JPH05317797A - Rotary coating - Google Patents
Rotary coatingInfo
- Publication number
- JPH05317797A JPH05317797A JP12053392A JP12053392A JPH05317797A JP H05317797 A JPH05317797 A JP H05317797A JP 12053392 A JP12053392 A JP 12053392A JP 12053392 A JP12053392 A JP 12053392A JP H05317797 A JPH05317797 A JP H05317797A
- Authority
- JP
- Japan
- Prior art keywords
- disc
- shaped substrate
- optical disc
- coating agent
- coating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Application Of Or Painting With Fluid Materials (AREA)
- Manufacturing Optical Record Carriers (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は円盤状基板に紫外線硬化
型塗料をスピンコート法により塗布する回転塗布方法に
関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a spin coating method for coating a disk-shaped substrate with an ultraviolet curable coating material by a spin coating method.
【0002】[0002]
【従来の技術】従来知られている円盤状基板の樹脂被膜
方法は、例えば、光ディスクではグルーブと称される溝
が形成されたポリカーボネート樹脂、ポリメチルメタク
リルレート樹脂、エポキシ樹脂、アモルファスポリオレ
フィン樹脂等の円盤状のプラスチック基板に、グルーブ
が形成された側とは反対側の面にハードコート剤と称さ
れる紫外線硬化型塗料をスピンコート法により回転塗布
してプラスチック基板全面に均一に行きわたらせた後、
紫外線を照射してハードコート膜を製膜する。2. Description of the Related Art Conventionally known methods for coating resin on a disk-shaped substrate include, for example, polycarbonate resin having grooves called grooves in optical disks, polymethylmethacrylate resin, epoxy resin, amorphous polyolefin resin, etc. After a disk-shaped plastic substrate is spin-coated with a UV-curable coating called a hard coating agent on the surface opposite to the side where the groove is formed by spin coating, it is evenly spread over the entire surface of the plastic substrate. ,
Ultraviolet rays are irradiated to form a hard coat film.
【0003】次に、真空蒸着法やスパッタ法等によりグ
ルーブが形成された側に記録膜を製膜して光ディスクを
作製する。この光ディスクの記録膜形成面側に保護コー
ト剤と称される紫外線硬化型塗料をスピンコート法によ
り回転塗布して光ディスク全面に保護膜を製膜してい
た。Then, a recording film is formed on the side where the groove is formed by a vacuum vapor deposition method, a sputtering method or the like to manufacture an optical disk. An ultraviolet-curable coating material called a protective coating agent was spin-coated by a spin coating method on the recording film formation surface side of this optical disk to form a protective film on the entire surface of the optical disk.
【0004】また、コンパクトディスクでは予め所定の
情報信号が刻印された円盤状のプラスチック基板に、情
報信号が刻印されている側の面に真空蒸着法やスパッタ
法により反射膜を製膜して、この反射膜形成面側に保護
コート剤と称される紫外線硬化型塗料をスピンコート法
により回転塗布してコンパクトディスク全面に保護膜を
製膜していた。Further, in the case of a compact disc, a reflective film is formed on a disk-shaped plastic substrate on which a predetermined information signal is preliminarily engraved by a vacuum deposition method or a sputtering method on the surface on which the information signal is engraved. An ultraviolet curable coating material called a protective coating agent was spin-coated by spin coating on the reflective film forming surface side to form a protective film on the entire surface of the compact disc.
【0005】このようにハードコート剤や保護コート剤
等の紫外線硬化型塗料を円盤状基板にスピンコート法に
より回転塗布する場合には、低速回転時に一定速度で塗
料を一定位置から一定量円盤状基板に塗布し、次に高速
回転させて余分な紫外線硬化型塗料を振り切り、その後
紫外線を照射して硬化させて均一な被膜を形成してい
た。Thus, when spin-coating a UV-curable coating material such as a hard coating material or a protective coating material on a disk-shaped substrate by a spin coating method, the coating material is disk-shaped at a constant speed and at a constant speed during low-speed rotation. It was applied to a substrate, then rotated at a high speed to shake off excess ultraviolet-curable coating material, and then irradiated with ultraviolet rays to be cured to form a uniform film.
【0006】[0006]
【発明が解決しようとする課題】しかしながら、この方
法では、高速回転させて余分な紫外線硬化型塗料を振り
切った直後の樹脂表面には細かいさざ波状の筋が生じて
おり、特にレベリング性が悪い紫外線硬化型塗料ではそ
のままの状態で紫外線を照射すると硬化後の被膜表面に
もそのさざ波が残ってしまい、細かい筋として外観不良
を生じる欠点を有していた。However, in this method, fine ripple-like streaks are formed on the resin surface immediately after the excessive ultraviolet curable coating is shaken off by rotating at a high speed, and ultraviolet rays having a particularly poor leveling property are generated. When the curable coating material is irradiated with ultraviolet rays as it is, the ripples remain on the surface of the coating film after curing, and there is a defect that the appearance becomes defective as fine streaks.
