JPH023129A - Developing device for master disk of optical disk - Google Patents

Developing device for master disk of optical disk

Info

Publication number
JPH023129A
JPH023129A JP63142161A JP14216188A JPH023129A JP H023129 A JPH023129 A JP H023129A JP 63142161 A JP63142161 A JP 63142161A JP 14216188 A JP14216188 A JP 14216188A JP H023129 A JPH023129 A JP H023129A
Authority
JP
Japan
Prior art keywords
developer
discharge port
optical disk
rinse
developing device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP63142161A
Other languages
Japanese (ja)
Inventor
Shoichi Nanba
難波 祥一
Yoshimasa Nakajima
中島 祥雅
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP63142161A priority Critical patent/JPH023129A/en
Publication of JPH023129A publication Critical patent/JPH023129A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To attain the complete elimination of dust and developer being adhered by providing a crosswise moving washing discharge opening besides a discharge opening discharging the developer and rinse. CONSTITUTION:Developer and rinse are discharged on an optical master disk 14 on an electric turn table 15 from a developer/rinse discharge opening 12 and the master disk is developing-processed. After that, the adhesive dust of the master disk 14 and the developer and so on which can not eliminated completely by the rinse are eliminated by the discharging of pressure washing from a washing discharge opening 18 which crosswise moves by an electric oscillating arm and of which tip top is nozzle shaped and good developing-processing is executed.

Description

【発明の詳細な説明】 産業上の利用分野 本発明は、ビデオディスク、ディジタルオーディオディ
スク、静止画・文書ファイルなどの光ディスクを作製す
るだめの光ディスク原盤用現像装置に関するものである
DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a developing device for optical disc masters for producing optical discs such as video discs, digital audio discs, still images and document files.

従来の技術 一般に光ディスクはその情報密度が極めて大きいことや
、S/N比が大きく、ノイズが少ないことなどから情報
媒体として有望視され、ビデオディスクやディジタルオ
ーディオディスクとして商品化され、ディジタル信号を
記録、再生する光ディスクとしても近年研究開発が行な
われている。
Conventional technology In general, optical discs are considered promising as information media due to their extremely high information density, high S/N ratio, and low noise, and have been commercialized as video discs and digital audio discs, which record digital signals. In recent years, research and development has been conducted on optical discs for playback.

以下、図面を参照しながら上述した従来の光ディスク原
盤用現像装置の一例について説明する。
Hereinafter, an example of the above-mentioned conventional optical disk master developing device will be described with reference to the drawings.

第7図は、従来の光ディスク原盤用現像装置の概要を示
すものである。第7図において、1は吐出口保持用アー
ム、2は現像液、リンス液吐出口、3は現像液、リンス
液供給用パイプ、4は光ディスク原盤、5はターンテー
ブル、6はターンテーブル回転用モータである。第8図
は、従来の現像工程のフローチャートを示すものである
。現像する場合には、まずレーザ光などにより露光記録
した光ディスク原盤4をターンテーブル5にのせ、次に
現像液、リンス液吐出口2をターンテーブル中心部ある
いは、光ディスク原盤の中心部に置く。
FIG. 7 shows an outline of a conventional optical disk master developing device. In Fig. 7, 1 is an arm for holding the discharge port, 2 is a developer and rinsing solution discharge port, 3 is a pipe for supplying the developer and rinsing solution, 4 is an optical disc master, 5 is a turntable, and 6 is for rotating the turntable. It's a motor. FIG. 8 shows a flowchart of a conventional developing process. In the case of development, first the optical disk master 4 which has been exposed and recorded with laser light or the like is placed on the turntable 5, and then the developer and rinse liquid discharge ports 2 are placed at the center of the turntable or the center of the optical disk master.

そして、ターンテーブルを回転用モータ6で一定速度で
回転しながら吐出口2より、水などのリンス液、水酸化
すl−IJウム希釈液などの現像液、リンス液の順に液
を吐出することに現像を行なう。
Then, while rotating the turntable at a constant speed with the rotation motor 6, the liquids are discharged from the discharge port 2 in the following order: a rinsing liquid such as water, a developing liquid such as a diluted sulfur hydroxide liquid, and a rinsing liquid. Perform development.

