JPH1166634A - Manufacture and device of master disk of optical disk stamper - Google Patents

Abstract

PROBLEM TO BE SOLVED: To enhance the adhesion of a photoresist to a glass substrate. SOLUTION: A solvent is supplied to a nozzle 8 arranged nearly on the center of the glass substrate 102 prior to the application of a primer 22 as shown in Fig. (A) and is discharged from the nozzle 8 and the adequate amt. of the solvent is dropped on the central part of the glass substrate 102. The table 104 is rotated at a rotational speed of about 500 r.p.m. for about 2 minutes for shake-off drying. Next, the primer 22, i.e.a titanium coupling agent is supplied to the nozzle 8 and the adequate amt. thereof is dropped on glass substrate 102 as shown in Fig. (B). Following this, the nozzle 8 is moved to the position away from the glass substrate 102 and the solvent is supplied to the nozzle 8 as shown in Fig. (C). As a result, the solvent is discharged from the nozzle 8, thereby washing away the primer 22 sticking to the tip of the nozzle 8. Thereafter, the photoresist 112 is applied on the glass substrate 102 as shown in Fig. (D).

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

[0001] 1. Field of the Invention [0002] The present invention relates to a method and an apparatus for producing a master of a stamper for manufacturing an optical disk.

[0002]

2. Description of the Related Art For example, a read-only optical disk such as a compact disk generally has a structure in which innumerable irregularities corresponding to information signals are formed on a transparent substrate and further provided with an aluminum reflective film and a protective film. . As a method of forming countless irregularities corresponding to the information signal on the transparent substrate, an injection molding method, a compression molding method, an injection molding compression method, a glass 2P (Photo Polymer) method, and the like are known, but the molding cycle is short. Injection molding is the mainstream because of excellent transferability and suitable for mass production.

In the injection molding method, a stamper having a concavo-convex pattern obtained by inverting a concavo-convex pattern of an information signal to be formed on a transparent substrate is manufactured, and the stamper is attached to a mold.
By injecting the disk material into the mold, a transparent substrate having an information uneven pattern formed thereon is produced. Therefore, in order to manufacture a transparent substrate, it is necessary to first manufacture a stamper, and the manufacturing process of this stamper has conventionally been as follows. FIG. 3 is a process diagram showing a conventional optical disk stamper manufacturing process. This step includes a step of manufacturing a stamper master serving as a stamper mold, and a step of finally manufacturing a stamper using the stamper master.

First, in order to manufacture a stamper master, an extremely smooth glass substrate is first prepared, and this glass substrate 102 is fixed on a table 104 as shown in FIG. The table 104 is mounted on the upper part of the rotating shaft 106, and is rotatable by driving the rotating shaft 106 by a motor (not shown).
In this state, the surface of the glass substrate 102 is polished using an abrasive 108 such as CeO ₂ (cerium oxide) and a polishing cloth 109 to remove dirt on the surface and to remove extremely fine scratches. Subsequently, the surface of the glass substrate 102 is cleaned by a method such as ultrasonic cleaning to remove the remaining abrasive 108, and then dried.

Next, as shown in FIG. 3B, a primer 110 is applied to the surface of the glass substrate 102 and dried. Then, as shown in FIG. 3C, the surface of the glass substrate 102 coated with the primer 110 is
A positive photoresist 112 is applied, and prebaking is performed by heating with a hot plate or a convection oven in order to volatilize the organic solvent.
Note that the primer 110 is applied to enhance the adhesion between the photoresist 112 and the surface of the glass substrate 102.
S (Hexa Methyl Di Silazane), a silane coupling agent, a titanium coupling agent and the like are used.

Next, as shown in FIG. 3D, the glass substrate 102 coated with the photoresist 112 is set on an optical cutting machine and irradiated with a laser beam L, thereby obtaining a predetermined information signal. The photoresist 112 is exposed to light in a pattern corresponding to. Subsequently, as shown in FIG. 3E, the glass substrate 102 was moved into a developing machine,
The photoresist 112 is treated with a developing solution 114, and the exposed portions are developed and removed. As a result, a stamper master 116 having a concavo-convex pattern corresponding to the information signal as shown in FIG.

Next, as shown in FIG. 3G, a metal film 118 of nickel or the like is formed by a method such as a sputtering method, a vapor deposition method, and an electroless plating method using the stamper master 116 as a mold. Further, as shown in FIG. 3H, an electroplating film 120 is deposited and formed to a desired thickness by electroplating using the metal film 118 as an electrode.