【0007】本発明が解決しようとする課題は、円盤状
基板に紫外線硬化型塗料をスピンコート法により塗布す
る回転塗布方法において、回転塗布後の未硬化の塗膜の
細かい筋の発生を無くし、得られた塗工物の外観不良を
皆無として、スピンコート工程における収率を向上させ
ることができる回転塗布方法を提供することにある。The problem to be solved by the present invention is to eliminate the generation of fine streaks in an uncured coating film after spin coating in a spin coating method in which a disk-shaped substrate is coated with an ultraviolet curable coating material by a spin coating method. It is an object of the present invention to provide a spin coating method capable of improving the yield in a spin coating process without causing any defective appearance of the obtained coating product.
【0008】[0008]
【課題を解決するための手段】本発明は上記課題を解決
するために、円盤状基板を低速回転させながら一定量の
紫外線硬化型塗料を円盤状基板に塗布する第1工程、円
盤状基板を高速回転させて基板上の余分な塗料を振り切
る第2工程及び円盤状基板上の未硬化の塗膜に熱風を吹
き付ける第3工程を有することを特徴とする回転塗布方
法を提供する。In order to solve the above-mentioned problems, the present invention provides a first step of applying a certain amount of an ultraviolet curable coating material to a disc-shaped substrate while rotating the disc-shaped substrate at a low speed. There is provided a spin coating method comprising a second step of rotating at high speed to shake off excess paint on a substrate and a third step of blowing hot air onto an uncured coating film on a disk-shaped substrate.
【0009】[0009]
【作用】本発明によれば、円盤状基板に紫外線硬化型塗
料をスピンコート法により塗布する回転塗布装置におい
て、一定量の塗料を塗布し、次に高速回転で円盤状基板
を回転させて余分な塗料を振り切り、その後円盤状基板
上の未硬化の塗膜に熱風を吹き付けるので、レベルング
性が悪い紫外線硬化型塗料でも表面温度を上昇させるこ
とによりレベリング性を促進させることができるため
に、さざ波が即座に消滅し、従って、この塗膜に紫外線
を照射して硬化させた得られた被膜には細かい筋が一切
見られず、外観不良を皆無にすることができる。According to the present invention, in a spin coating apparatus for coating a disk-shaped substrate with an ultraviolet-curable coating material by a spin coating method, a predetermined amount of coating material is coated, and then the disk-shaped substrate is rotated at a high speed to make an extra amount. Since the coating material is shaken off, and then hot air is blown to the uncured coating film on the disk-shaped substrate, the leveling property can be promoted by raising the surface temperature even with an ultraviolet-curing coating material having poor leveling properties. Ripples disappear immediately, and therefore, the coating obtained by irradiating this coating with ultraviolet rays and curing does not show any fine streaks, and it is possible to eliminate the appearance defect.
【0010】[0010]
【実施例】以下、実施例及び比較例を用いて本発明を更
に詳細に説明する。EXAMPLES The present invention will be described in more detail below with reference to examples and comparative examples.
【0011】(実施例)図1に示したように円盤状基板
である光ディスク1を記録膜2の形成面側を上にしてタ
ーンテーブル3に設置し、記録膜2の形成面側を保護す
るために保護コート剤「EX−318」(大日本インキ
化学工業社製)4を塗布した。(Example) As shown in FIG. 1, an optical disk 1 which is a disk-shaped substrate is placed on a turntable 3 with the surface on which the recording film 2 is formed facing up to protect the surface on which the recording film 2 is formed. Therefore, a protective coating agent "EX-318" (manufactured by Dainippon Ink and Chemicals, Inc.) 4 was applied.
【0012】この場合、ターンテーブル3を60rpm
の低速回転で回転させると同時に、φ1.05mmの塗布
用ノズル5を光ディスク1の中心より半径23mmの位置
であって、光ディスクの面上1mmの位置に移動させた
後、塗布用ノズルから1.4kgf/cm2の圧力で2秒間保
護コート剤4のを塗布した。次に、6,000rpmの
高速回転で光ディスクを回転させて余分な保護コート剤
を振り切った。この場合の塗膜の表面の状態は、図2に
示したように細かいさざ波状の筋6が生じた状態であっ
た。In this case, the turntable 3 is set to 60 rpm.
