JPH0121558Y2 - - Google Patents

Info

Publication number
JPH0121558Y2
JPH0121558Y2 JP7356685U JP7356685U JPH0121558Y2 JP H0121558 Y2 JPH0121558 Y2 JP H0121558Y2 JP 7356685 U JP7356685 U JP 7356685U JP 7356685 U JP7356685 U JP 7356685U JP H0121558 Y2 JPH0121558 Y2 JP H0121558Y2
Authority
JP
Japan
Prior art keywords
motor
temperature
semiconductor wafer
resist
increases
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP7356685U
Other languages
English (en)
Japanese (ja)
Other versions
JPS61190131U (US20030204162A1-20031030-M00001.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7356685U priority Critical patent/JPH0121558Y2/ja
Publication of JPS61190131U publication Critical patent/JPS61190131U/ja
Application granted granted Critical
Publication of JPH0121558Y2 publication Critical patent/JPH0121558Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP7356685U 1985-05-20 1985-05-20 Expired JPH0121558Y2 (US20030204162A1-20031030-M00001.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7356685U JPH0121558Y2 (US20030204162A1-20031030-M00001.png) 1985-05-20 1985-05-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7356685U JPH0121558Y2 (US20030204162A1-20031030-M00001.png) 1985-05-20 1985-05-20

Publications (2)

Publication Number Publication Date
JPS61190131U JPS61190131U (US20030204162A1-20031030-M00001.png) 1986-11-27
JPH0121558Y2 true JPH0121558Y2 (US20030204162A1-20031030-M00001.png) 1989-06-27

Family

ID=30613058

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7356685U Expired JPH0121558Y2 (US20030204162A1-20031030-M00001.png) 1985-05-20 1985-05-20

Country Status (1)

Country Link
JP (1) JPH0121558Y2 (US20030204162A1-20031030-M00001.png)

Also Published As

Publication number Publication date
JPS61190131U (US20030204162A1-20031030-M00001.png) 1986-11-27

Similar Documents

Publication Publication Date Title
JPH0121558Y2 (US20030204162A1-20031030-M00001.png)
JPS61235833A (ja) 塗布装置
JPH0341715A (ja) スピンコーター
JP3493398B2 (ja) ベーキング方法および半導体装置の製造方法
JPS6226817A (ja) スピンナ−装置
JP3194815B2 (ja) レジスト塗布装置
JPS62185322A (ja) フオトレジスト塗布装置
JP2975140B2 (ja) 回転処理装置
JPH03145715A (ja) 回転塗布膜形成装置
JPS6222661B2 (US20030204162A1-20031030-M00001.png)
JPH05259050A (ja) 半導体基板のスピンコーティング方法および装置
JPH02196415A (ja) レジスト回転塗布装置
JPH05259063A (ja) 半導体基板のスピンコーティング方法
JPH01211919A (ja) 回転塗布装置
JPS63299335A (ja) レジスト塗布装置及びレジスト塗布方法
JPH05259049A (ja) 半導体基板のスピンコーティング方法
JPH0529206A (ja) レジスト塗布装置
JPH04361524A (ja) レジスト塗布方法
JPH05144721A (ja) フオトレジスト塗布装置
JPH05283330A (ja) レジスト塗布装置及びレジスト塗布方法
JPS60152029A (ja) 塗布装置
JPH05144720A (ja) 塗布方法および塗布装置
JPH01236971A (ja) ウエハの塗布液塗布方法
JPH01226150A (ja) スピンチャック
KR20020020130A (ko) 스핀 코터 및 이를 이용한 웨이퍼 에지 포토레지스트 제거방법