Thereafter, the metal film 118 and the electroplating film 120 are peeled off from the glass substrate 102, and the photoresist 112 remaining on the surface is washed away and dried. Finally, a stamper 122 as shown in FIG. 3I is completed by press-removing excess metal in the peripheral portion.

[0009]

In the process of manufacturing the stamper master 116 as described above, in order to improve the adhesion between the glass substrate 102 and the photoresist 112, H
Primers such as MDS, a silane coupling agent, and a titanium coupling agent are used, but all of them have problems as described below.

[0010] First, when HMDS is used, it is only necessary to apply it on a substrate by a spin coater or the like, and then to spin off and dry, and the process for applying HMDS is very simple. However, there is a disadvantage that the adhesion is inferior to other primers. If the adhesion is weak, the metal film 118 and the electroplated film 12
0, that is, when the stamper 122 is peeled off from the stamper master 116, the photoresist 112
It easily adheres to the side and remains. Residual photoresist 11
2 can be washed away with an organic solvent such as acetone, but may not be completely removed when the remaining amount of the photoresist 112 is large. Then, the photoresist 112
If the stamper 122 could not be completely removed, molding the optical disk using such a stamper 122 would cause unevenness or spots on the optical disk, causing irregularities in the information signal to be incorrectly formed, or a mold release defect. As a result, the manufacturing yield is reduced.

Next, the silane coupling agent is HMDS
And the problem like HMDS is unlikely to occur. However, after applying to the glass substrate 102 by, for example, a dipping method or the like, the substrate is washed with ultrapure water, and IPA (IsoP
ropyl alcohol), drying, baking at 120 ° C. for 2 hours, and then cooling down. This takes much time compared to HMDS, and
Special equipment such as a washing machine and an oven must be provided.

On the other hand, the titanium coupling agent has a strong adhesive force like the silane coupling agent, and
In general, the coating process for the photoresist 112
Simply dilute with a solvent, apply with a spin coater or the like, and spin off and dry. However, the titanium coupling agent is difficult to handle, and reacts with moisture in the air to crystallize white just by being left in the air. Therefore, a problem that the titanium coupling agent adheres to the tip of the nozzle to which the primer is applied and solidifies, and the solidified titanium coupling agent drops on the glass substrate 102 and adheres to the surface easily occurs. When the solidified titanium coupling agent adheres to the glass substrate 102, it appears as unevenness or spots after the application of the photoresist, and a good stamper master 116 cannot be obtained.
Even if No. 2 is manufactured, the unevenness of the information signal is not formed correctly, so that the manufacturing yield of the optical disc eventually decreases. Also,
In either case, there is a problem that the primer solidified by drying or the like adheres to the glass substrate 102 to some extent.

Accordingly, an object of the present invention is to provide an optical disk capable of preventing the solidified primer from adhering to a glass substrate with a simple facility and a simple process, and further capable of increasing the adhesion of a photoresist to the glass substrate. To provide a stamper master production method and apparatus.

[0014]

In order to solve the above-mentioned problems, a method for producing a stamper master for an optical disk according to the present invention comprises applying a photoresist on a substrate to which a primer has been applied, and applying the photoresist to an information signal to be recorded. In a method of producing a stamper master of an optical disk by patterning based on, before applying the primer to the substrate, after applying the solvent of the photoresist to the substrate, after applying the primer to the substrate by discharging the nozzle from a nozzle, The method may further include supplying the solvent of the photoresist to the nozzle and cleaning the nozzle with the solvent. Also,
The apparatus for manufacturing a stamper master for an optical disc of the present invention is an apparatus for manufacturing a stamper master for an optical disc by applying a photoresist on a substrate coated with a primer and patterning the photoresist based on an information signal to be recorded. Before applying the primer to the substrate, a solvent application means for applying the photoresist solvent to the substrate,
After applying the primer to the substrate by discharging the primer from a nozzle, a nozzle cleaning means for supplying the solvent of the photoresist to the nozzle and cleaning the nozzle with the solvent is provided.

In the present invention, after the primer is discharged from the nozzle and applied to the substrate, the photoresist solvent is supplied to the nozzle and the nozzle is washed with the solvent, so that the primer attached to the tip of the nozzle is washed away. Therefore, there is no problem that the solidified primer adheres by dropping onto the substrate and adversely affects the primer. Therefore, although a strong adhesive force such as a titanium coupling agent can be obtained, a primer having a drawback of being easily solidified can be used, and the adhesive force of the photoresist to the substrate can be increased. Further, in the present invention,
Before applying the primer to the substrate, the solvent of the photoresist is applied to the substrate, so that the moisture on the substrate is removed by drying together with the evaporation of the solvent, and the solvent of the photoresist, that is, the diluting solvent for the primer is applied. This increases the wettability of the substrate. Therefore, the effect of the primer is exerted more strongly, and the adhesion between the substrate and the photoresist is improved.

