がある。すなわち従来の素子構造では発光層で得ら
れた光量の約弛程度しか活用されていない。
[Problems to be Solved by the Invention] The conventional EIJ element structure has the disadvantage that light cannot be extracted efficiently because the nine rays of light are scattered in directions other than the required directions. In other words, in the conventional device structure, only about a portion of the amount of light obtained in the light emitting layer is utilized.

本発明の目的は、発光した光を効率良く引出して、発光
層の輝度を上げたBL素子を提供することにある。
An object of the present invention is to provide a BL element that efficiently extracts emitted light and increases the brightness of a light emitting layer.

〔課悪を解決するための手段〕[Means for solving the problem]

本発明を概説すれば、本発明は高14度BL素子に関す
る発明であって、基板上に、下部の′ti、絶縁層、発
光層及び上部の電極を有し、両′鑞極間に電圧を印加す
ることによって発光を行うML素子において、該発光層
の片面に光を反射するミラーを設けたことを特徴とする
To summarize the present invention, the present invention relates to a high 14 degree BL element, which has a lower 'ti, an insulating layer, a light emitting layer, and an upper electrode on a substrate, and has a voltage between both 'ti' electrodes. An ML element that emits light by applying a ray of light is characterized in that a mirror that reflects light is provided on one side of the light emitting layer.

本発明においては、11iL素子の発光層の片面(光を
情報として取出す面の反対1IIIl)にミラーの効果
を有する膜を形成することで、発光層の周囲等に出る光
を防止して反射によって、光情報として取出す面に光を
収集する。それによって、発光層で得られた光が効率良
く引出されるのでKL素子の輝度が高くなる。従来のミ
ラーを設けない場合のZL素子構造では、約晃程度の光
しか活用されておらずほとんどが必要以外の方向に出て
いる。
In the present invention, by forming a film having a mirror effect on one side of the light-emitting layer of the 11iL element (1IIIl opposite to the surface from which light is extracted as information), light emitted from the surroundings of the light-emitting layer is prevented and reflected. , collects light on a surface where it is extracted as optical information. As a result, the light obtained in the light emitting layer is extracted efficiently, so that the brightness of the KL element is increased. In the conventional ZL element structure without a mirror, only about 1000 liters of light is utilized, and most of it is emitted in directions other than necessary.

更に、ミラーの形状をすシ鉢状に形成することで発光層
の周囲への光のロスをなくすることができる。
Furthermore, by forming the mirror in the shape of a bowl, it is possible to eliminate light loss to the surroundings of the light emitting layer.

本発明において、ミラーは基板と′成極との間、電極と
絶縁層との間、絶縁層と発光層との間のうちの1fM所
に設けられているのが好ましい。
In the present invention, the mirror is preferably provided at a position of 1 fM between the substrate and the polarization layer, between the electrode and the insulating layer, and between the insulating layer and the light emitting layer.

史にミラーを設ける位置によって、当然のことながら透
明成極を下部に使用するか背面に使用するかを決める必
要がある。
Naturally, depending on the location of the mirror, it is necessary to decide whether to use transparent polarization at the bottom or at the back.

ミラー材料としては、金属系のものなら何でもよいが、
中でもクロム、アルミニウムがよい。
Any metal material may be used as the mirror material, but
Among them, chromium and aluminum are good.

また、金属層の上に絶縁性の反射層を塗布したものでも
よく、反射層としては鏡面仕上げできるものが好ましい
。その例としては金属箔上に酸化物膜、例えばシリカ膜
を施し、それを鏡面仕上げしたものが挙げられる。
Alternatively, an insulating reflective layer may be coated on the metal layer, and the reflective layer is preferably one that can be mirror-finished. An example of this is a metal foil coated with an oxide film, such as a silica film, and then mirror-finished.

〔実m例〕[Actual example]

以下、本発明を実m例により!1!に具体的に説明する
が、本発明はこれら実施例に限定されない。
The present invention will be explained below using actual examples! 1! However, the present invention is not limited to these Examples.

実施例1 以下、本発明の一実m列f:第1図によシ説明する。す
なわち第1図は本発明の薄膜EL素子の1列の構造を示
す断面概略図で69、符号1〜6は第2図と同義であり
、7はミラーを意味する。
Embodiment 1 Hereinafter, one actual m-series f of the present invention will be explained with reference to FIG. That is, FIG. 1 is a schematic cross-sectional view 69 showing the structure of one row of the thin film EL device of the present invention, where numerals 1 to 6 have the same meanings as in FIG. 2, and 7 means a mirror.