現像終了後は、ターンテーブルを高速回転することによ
り水切り、乾燥を行なう。
After development is completed, the turntable is rotated at high speed to remove water and dry.

発明が解決しようとする課題 しかしながら上記のような構成では、現像前に付着した
ホコリや汚れあるいは現像液をリンス液だけでは完全に
取り除くことが出来ず、現像後に付着による汚れが発生
したりあるいは、現像前にイ」着していたホコリや汚れ
などの付着物の影響により現像液の流れが不均一になり
現像の不充分な部かが発生する。
Problems to be Solved by the Invention However, with the above configuration, it is not possible to completely remove dust, dirt, or developer that has adhered before development using only a rinse solution, and stains due to adhesion may occur after development. Due to the influence of deposits such as dust and dirt that were deposited before development, the flow of the developer becomes uneven and some areas are insufficiently developed.

本発明は上記の課題に鑑み、さらに高精度の光ディスク
を作製出来る光ディスク原盤用現像装置を提供するもの
である。
In view of the above-mentioned problems, the present invention provides a developing device for optical disc masters that can produce optical discs with even higher precision.

課題を解決するだめの手段 と記の課題を解決するために本発明の光ディスク原盤用
現像装置は、左右に移動する洗浄専用の洗浄液吐出口を
設け、さらにはその先端を細くあるいはスプレーノズル
を付け、現像の前後に光ディスク原盤土を洗浄するもの
である。
Means for Solving the Problems In order to solve the above problems, the optical disk master developing device of the present invention is provided with a cleaning liquid discharge port exclusively for cleaning that moves from side to side, and furthermore, the tip thereof is made thinner or a spray nozzle is attached. , the optical disk master soil is cleaned before and after development.

作用 本発明は上記構成により光ディスク原盤上のホコリや汚
れ、あるいは現像液を完全に取υ除くことが出来、従っ
て高品質の現像を行なうことが出来る。
Function The present invention can completely remove dust, dirt, and developer on the optical disk master by the above-described structure, and therefore can perform high-quality development.

実施例 以下本発明の一実施例の光ディスク原盤用現像装置につ
いて図面を参照しながら説明する。
Embodiment Hereinafter, a developing device for an optical disk master according to an embodiment of the present invention will be described with reference to the drawings.

第1図は本発明の第1の実施例における光ディスク原盤
用現像装置の断面図を示すものである。
FIG. 1 shows a cross-sectional view of a developing device for an optical disk master according to a first embodiment of the present invention.

第2図はその平面図を示すものである。第3図は本発明
の現像装置の現像工程のフローチャートを示すものであ
る。第4図は洗浄液吐出口の断面を示すものである。第
1図において、11は吐出口保持用アーム、12は現像
液、リンス液吐出口、13は現像液、リンス液供給用パ
イプ、14は光ディスク原盤、15はターンテーブル、
16はターンテーブル回転用モータ、17は洗浄液供給
用パイプ、18は洗浄液吐出口、19は洗浄液吐出口保
持用アーム、20はアーム保持用支柱、21は支柱回転
用モータを示すものである。
FIG. 2 shows a plan view thereof. FIG. 3 shows a flowchart of the developing process of the developing device of the present invention. FIG. 4 shows a cross section of the cleaning liquid discharge port. In FIG. 1, 11 is an arm for holding an ejection port, 12 is a developer and rinsing liquid ejection port, 13 is a pipe for supplying the developer and rinsing liquid, 14 is an optical disc master, 15 is a turntable,
16 is a motor for rotating the turntable, 17 is a cleaning liquid supply pipe, 18 is a cleaning liquid discharge port, 19 is an arm for holding the cleaning liquid discharge port, 20 is a column for holding the arm, and 21 is a motor for rotating the column.

