JPH0498790A - Thin film electroluminescence device - Google Patents
Thin film electroluminescence deviceInfo
- Publication number
- JPH0498790A JPH0498790A JP2211592A JP21159290A JPH0498790A JP H0498790 A JPH0498790 A JP H0498790A JP 2211592 A JP2211592 A JP 2211592A JP 21159290 A JP21159290 A JP 21159290A JP H0498790 A JPH0498790 A JP H0498790A
- Authority
- JP
- Japan
- Prior art keywords
- light
- thin film
- emitted
- substrate
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 title claims abstract description 24
- 238000005401 electroluminescence Methods 0.000 title abstract description 4
- 239000000758 substrate Substances 0.000 claims abstract description 29
- 229910052751 metal Inorganic materials 0.000 claims abstract description 19
- 239000002184 metal Substances 0.000 claims abstract description 19
- 230000005684 electric field Effects 0.000 abstract description 2
- 239000011521 glass Substances 0.000 description 8
- 239000000463 material Substances 0.000 description 4
- 238000005530 etching Methods 0.000 description 3
- 239000010408 film Substances 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- -1 CaF2 Chemical class 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 229910052771 Terbium Inorganic materials 0.000 description 1
- 239000005354 aluminosilicate glass Substances 0.000 description 1
- 238000000149 argon plasma sintering Methods 0.000 description 1
- WUKWITHWXAAZEY-UHFFFAOYSA-L calcium difluoride Chemical compound [F-].[F-].[Ca+2] WUKWITHWXAAZEY-UHFFFAOYSA-L 0.000 description 1
- 229910001634 calcium fluoride Inorganic materials 0.000 description 1
- 150000004770 chalcogenides Chemical class 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 150000002222 fluorine compounds Chemical class 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 229910001635 magnesium fluoride Inorganic materials 0.000 description 1
- 229910052748 manganese Inorganic materials 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 229910052761 rare earth metal Inorganic materials 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000007785 strong electrolyte Substances 0.000 description 1
Abstract
Description
【発明の詳細な説明】
[産業上の利用分野コ
本発明は薄膜エレクトロルミネッセンス素子(以下薄膜
EL素子と略記する)に関するものであり、一般のデイ
スプレィや画像読み取り装置の光源として使用できるも
のである。[Detailed Description of the Invention] [Industrial Field of Application] The present invention relates to a thin film electroluminescent device (hereinafter abbreviated as a thin film EL device), which can be used as a light source for general displays and image reading devices. .
[従来の技術]
蛍光体に強い電解を印加した時に生じる発光現象を利用
した薄膜EL素子は視認性に優れた大画面のフラットパ
ネルデイスプレィとして応用されるようになってきた。[Prior Art] Thin-film EL devices that utilize the light-emitting phenomenon that occurs when a strong electrolyte is applied to a phosphor have come to be used as large-screen flat panel displays with excellent visibility.
薄膜EL素子の代表的な構造は、例えば、第4図に示す
とおり、透明ガラス基板19上に透明電極20、絶縁層
2L発光層22、絶縁層23、金属電極24を積層した
ようなものである。A typical structure of a thin film EL element is, for example, as shown in FIG. 4, in which a transparent electrode 20, an insulating layer 2L, a light emitting layer 22, an insulating layer 23, and a metal electrode 24 are laminated on a transparent glass substrate 19. be.
しかしながら、透明電極20および透明ガラス基板I9
を通して放出される光は面発光のため、指向性がなく、
画像読取りは装置の光源として適当である集中した光を
取り出すことはできない。However, the transparent electrode 20 and the transparent glass substrate I9
The light emitted through it is surface-emitting, so there is no directionality.
Image reading cannot extract concentrated light that is suitable as a light source for the device.
[発明が解決しようとする課題]
本発明は集中した強い光を放出することができる薄膜E
L素子を提供しようとするものである。[Problem to be solved by the invention] The present invention provides a thin film E that can emit concentrated and strong light.
This is intended to provide an L element.