At the same time as the low speed rotation, the coating nozzle 5 of φ1.05 mm is moved to a position having a radius of 23 mm from the center of the optical disc 1 and a position of 1 mm on the surface of the optical disc, and then 1. The protective coating agent 4 was applied for 2 seconds under a pressure of 4 kgf / cm 2 . Next, the optical disc was rotated at a high speed of 6,000 rpm to shake off the excess protective coating agent. In this case, the surface state of the coating film was in a state where fine ripple-like streaks 6 were generated as shown in FIG.
【0013】その後、図3に示したように熱風として8
0℃のクリーンエアー7を光ディスク1の表面上約10
cm離れた位置から2秒間吹き付けた後、紫外線8を照射
して保護コート剤4を硬化させて保護コート膜を形成し
たが、保護コート膜表面には図4に示すように細かい筋
は全く見られなかった。After that, as shown in FIG.
Clean air 7 at 0 ° C on the surface of the optical disc 1 for about 10
After spraying for 2 seconds from a position separated by cm, the protective coat agent 4 was cured by irradiating with ultraviolet rays 8 to form a protective coat film. However, fine streaks were not observed at all on the surface of the protective coat film as shown in FIG. I couldn't do it.
【0014】この熱風の温度は、光ディスクに熱変形を
生じさせて機械特性を劣下させてしまう程の高い温度で
はなく、レベリング性を促進し得る温度であれば良く、
紫外線硬化型塗料の種類やレベリング性能によって適宜
選択すれば良い。The temperature of the hot air is not so high as to cause the optical deformation of the optical disk to deteriorate the mechanical characteristics, but may be any temperature that can promote the leveling property.
It may be appropriately selected depending on the type of ultraviolet curable coating material and the leveling performance.
【0015】(比較例)図1に示したように、円盤状基
板である光ディスク1を記録膜2の形成面側を上にして
ターンテーブル3に設置し、次に記録膜2の形成面側を
保護するために保護コート剤「EX−318」(大日本
インキ化学工業社製)4を塗布した。(Comparative Example) As shown in FIG. 1, the optical disk 1 which is a disk-shaped substrate is placed on the turntable 3 with the side on which the recording film 2 is formed facing up, and then on the side on which the recording film 2 is formed. A protective coating agent "EX-318" (manufactured by Dainippon Ink and Chemicals, Inc.) 4 was applied to protect the ink.
【0016】この場合、ターンテーブル3を60rpm
の低速回転で回転させると同時に、φ1.05mmの塗布
用ノズル5を光ディスク1の中心より半径23mmの位置
であって、光ディスクの面上1mmの位置に移動させた
後、塗布用ノズルから1.4kgf/cm2の圧力で2秒間保
護コート剤4のを塗布した。次に、6,000rpmの
高速回転で光ディスクを回転させて余分な保護コート剤
を振り切った。この場合の塗膜の表面の状態は、図2に
示したように細かいさざ波状の筋6が生じた状態であっ
た。In this case, the turntable 3 is set to 60 rpm.
At the same time as the low speed rotation, the coating nozzle 5 of φ1.05 mm is moved to a position having a radius of 23 mm from the center of the optical disc 1 and a position of 1 mm on the surface of the optical disc, and then 1. The protective coating agent 4 was applied for 2 seconds under a pressure of 4 kgf / cm 2 . Next, the optical disc was rotated at a high speed of 6,000 rpm to shake off the excess protective coating agent. In this case, the surface state of the coating film was in a state where fine ripple-like streaks 6 were generated as shown in FIG.
【0017】その後、図5に示したように、直ちに紫外
線8を照射して保護コート剤4を硬化させて保護コート
膜を形成したが、保護コート膜には図2に示したのと同
様に細かい筋6が被膜全面に見られた。Then, as shown in FIG. 5, ultraviolet rays 8 were immediately irradiated to cure the protective coating agent 4 to form a protective coating film. The protective coating film was formed in the same manner as shown in FIG. Fine streaks 6 were found on the entire surface of the coating.
【0018】[0018]
【発明の効果】本発明の回転塗布方法では、一定量の紫
外線硬化型塗料を塗布し、次に高速回転で円盤状基板を
回転させて余分な紫外線硬化型塗料を振り切り、その後
円盤状基板上の未硬化の塗膜に熱風を吹き付けるので、
レベルング性が悪い紫外線硬化型塗料でも表面温度を上
昇させることによりレベリング性を促進させることがで
きるためにさざ波が即座に消滅し、従って未硬化の塗膜
に紫外線を照射して硬化させて得られた被膜には細かい
筋は一切見られず、外観不良を皆無にすることができ
る。According to the spin coating method of the present invention, a certain amount of the ultraviolet curable coating material is applied, and then the disc-shaped substrate is rotated at a high speed to shake off the extra ultraviolet curable coating material, and then the disc-shaped substrate is coated. Since hot air is blown to the uncured coating film of,
Even with UV-curable coatings that have poor leveling properties, the leveling property can be promoted by raising the surface temperature, so the ripples disappear immediately, so that the uncured coating film can be obtained by curing it by irradiating it with UV light. No fine streaks are found in the obtained coating, and it is possible to completely eliminate appearance defects.