以上のように構成された光ディスク原盤用現像装首につ
いて、以下図を用いてその動作を説明する。第3図に示
すように現像工程のリンスの前後に洗浄を行なう。これ
は、ターンテーブル回転用モータ16を回転することに
より光ディスク原盤を回転しながら洗浄液吐出口18よ
り水などの洗浄液を滴下あるいは吹きつけ洗浄を行なう
もので、この場合支柱回転用モータ21を繰り返し左右
に回わすことにより第2図に示すように洗浄液吐出口を
左右に移動し光ディスク原盤全面を洗浄するものである
。また、洗浄液吐出口を第4図に示すように先端を細く
することにより洗浄液吐出圧力を上げ洗浄能力をさらに
上げたものである。現像の前の前洗浄においては重に付
着したホコリや汚れを取り除き、現像後の後洗浄ではリ
ンスで増り除けなかった現像液を完全に取り除くもので
ある。
The operation of the developing neck for optical disk masters constructed as above will be explained below using the drawings. As shown in FIG. 3, cleaning is performed before and after rinsing in the developing process. This is to clean the optical disk master by rotating the turntable rotation motor 16 while dripping or spraying cleaning liquid such as water from the cleaning liquid discharge port 18. In this case, the support rotation motor 21 is repeatedly rotated left and right. By turning the cleaning liquid discharge port horizontally as shown in FIG. 2, the entire surface of the optical disk master is cleaned. Further, by making the tip of the cleaning liquid discharge port thinner as shown in FIG. 4, the cleaning liquid discharge pressure is increased and the cleaning ability is further increased. Pre-cleaning before development removes heavily adhered dust and dirt, and post-cleaning after development completely removes the developer that was not removed by rinsing.

以下本発明の第2の実施例について図面を参照しながら
説明する。第6図は本発明の第2の実施例における光デ
ィスク用現像装置の断面図を示すものである。第6図は
その平面図を示すものである。第6図において、31は
吐出口保持用アーム。
A second embodiment of the present invention will be described below with reference to the drawings. FIG. 6 shows a sectional view of an optical disk developing device according to a second embodiment of the present invention. FIG. 6 shows a plan view thereof. In FIG. 6, 31 is a discharge port holding arm.

32は現像液、リンス液吐出口、33は現像液。32 is a developer and a rinse liquid discharge port, and 33 is a developer.

リンス液供給用パイプ、34は光ディスク原盤、35は
ターンテーブル、36にターンテーブル回転用モータ、
37は洗浄液供給用パイプ、38に洗浄液吐出口、39
はアーム保持用支柱、4oは支柱回転用モータを示すも
のである。第1図と異なるのは、洗浄液吐出口保持用ア
ームを現像液。
A rinse liquid supply pipe, 34 an optical disc master, 35 a turntable, 36 a turntable rotation motor,
37 is a cleaning liquid supply pipe, 38 is a cleaning liquid discharge port, 39
numeral 4o indicates a column for holding the arm, and 4o indicates a motor for rotating the column. The difference from Figure 1 is that the arm for holding the cleaning liquid discharge port is replaced with the developing liquid.

リンス液吐出口保持用アームと共用にした点である。こ
のようにアームを共用することにより現像装置を簡素化
したものである。
This is because it is also used as the arm for holding the rinse liquid discharge port. By sharing the arm in this way, the developing device is simplified.