第1図は、l1iIl素子構造モデルで、ガラス基板1
上に、下部電極2として金属アルミニウム膜(厚さ約(
12μm)を抵抗加熱方式により線幅2−1電極間隔α
2−のストライプ状に形成した。
Figure 1 shows an l1iIl element structure model, with a glass substrate 1
On top, a metal aluminum film (with a thickness of approx.
12 μm) using resistance heating method to reduce line width 2-1 electrode spacing α
It was formed into a 2- stripe shape.

この場合、ストライプ状の形成は金属マスクを用いて形
成した。この上に、第1絶縁層3として?alO,@を
1μmの厚さに形成した後に第1図から明らかなように
表面を波状に形成した。T EL! OB膜の形成はス
パッタリング法で行い、波状の形成は化学的エツチング
法を用い友。第1絶縁層3の上にミラー7を形成した。
In this case, the striped pattern was formed using a metal mask. On top of this, as the first insulating layer 3? After forming alO,@ to a thickness of 1 μm, the surface was formed into a wavy shape as seen in FIG. TEL! The OB film is formed by sputtering, and the wavy pattern is formed by chemical etching. A mirror 7 was formed on the first insulating layer 3.

ミラーとしては表面光沢を有する膜であればいかなる材
料を選んでも良い。ここでは、1005μm厚さの金属
アルミニラム膜を使用した。また、ミラーは、すシ林状
の底の部分の光沢を押えると外光反射が防止できる。
Any material may be selected for the mirror as long as it has a glossy surface. Here, a 1005 μm thick metal aluminum membrane was used. In addition, the mirror can prevent reflection of external light by reducing the gloss on the bottom of the mirror.

また、ミラーは平たんに形成しても効果rtある。Further, even if the mirror is formed flat, it is effective.

ミラー7の上にCaS : mu  からなる赤色発光
層4ta子ビ一ム蒸着法により形成した。この発光層形
成においては、まず金属マスクを用いてすシ林状の溝の
中にのみ形成して表面が平らになったところで、チャン
バーを開けて金属マスクを取#)riずし、改めて、(
!a8 : mu  発光層を形成し厚さを増した。す
り林状の底面から発光層の表面までの厚さは約1.5μ
mに形成した。発光層4の上に第2絶縁層5としてT 
a、o、膜をCL5μmの厚さにスパッタリング法によ
って形成した。この上に背面電ムロt−形成した。ここ
では、透明導電膜であるITO(インジウムすず酸化物
)膜(4幅2■、間隔α2韻、厚さCL2μm)を電子
ビーム蒸着法でストライプ状に形成した。なお背面電極
6は下部電極と直交する方向に形成した。
A red light-emitting layer of CaS: mu was formed on the mirror 7 by a 4-ta beam evaporation method. In forming this light-emitting layer, first, a metal mask is used to form it only in the grooves in the shape of a forest, and when the surface is flat, the chamber is opened and the metal mask is removed. (
! a8: A mu light emitting layer was formed and its thickness was increased. The thickness from the bottom of the forest to the surface of the luminescent layer is approximately 1.5μ
It was formed into m. T is formed as a second insulating layer 5 on the light emitting layer 4.
The films a, o, and CL were formed to a thickness of 5 μm by sputtering. On top of this, a back electrode pattern was formed. Here, an ITO (indium tin oxide) film (4 width 2 mm, interval α2 rhyme, thickness CL 2 μm), which is a transparent conductive film, was formed into a stripe shape by electron beam evaporation. Note that the back electrode 6 was formed in a direction perpendicular to the lower electrode.

上記の素子構成においてミラー7r!ガラス基板1と下
部電極2との間、下部電極2と第1絶縁層3との間、発
光層4と第2絶縁層5との間、第2絶縁層5と背面電極
との間等のどこか1箇所に設けても良い。ただしこの場
合、電極と接触する場合には絶縁性のミラー材料を選ぶ
必要がある。更にミラーを設ける位置によって、当然の
ことながら透明電極を下部に使用するか背面に使用する
かを決める必要がある。
In the above element configuration, the mirror 7r! between the glass substrate 1 and the lower electrode 2, between the lower electrode 2 and the first insulating layer 3, between the light emitting layer 4 and the second insulating layer 5, between the second insulating layer 5 and the back electrode, etc. It may be placed somewhere in one place. However, in this case, it is necessary to select an insulating mirror material when it comes into contact with the electrode. Furthermore, depending on the position of the mirror, it is of course necessary to decide whether to use the transparent electrode at the bottom or at the back.

第3図は、上記の方法と同様の方法で作製したKL素子
の下部成極2と背面電極6との間に交流電界を印加して
輝度を測定し、第2図に示した従来法の1!iL1g子
の輝度と比較したグラフであシ、縦軸は4FIf、II
(Cd/m3)を示す。
FIG. 3 shows the brightness measured by applying an alternating current electric field between the lower polarization 2 and the back electrode 6 of a KL element fabricated using a method similar to the method described above. 1! This is a graph comparing the brightness of iL1g, the vertical axis is 4FIf, II
(Cd/m3).

