JPH01214863A - Developing device - Google Patents

Abstract

PURPOSE:To remove a developer in a short time by washing the developer remaining on a master disk by a pressurized washing liquid. CONSTITUTION:A master disk 101 on which a latent image is formed by the exposure processing is fixed on a turntable 1 and rotated, and pure water is allowed to flow out while moving the front end of a pure water nozzle 5 to pre-rinse the master disk 101. The developer is discharged or sprayed out from a developer nozzle 3 to remove a resist on the latent image part. For the purpose of washing away the developer stuck to the master disk 101, pure water of high water pressure is sprayed to the master disk 101 from the high pressure water nozzle 7 to rinse it with water of high pressure after post-rinsing with pure water from the nozzle 5. Thereafter, the master disk 101 is dried to terminate the development process.

Description

DETAILED DESCRIPTION OF THE INVENTION [Object of the Invention] (Industrial Field of Application) The present invention relates to a developing device used in a developing process during the production of master discs for information storage media such as optical discs.

(Prior Art) In recent years, information storage media such as optical disks have come to be widely used in image information storage and retrieval devices, music or video playback devices, and the like. This information storage medium is usually reproduced in large quantities using a stamper formed from a master as a mold.

Below is a brief explanation of optical discs, which are information storage media! IJ*
The process will be briefly explained with reference to FIGS. 3, 4, and 5.

The master 101 shown in FIG. 5(1) is prepared by precisely polishing and cleaning the surface of a disk-shaped glass substrate 103, and then applying a photoresist 105 for exposure transfer to a uniform film thickness, for example, 0.
．． It was applied to a thickness of about 1 μm and then dried.

As shown in FIG. 5(2), this master disc 101 is placed on a turntable rotated by a spindle motor or the like, and rotated at a constant speed of, for example, 1800 rpm. Argon laser or He-Cd focused into a spot
Laser light 120 such as a laser is irradiated and exposed for a predetermined time. By this exposure, a latent image 107 is obtained in the 7-odd resist 105wR.

Next, the development process will be explained. As shown in FIG. 3(A), a pure water nozzle 1 is attached to a master 101 fixed to a turntable 1 which rotates using a spindle motor or the like as a rotational drive source.
The original 518101 is cleaned, ie, pre-rinsed, by letting pure water flow out from the original 518101 (step 41 in FIG. 4). Next, a developer (etching solution) is sprayed from the developer nozzle 105 to remove the exposed portion of the photoresist 105, thereby converting the latent image 107 into continuous or discontinuous grooves as shown in FIG. 5(3). The pre-groove is a guide groove,
Bits formed according to information (below).

These pregrooves, bits, etc. are collectively referred to as group 9) (step 43). Furthermore, pure water is flowed out from the pure water nozzle 105 onto the surface of the master disk 101 that has been subjected to the development process to wash away the developer adhering to the master disk 101, that is, perform post-rinsing (step 45), and after stopping the development, it is dried. (Step 47), and the development process is completed.

At this time, as shown in FIG. 3(B), the deionized water nozzle 105 is swingably supported by the arm 105A, and moves horizontally approximately in the radial direction of the master 101, so that the deionized water is sprayed onto the master 11!
101 so that it flows over the entire surface.

Next, as shown in FIG. 5 (4), this master 101 is nickel-plated to form a stamper 11 that will become a mold for resin molding.
Mold 1.

Furthermore, as shown in FIG. 5(5), a replica 113 is molded by plastic molding such as injection molding based on this stamper 111.

Thereafter, as shown in FIG. 5(6), an aluminum reflective film and a recording layer 1115 are formed by vapor deposition or the like, and the upper surface is further covered with a transparent protective layer 117 to complete the optical disc.

Note that the above-mentioned development process is usually performed using the processing time as a guide, but the development speed usually varies depending on, for example, the rotational speed of the master 101, the developer concentration, and the developer concentration, so the development process time may be the same. Also, the formation conditions of the groups 109, for example, the width and depth of the groups 109, are different.

(Problems to be Solved by the Invention) On the other hand, the developer used in the above-mentioned development process is usually an alkaline solution with viscosity. 109
The developing solution tends to adhere and remain on the inside, etc., and it is necessary to spend a lot of time and pure water to clean the developing solution.

The present invention has been made in view of the above, and an object thereof is to provide a development @ which can completely remove the developer in a short period of time.