[R題を解決するための手段]
上記課題を達成するための本発明の構成は特許請求の範
囲記載の通り、(1)金属電極層、薄膜エレクトロルミ
ネッセンス層、金属電極層を順次積層した基板と同一基
板上に光の反射体を設け、薄膜エレクトロルミネッセン
ス層の端面から放出された光を、その放出方向とは異な
った方向に放出するようにした薄膜エレクトロルミネッ
センス素子、(2)基板上の積層が発光波長特性の異な
る複数の薄膜エレクトロルミネッセンス層と電極層を交
互に積層し、少なくとも最下層と最上層が金属電極層で
ある上記(1)項記載の薄膜エレクトロルミネッセンス
素子である。[Means for Solving Problem R] As described in the claims, the structure of the present invention for achieving the above object is as follows: (1) a substrate on which a metal electrode layer, a thin film electroluminescent layer, and a metal electrode layer are sequentially laminated; (2) A thin film electroluminescent element in which a light reflector is provided on the same substrate and the light emitted from the end face of the thin film electroluminescent layer is emitted in a direction different from the emission direction. The thin film electroluminescent device according to item (1) above, wherein a plurality of thin film electroluminescent layers and electrode layers having different emission wavelength characteristics are alternately laminated, and at least the bottom layer and the top layer are metal electrode layers.
本発明を実現するための薄膜EL素子の構成の一例を図
面によって具体的に説明すると、第1図又は第2図にお
いて1は絶縁性基板、2及び8は金属電極、3及び5は
絶縁層、4は発光層である。7は少なくとも表面が光を
反射する物質からなる突起物である。この突起物は発光
層、絶縁層、金属電極を成膜する前に基板上に形成する
か、あるいは成膜後に積層した薄膜層の一部をエツチン
グにより除去した後の基板上に形成する。An example of the structure of a thin film EL element for realizing the present invention will be explained in detail with reference to the drawings. In FIG. 1 or 2, 1 is an insulating substrate, 2 and 8 are metal electrodes, and 3 and 5 are insulating layers. , 4 is a light emitting layer. 7 is a protrusion whose at least surface is made of a material that reflects light. These protrusions are formed on the substrate before forming the light emitting layer, insulating layer, and metal electrode, or after forming the films and removing a part of the laminated thin film layer by etching.
金属電極2と 6の間に高電圧を印加すると、発光層内
で強電界によりエレクトロルミネッセンス発光が起こる
。この光は金属電極で反射され上下方向に漏れずに発光
層4の端面から矢印のように放出される。端面から放出
された光は突起物7の表面で反射し、基板に対して垂直
方向に光が放出される。すなわち、発光層4で生じた光
を突起物7により反射し、基板に対して垂直上方に有効
に取り出すことが可能となる。When a high voltage is applied between the metal electrodes 2 and 6, electroluminescence occurs within the light emitting layer due to the strong electric field. This light is reflected by the metal electrode and is emitted from the end face of the light emitting layer 4 as shown by the arrow without leaking upward or downward. The light emitted from the end face is reflected by the surface of the protrusion 7, and the light is emitted in a direction perpendicular to the substrate. That is, the light generated in the light emitting layer 4 can be reflected by the protrusion 7 and can be effectively extracted vertically upward relative to the substrate.
この突起物7は放出される光を垂直方向に反射するよう
に基板に対して45″の角度で設けられているが、この
角度は目的によっては必ずしも45@に限らない。又、
突起物7の位置は第2図に示すように基板端部に設けて
もよい。This protrusion 7 is provided at an angle of 45'' with respect to the substrate so as to reflect the emitted light in the vertical direction, but this angle is not necessarily limited to 45@ depending on the purpose.
The protrusion 7 may be located at the edge of the substrate as shown in FIG.