発明の効果 以上のように本発明は、現像液、リンス液の吐出口とは
別に左右に移動する洗浄専用の洗浄液吐出口を設けるこ
とにより、さらには吐出口を細くあるいはスプレーノズ
ル全件は吐出圧力を上げることにより、現像前に付着し
たホコリや汚れあるいは現像後の現像液を完全に取り除
くことが出来るようにしたものである。
Effects of the Invention As described above, the present invention provides a cleaning liquid discharge port exclusively for cleaning that moves from side to side in addition to the developer and rinse liquid discharge ports, and furthermore, the discharge port is made narrower or all spray nozzles are completely discharged. By increasing the pressure, it is possible to completely remove dust and dirt deposited before development, as well as developer solution after development.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の第1の実施例における光ディスク原盤
用現像装置の断面図、第2図はその平面図、第3図は本
発明の第1の実施例における光ディスク原盤用現像装置
全用いた場合の現像工程のフローチャート、第4図は洗
浄液吐出口の断面図、第5図は本発明の第2の実施例に
おける光ディスク原盤用現像装置の断面図、第6図はそ
の平面図。 第7図は従来の光ディスク用現像装置の断面図、第8図
は従来の現像工程のフローチャート’に示すものである
。 11.31・・・・・・吐出口保持用アーム、12゜3
2・・・・・・現像液、リンス液吐出口、13,330
.。 ・・・現像液、リンス液供給用パイプ、14,341.
。 10.光ディスク原盤、15.35・川・・ターンテー
ブル、16.36・・・・・・ターンテーブル回転用モ
ータ。 17 、37・・・・・洗浄液供給用パイプ、18.3
829.・・・洗浄液吐出口、19・・・・・・洗浄液
吐出口保持用アーム、20,39・・・・・・アーム保
持用支柱、21゜40・・・・・支柱回転用モータ。 代理人の氏名 弁理士 中 尾 敏 男 ほか1名1−
−−[11出D4珀ハL4 +−4テ穆フクλ梠: 5−・−ダーシデ−7)し
FIG. 1 is a cross-sectional view of a developing device for optical disk masters according to the first embodiment of the present invention, FIG. 2 is a plan view thereof, and FIG. 3 is a full-use developing device for optical disk masters according to the first embodiment of the present invention. FIG. 4 is a sectional view of a cleaning liquid discharge port, FIG. 5 is a sectional view of a developing device for an optical disk master according to a second embodiment of the present invention, and FIG. 6 is a plan view thereof. FIG. 7 is a sectional view of a conventional optical disk developing device, and FIG. 8 is a flowchart of a conventional developing process. 11.31...Discharge port holding arm, 12゜3
2...Developer, rinse liquid discharge port, 13,330
.. . ... Pipe for supplying developer and rinse liquid, 14,341.
. 10. Optical disc master, 15.35・・Turntable, 16.36・・・・・Motor for rotating the turntable. 17, 37...Cleaning liquid supply pipe, 18.3
829. . . . Cleaning liquid discharge port, 19 . . . Arm for holding the cleaning liquid discharge port, 20, 39 . . . Arm holding column, 21° 40 . Name of agent: Patent attorney Toshio Nakao and 1 other person1-
--[11 out D4 珀は L4 +-4 te Mu Fuku λ 梠: 5-・-Dash day-7)

Claims (2)

【特許請求の範囲】[Claims] (1)光ディスク原盤を載置するターンテーブルと、こ
のターンテーブルを回転させるターンテーブル回転用モ
ータと、前記光ディスク原盤に現像液、リンス液を吐出
する吐出口と、左右に移動する洗浄専用の洗浄液吐出口
を備えたことを特徴とする光ディスク原盤用現像装置。
(1) A turntable on which the optical disc master is placed, a turntable rotation motor that rotates the turntable, a discharge port that discharges a developer and a rinsing liquid onto the optical disc master, and a cleaning liquid that moves from side to side for cleaning. A developing device for an optical disk master, characterized by being equipped with a discharge port.
(2)洗浄専用の洗浄液吐出口の液吐出し圧力を上げる
ため、吐出口先端を先細形状とするか、あるいは吐出口
先端にスプレーノズルを設けたことを特徴とする請求項
1記載の光ディスク原盤用現像装置。
(2) The optical disk master according to claim 1, characterized in that the tip of the discharge port is tapered or a spray nozzle is provided at the tip of the discharge port in order to increase the liquid discharge pressure of the cleaning liquid discharge port dedicated for cleaning. development equipment.
JP63142161A 1988-06-09 1988-06-09 Developing device for master disk of optical disk Pending JPH023129A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63142161A JPH023129A (en) 1988-06-09 1988-06-09 Developing device for master disk of optical disk

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63142161A JPH023129A (en) 1988-06-09 1988-06-09 Developing device for master disk of optical disk

Publications (1)

Publication Number Publication Date
JPH023129A true JPH023129A (en) 1990-01-08

Family

ID=15308782

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63142161A Pending JPH023129A (en) 1988-06-09 1988-06-09 Developing device for master disk of optical disk

Country Status (1)

Country Link
JP (1) JPH023129A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5377970A (en) * 1990-04-20 1995-01-03 Canon Kabushiki Kaisha Sheet feeding apparatus with reduced vibration separator
US5722653A (en) * 1994-07-25 1998-03-03 Avery Dennison Corporation Single-sheet feeder

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5377970A (en) * 1990-04-20 1995-01-03 Canon Kabushiki Kaisha Sheet feeding apparatus with reduced vibration separator
US5722653A (en) * 1994-07-25 1998-03-03 Avery Dennison Corporation Single-sheet feeder

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