【図1】スピンコート法により円盤状基板に紫外線硬化
型塗料を塗布する場合の概念的な図で、光ディスクをタ
ーンテーブル上に設置したときの側面図である。FIG. 1 is a conceptual diagram of a case where an ultraviolet curable coating material is applied to a disc-shaped substrate by a spin coating method, and is a side view when an optical disc is installed on a turntable.
【図2】紫外線硬化型塗料を塗布した後、高速回転で余
分な樹脂を振り切った時の未硬化の塗膜表面の状態を示
す平面図である。FIG. 2 is a plan view showing a state of an uncured coating film surface when an excessive resin is shaken off at a high speed after applying an ultraviolet curable coating material.
【図3】実施例に記載の方法により光ディスクに保護コ
ート剤を塗布する場合の概念図である。FIG. 3 is a conceptual diagram when a protective coating agent is applied to an optical disc by the method described in the example.
【図4】スピンコート法により円盤状基板に塗料を塗布
する場合の概念的な図で、実施例2及び比較例2に記載
したハードコート剤を塗布する場合の光ディスクをター
ンテーブルに設置したときの側面図である。FIG. 4 is a conceptual diagram in the case of applying a coating material to a disk-shaped substrate by a spin coating method, when an optical disk in the case of applying the hard coating agent described in Example 2 and Comparative Example 2 is installed on a turntable. FIG.
【図5】比較例に記載の方法により光ディスクに保護コ
ート剤を塗布する場合の概念図である。FIG. 5 is a conceptual diagram when a protective coating agent is applied to an optical disc by the method described in a comparative example.
1 光ディスク 2 記録膜 3 ターンテーブル 4 保護コート剤 5 塗料塗布用ノズル 6 細かいさざ波状の筋 7 熱風 8 紫外線 1 Optical Disc 2 Recording Film 3 Turntable 4 Protective Coating Agent 5 Paint Coating Nozzle 6 Fine Rippled Lines 7 Hot Air 8 Ultraviolet
Claims (1)
の紫外線硬化型塗料を円盤状基板に塗布する第1工程、
円盤状基板を高速回転させて基板上の余分な塗料を振り
切る第2工程及び円盤状基板上の未硬化の塗膜に熱風を
吹き付ける第3工程を有することを特徴とする回転塗布
方法。1. A first step of applying a constant amount of an ultraviolet curable coating material to a disc-shaped substrate while rotating the disc-shaped substrate at a low speed,
A spin coating method comprising: a second step of rotating a disc-shaped substrate at high speed to shake off excess paint on the substrate; and a third step of blowing hot air onto the uncured coating film on the disc-shaped substrate.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12053392A JPH05317797A (en) | 1992-05-13 | 1992-05-13 | Rotary coating |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12053392A JPH05317797A (en) | 1992-05-13 | 1992-05-13 | Rotary coating |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH05317797A true JPH05317797A (en) | 1993-12-03 |
Family
ID=14788643
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12053392A Pending JPH05317797A (en) | 1992-05-13 | 1992-05-13 | Rotary coating |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH05317797A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009514671A (en) * | 2005-11-08 | 2009-04-09 | ジングルス・テヒノロギース・アクチェンゲゼルシャフト | Method and apparatus for controlling film thickness by spin coating |
US8293330B2 (en) | 2005-12-22 | 2012-10-23 | Hoya Corporation | Lens coating apparatus and lens coating method |
CN113956706A (en) * | 2015-03-16 | 2022-01-21 | 台湾积体电路制造股份有限公司 | Primer material for substrate coating |
-
1992
- 1992-05-13 JP JP12053392A patent/JPH05317797A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009514671A (en) * | 2005-11-08 | 2009-04-09 | ジングルス・テヒノロギース・アクチェンゲゼルシャフト | Method and apparatus for controlling film thickness by spin coating |
US8293330B2 (en) | 2005-12-22 | 2012-10-23 | Hoya Corporation | Lens coating apparatus and lens coating method |
CN113956706A (en) * | 2015-03-16 | 2022-01-21 | 台湾积体电路制造股份有限公司 | Primer material for substrate coating |
US11708495B2 (en) | 2015-03-16 | 2023-07-25 | Taiwan Semiconductor Manufacturing Company, Ltd. | Priming material for substrate coating |
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