上記の構成においては、基板上方に光を取り出すため、
基板が必ずしも透明である必要がなく、ガラス基板以外
にセラミックス基板等の不透明な基板を用いることがで
きる。金属電極2及び6としてはAI、Ag、Crなど
を用いることができる。又、絶縁層3及び5の材料とし
ては5i02、Ta205、Y2O3等の酸化物、BN
、AIN、Si3N4等の窒化物及びそれらの複合膜、
CaF2、MgF2等の弗化物、あるいは5rTiOs
、PbTi0a等のペロブスカイト型強誘電体材料を用
いることができる。発光層としてはMnやTbを添加し
たZnSあるいはCe5Eu等の希土類元素を添加した
アルカリ土類元素のカルコゲン化物を用いる。In the above configuration, in order to extract light above the substrate,
The substrate does not necessarily have to be transparent, and an opaque substrate such as a ceramic substrate can be used instead of a glass substrate. As the metal electrodes 2 and 6, AI, Ag, Cr, etc. can be used. In addition, the materials for the insulating layers 3 and 5 include oxides such as 5i02, Ta205, Y2O3, and BN.
, AIN, nitrides such as Si3N4, and composite films thereof,
Fluorides such as CaF2, MgF2, or 5rTiOs
, PbTi0a, or other perovskite-type ferroelectric materials can be used. The light-emitting layer is made of ZnS doped with Mn or Tb or a chalcogenide of an alkaline earth element doped with a rare earth element such as Ce5Eu.
以下に本発明を実施例により更に詳細に説明する。The present invention will be explained in more detail below using examples.
実施例1
第1図の構成の素子において、ガラス基板Iとしてアル
ミノシリケートガラスを用いた。突起物7は、ガラス基
板上に5i02の薄膜を形成し、フォトリソグラフィー
工程により、約45度の傾きの斜面を持つ断面となるよ
うに加工して、形成する。金属電極2及び6はCr、絶
縁層3はAIN、絶縁層5はAINと5i02の積層膜
、発光層4はCeを添加したSrSによりそれぞれ形成
した。次に、フォトリソグラフィーにより突起物7に沿
ってエツチングを行い、下部のCr電極が残るように加
工し、突起物を鏡面として利用する。Example 1 In the device having the configuration shown in FIG. 1, aluminosilicate glass was used as the glass substrate I. The protrusions 7 are formed by forming a 5i02 thin film on a glass substrate and processing it by a photolithography process so that it has a cross section having a slope inclined at about 45 degrees. The metal electrodes 2 and 6 were formed of Cr, the insulating layer 3 was formed of AIN, the insulating layer 5 was formed of a laminated film of AIN and 5i02, and the light emitting layer 4 was formed of SrS doped with Ce. Next, etching is performed along the protrusion 7 by photolithography so that the Cr electrode at the bottom remains, and the protrusion is used as a mirror surface.
金属電極2及びBの間に電圧を印加すると発光層4内で
発光が起り、上下の金属電極で多重反射された後、端面
から放出され、突起物7の鏡面で反射されて、基板に対
して、垂直方向に取り出される。端面からの光を直接反
射させているため、放出される光はかなり指向性が強い
。When a voltage is applied between the metal electrodes 2 and B, light is emitted within the light emitting layer 4, and after being reflected multiple times by the upper and lower metal electrodes, it is emitted from the end face, reflected by the mirror surface of the protrusion 7, and emitted toward the substrate. and then taken out vertically. Since the light from the end face is directly reflected, the emitted light is highly directional.
この薄膜EL素子は基板側から光を取り出す構造ではな
いため、透明なガラス基板の代わりに不透明なセラミッ
クス基板を用いてもよいことは明らかである。Since this thin film EL element does not have a structure in which light is extracted from the substrate side, it is clear that an opaque ceramic substrate may be used instead of a transparent glass substrate.
実施例2
第3図は本発明の他の実施例を示し、上記実施例と同様
に、突起物18を設けたガラス基板8上にCr金属電極
9.13及び17、AIN絶縁層lO及び14、AIN
と5i02の積層膜からなる絶縁層12及び16、Eu
を添加したCaSからなる発光層11、Ceを添加した
SrSからなる発光層15を形成した。Embodiment 2 FIG. 3 shows another embodiment of the present invention, in which Cr metal electrodes 9, 13 and 17, AIN insulating layers lO and 14 are placed on a glass substrate 8 provided with protrusions 18, similar to the embodiment described above. , A.I.N.
and 5i02 insulating layers 12 and 16, Eu
A light emitting layer 11 made of CaS doped with Ce and a light emitting layer 15 made of SrS doped with Ce were formed.