第3図a%b及びCは従来素子構造のものでa′、b′
及びa′は本発明の素子構造のものである。ここで、a
及びa′は、発光層がCa8 : mu からなる赤色
発光素子、b及びb′は、Zn8 : Tb  からな
る緑色発光素子、C及びa′は、Sr8 : Co  
からなる青緑色発光素子の輝度を表わしたものでおる。
Figure 3 a% b and C are of the conventional element structure, a', b'
and a' are those of the device structure of the present invention. Here, a
and a' are red light-emitting devices whose light-emitting layer is composed of Ca8:mu, b and b' are green light-emitting devices whose light-emitting layer is composed of Zn8:Tb, and C and a' are Sr8:Co.
This represents the brightness of a blue-green light emitting element consisting of:

第3囚から明らかなように、赤色の輝には、a;760
067 m”、 a’=+ 1100 cd/m”、緑
色の輝度は、b = 3950 a67m”、1)’=
6070c d/@”、青緑色のt4glLは、a =
 980 ad/yB”、0′=15500dl m雪
 である。この結果から、本発明による素子は従来の素
子に比較して約1.5倍高い4反が得られることが明ら
かになった。これに対して段差のない平たんなミラーの
場合は、通常のものよシ約1.2倍高い輝度が得られた
As is clear from the third prisoner, the red glow has a; 760
067 m", a'=+1100 cd/m", green brightness is b=3950 a67 m", 1)'=
6070c d/@”, blue-green t4glL is a =
980 ad/yB", 0' = 15500 dl m snow. From these results, it is clear that the element according to the present invention can obtain a 4-turn value that is about 1.5 times higher than the conventional element. On the other hand, in the case of a flat mirror with no steps, the brightness was about 1.2 times higher than that of a normal mirror.

〔発明の効果〕〔Effect of the invention〕

以上説明したように、本発明によれば、発光する輝度を
有効に引出すことができるので、MLの輝度を上げるの
に大きな効果がらシ、特にマルチカラー、フルカラー1
1iLDの実用化に効果が大きい。
As explained above, according to the present invention, it is possible to effectively draw out the luminance of the light emitted, so it has a great effect on increasing the luminance of ML, especially in multi-color and full-color 1
This will have a great effect on the practical application of 1iLD.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の薄膜11ili素子の1例の構造を示
す断面概略図、第2図は従来例の薄11!IKL素子の
構造を示す断面概略図、第3図は従来品と本発明品との
BLfp度比較全比較グラフである。 1ニガラス基板、2:下部電極、3:第1絶鍬層、4:
発光層、5:第2絶縁層0.6:背面電極、7:ミラー
FIG. 1 is a schematic cross-sectional view showing the structure of an example of a thin film 11ili element of the present invention, and FIG. 2 is a conventional thin film 11! FIG. 3 is a cross-sectional schematic diagram showing the structure of the IKL element, and is a complete comparison graph of the BLfp degree between the conventional product and the product of the present invention. 1 glass substrate, 2: lower electrode, 3: first insulation layer, 4:
Light emitting layer, 5: second insulating layer 0.6: back electrode, 7: mirror

Claims (2)

【特許請求の範囲】[Claims] 1. 基板上に、下部の電極、絶縁層、発光層及び上部
の電極を有し、両電極間に電圧を印加することによつて
発光を行うEL素子において、該発光層の片面に光を反
射するミラーを設けたことを特徴とする高輝度EL素子
1. In an EL element that has a lower electrode, an insulating layer, a light-emitting layer, and an upper electrode on a substrate and emits light by applying a voltage between both electrodes, light is reflected on one side of the light-emitting layer. A high-brightness EL element characterized by being equipped with a mirror.
2. 該ミラーは、基板と電極との間、電極と絶縁層と
の間、絶縁層と発光層との間のうちの1箇所に設けられ
ている請求項1記載の高輝度EL素子。
2. 2. The high-brightness EL device according to claim 1, wherein the mirror is provided at one of the locations between the substrate and the electrode, between the electrode and the insulating layer, and between the insulating layer and the light emitting layer.
JP63044628A 1988-02-29 1988-02-29 High-intensity el element Pending JPH01220394A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
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Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
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Publications (1)

Publication Number Publication Date
JPH01220394A true JPH01220394A (en) 1989-09-04

Family

ID=12696689

Family Applications (1)

Application Number Title Priority Date Filing Date
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Country Status (1)

Country Link
JP (1) JPH01220394A (en)

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US6734624B2 (en) 1999-12-08 2004-05-11 Nec Corporation Organic electro-luminescence device and method for fabricating same
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