JPH0121558Y2 - - Google Patents
Info
- Publication number
- JPH0121558Y2 JPH0121558Y2 JP7356685U JP7356685U JPH0121558Y2 JP H0121558 Y2 JPH0121558 Y2 JP H0121558Y2 JP 7356685 U JP7356685 U JP 7356685U JP 7356685 U JP7356685 U JP 7356685U JP H0121558 Y2 JPH0121558 Y2 JP H0121558Y2
- Authority
- JP
- Japan
- Prior art keywords
- motor
- temperature
- semiconductor wafer
- resist
- increases
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 claims description 20
- 239000011248 coating agent Substances 0.000 claims description 7
- 238000000576 coating method Methods 0.000 claims description 7
- 235000012431 wafers Nutrition 0.000 description 16
- 230000000694 effects Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7356685U JPH0121558Y2 (US20030204162A1-20031030-M00001.png) | 1985-05-20 | 1985-05-20 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7356685U JPH0121558Y2 (US20030204162A1-20031030-M00001.png) | 1985-05-20 | 1985-05-20 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS61190131U JPS61190131U (US20030204162A1-20031030-M00001.png) | 1986-11-27 |
JPH0121558Y2 true JPH0121558Y2 (US20030204162A1-20031030-M00001.png) | 1989-06-27 |
Family
ID=30613058
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7356685U Expired JPH0121558Y2 (US20030204162A1-20031030-M00001.png) | 1985-05-20 | 1985-05-20 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0121558Y2 (US20030204162A1-20031030-M00001.png) |
-
1985
- 1985-05-20 JP JP7356685U patent/JPH0121558Y2/ja not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS61190131U (US20030204162A1-20031030-M00001.png) | 1986-11-27 |
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