上記実施例1と同様に突起物1Bに沿ってエツチングし
Crの鏡面を残すようにする。3層の電極層にかける電
圧を適当に調節することで、緑青、赤及びそのあいだの
中間色の発光が基板上方に放出される。As in Example 1, etching is performed along the protrusions 1B to leave a Cr mirror surface. By appropriately adjusting the voltages applied to the three electrode layers, green-blue, red, and intermediate colors of light are emitted above the substrate.
以上の通り本発明によれば、透明電極を用いていないた
め、電極の高抵抗化のない、長期信頼性に優れた薄膜E
L素子が得られる。As described above, according to the present invention, since a transparent electrode is not used, a thin film E with excellent long-term reliability is achieved without increasing the resistance of the electrode.
An L element is obtained.
[発明の効果コ
以上説明したように、本発明の薄膜EL素子は強い、集
中した光を放出することかできる。[Effects of the Invention] As explained above, the thin film EL device of the present invention can emit strong and concentrated light.
第1図及び第2図は本発明の実施例の断面図、第3図は
本発明の他の実施例の断面図、第4図は従来の薄膜EL
素子の断面図を示す。
1.8.19・・・ガラス基板、
2.6,9,13,17.24・・・金属電極、3.5
,10,12,14,21.23・・・絶縁層、4.1
1,15.22・・・発光層、7,18・・・光散乱材
、20・・・透明電極。1 and 2 are cross-sectional views of an embodiment of the present invention, FIG. 3 is a cross-sectional view of another embodiment of the present invention, and FIG. 4 is a conventional thin film EL.
A cross-sectional view of the element is shown. 1.8.19...Glass substrate, 2.6,9,13,17.24...Metal electrode, 3.5
, 10, 12, 14, 21.23... insulating layer, 4.1
1,15.22...Light emitting layer, 7,18...Light scattering material, 20...Transparent electrode.
Claims (2)
金属電極層を順次積層した基板と同一基板上に光の反射
体を設け、薄膜エレクトロルミネッセンス層の端面から
放出された光を、その放出方向とは異なった方向に放出
するようにしたことを特徴とする薄膜エレクトロルミネ
ッセンス素子。(1) Metal electrode layer, thin film electroluminescent layer,
A light reflector is provided on the same substrate as the one on which the metal electrode layers are sequentially laminated, so that the light emitted from the end face of the thin film electroluminescent layer is emitted in a direction different from the direction in which it is emitted. Thin film electroluminescent device.
エレクトロルミネッセンス層と電極層を交互に積層し、
少なくとも最下層と最上層が金属電極層であることを特
徴とする請求項(1)記載の薄膜エレクトロルミネッセ
ンス素子。(2) A plurality of thin film electroluminescent layers and electrode layers having different emission wavelength characteristics are alternately laminated on the substrate,
2. The thin film electroluminescent device according to claim 1, wherein at least the bottom layer and the top layer are metal electrode layers.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2211592A JPH0498790A (en) | 1990-08-13 | 1990-08-13 | Thin film electroluminescence device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2211592A JPH0498790A (en) | 1990-08-13 | 1990-08-13 | Thin film electroluminescence device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0498790A true JPH0498790A (en) | 1992-03-31 |
Family
ID=16608320
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2211592A Pending JPH0498790A (en) | 1990-08-13 | 1990-08-13 | Thin film electroluminescence device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0498790A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2014135183A (en) * | 2013-01-09 | 2014-07-24 | Ricoh Opt Ind Co Ltd | Organic el light emitting device and method for manufacturing the same |
WO2021176539A1 (en) * | 2020-03-02 | 2021-09-10 | シャープ株式会社 | Display device |
-
1990
- 1990-08-13 JP JP2211592A patent/JPH0498790A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2014135183A (en) * | 2013-01-09 | 2014-07-24 | Ricoh Opt Ind Co Ltd | Organic el light emitting device and method for manufacturing the same |
WO2021176539A1 (en) * | 2020-03-02 | 2021-09-10 | シャープ株式会社 | Display device |
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