[Structure of the Invention] (Means for Solving the Problems) In order to achieve the above object, the present invention provides a method of applying a developer to a latent image formed on a photoresist layer of a master and then performing a development process. a developing means for washing the developing solution by flowing a washing solution;
and a pressurizing means for increasing the water pressure of the cleaning liquid.

(Function) In the developing device of the present invention, after the original image means performs a development process on the latent image formed on the photoresist of the master, the pressurizing means is used to clean the developing solution adhering to the master. By applying pressure to the cleaning liquid using a 3D printer, the cleaning liquid is sprayed out at a predetermined pressure toward the master disc, allowing the developer, which is normally sticky and strongly adhered to the master disc, to be completely removed in a short period of time. It is something to be cleaned.

(Example) Hereinafter, an example of the present invention will be described in detail using the drawings.

As shown in the schematic configuration diagram of FIG. 1, the developing device of this embodiment includes a developer nozzle 3 that is fixed to the turntable 1 and discharges the developer toward an original 511i101 that rotates at a constant speed; It is equipped with a pure water nozzle 5 that discharges pure water, and a high-pressure water nozzle 7 that spouts high-pressure pure water. These three types of nozzles 3.5.7 are each configured to be movable horizontally in the approximate radial direction of the master.

This high-pressure water nozzle 7 is connected to a high-pressure pump 11 via a high-pressure water pressure regulator 9.

The high-pressure water pressure regulator 9 is equipped with a water pressure adjustment valve that adjusts the pressure of pure water jetted from the high-pressure water nozzle 7, and maintains the optimum water pressure to efficiently wash the developer without damaging the photoresist 105. Adjust so that water reaches the master.

The high-pressure pump 11 is a pump for pressurizing pure water supplied from the pure water outlet 17 to a predetermined pressure. Introduced into the piston cylinder, high pressure is generated on the secondary side piston cylinder side, which has a smaller diameter than this downstream side piston cylinder, and pressurizes the pure water introduced into this secondary side piston cylinder. It is something.

Next, the development process of this embodiment will be explained according to the flowchart of FIG.

After the master disc 101 on which a latent image has been formed by exposure processing is mounted and fixed on the turntable 1, it is driven to rotate at a constant speed. Next, while moving the tip of the deionized water nozzle 5 in the radial direction of the master, pure water is flowed out from the deionized water nozzle 5 onto the master 101 rotating at a constant speed for pre-rinsing (step 21).

After this pre-rinsing is completed, the developer is discharged or sprayed from the developer nozzle 3 (step 23), and! The photoresist 105 in the latent image portion formed by light is removed.

The progress of this development process is monitored, for example, by monitoring the intensity of the diffracted light from the laser beam irradiated onto the master 101, or it is confirmed by the passage of a predetermined time, and when the appropriate amount of development has been achieved, the developer is Finish dispensing.

Next, in order to wash away the developing solution adhering to this master 101, first, pure water is flowed out from the pure water nozzle 5 and a post-rinse is actually flowed (step 25), and then the high-pressure water nozzle 7
A high-pressure water rinse is performed by spouting high-pressure pure water toward the master disk 101 (step 27).

At this time, the pure water that hits the master disc under high pressure splashes off and cleans the developer pool that has adhered to the fine depressions such as group 109, so that the development is completed in a short time. The liquid can be washed.

Finally, the pure water remaining on the cleaned master 101 is dried (step 29), and the developing process is completed.

As described above, in this embodiment, the developer attached to the master 101 is completely removed over the entire surface in a short period of time, so that it is possible to prevent uneven development and reduce the time in the development process. Can be done.

[Effects of the Invention] As explained above, according to the present invention, the cleaning of the developer during the development process is carried out using a pressurized cleaning liquid, so that the cleaning process can be completed in a short time and completely. It has the effect of being able to do things.

[Brief explanation of the drawing]

FIG. 1 is a schematic configuration diagram showing the main parts of an embodiment of the present invention.
2 is a flowchart related to FIG. 1, FIG. 3 is a schematic configuration diagram of a conventional example, FIG. 4 is a flowchart related to FIG. 3,
FIG. 5 is an explanatory diagram for explaining the manufacturing process of an optical disc. 7... High pressure water nozzle 11... High pressure pump 13... Pneumatic car next side port

Claims (1)

[Scope of Claims] A developing means for applying a developing solution to a latent image formed on a photoresist layer of a master and performing a developing process, and then washing the developing solution by flowing a cleaning solution, and controlling the water pressure of the cleaning solution. 1. A developing device comprising: a means for increasing pressure.