[0016]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, the present invention will be described based on embodiments with reference to the drawings. FIG. 1 is a main part process diagram showing a stamper master manufacturing process by the optical disk stamper master manufacturing device of the present embodiment, and FIG. 2 is a main configuration diagram showing an optical disc stamper master manufacturing device of the present embodiment. . In the figure, the same elements as those in FIG. 3 are denoted by the same reference numerals.
Hereinafter, an apparatus for manufacturing a stamper master for an optical disc according to the present embodiment will be described with reference to these drawings, and at the same time, an embodiment of a method for manufacturing a stamper master for an optical disc according to the present invention will be described.

As shown in FIG. 2, the stamper master disc manufacturing apparatus 2 for an optical disk includes a primer supply source 4, a solvent supply source 6, a nozzle 8, pipes 10, 12, valves 14, 16, a controller 18, and the like. I have. The solvent supply source 6 and the nozzle 8 are connected by a pipe 12 (solvent supply pipe), and a valve 16 is provided in the pipe 12. The solvent supply source 6 includes a solvent tank (not shown) and a pump (not shown) which takes out the solvent from the tank and supplies the solvent to the pipe 12. The solvent (organic solvent) is for diluting a photoresist and a primer described later, and in the present embodiment, as an example, PGMEA (Propylene Glycol Mon) is used.
The solvent is therefore stored in the solvent tank of the solvent supply 6.
The primer supply source 4 and the nozzle 8 are connected by a pipe (primer supply pipe) 10.
4 are provided. The primer supply source 4 includes a primer tank (not shown) and a pump (not shown) that takes out the primer from the tank and supplies it to the pipe 10.

In this embodiment, a titanium coupling agent is used as a primer. Therefore, the primer coupling tank stores a titanium coupling agent diluted with a solvent. Specific examples of the titanium coupling agent include TIA manufactured by HULSAMERICA.
TYZO AA manufactured by DuPont, CA or the like can be used. As the solvent for diluting the titanium coupling agent, the above-mentioned solvent for diluting the photoresist, that is, PGMEA is used. In the present embodiment, the titanium coupling agent is diluted to 1% or less with this solvent. The solvent supply means according to the present invention is constituted by the solvent supply source 6, the pipe 12, the valve 16, the nozzle 8, and the like described above,
Further, in the present embodiment, the solvent applying means also constitutes a nozzle cleaning means. On the other hand, the primer supply source 4, the pipe 10, the valve 14, the nozzle 8, and the like constitute a primer coating unit according to the present invention.

The driving means 20 shown in FIG. 2 is for driving and moving the nozzle 8. Controller 1
A computer 8 controls the opening and closing of the valves 14 and 16 and the operation of the driving means 20 and the pumps. The glass substrate 102 is fixed on a table 104, and the table 104 is mounted on a rotating shaft 106, and is rotated by driving the rotating shaft 106 by a motor (not shown).

Next, a process of manufacturing a master stamper of an optical disk performed by using the optical disk stamper master manufacturing apparatus 2 configured as described above will be described. First, the glass substrate 102 is polished. Polishing of the glass substrate 102 is performed in the same manner as in the related art. Therefore, as shown in FIG. 3A, the surface of the glass substrate 102 is polished using a polishing agent 108 such as CeO 2 and a polishing cloth 109. It removes dirt on the surface and even very fine flaws. Then, the surface of the glass substrate 102 is cleaned by a method such as ultrasonic cleaning to remove the remaining abrasive 108, and then dried. At this time, if moisture remains on the glass substrate 102, it reacts with the titanium coupling agent and crystallizes white, so that the surface of the glass substrate 102 is sufficiently dried after cleaning. Specifically, in the case of performing the spin-off drying, it is preferable to rotate at 1,000 rpm or more for 3 minutes or more.

Thereafter, prior to the application of the primer, as shown in FIG. 1A, the valve 16 is opened by the controller 18 for a certain period of time, and the pump of the solvent supply source 6 is operated for a certain period of time. Nozzle 8 arranged substantially on the center of glass substrate 102 through pipe 12 from supply source 6
Is supplied with a solvent (PGMEA). As a result, an appropriate amount of the solvent 28 is discharged from the nozzle 8 and is dropped on the center of the glass substrate 102. Then, the table 104 is set to 500r
Rotate at about rpm for about 2 minutes and shake off to dry.

Next, the valve 14 is opened for a predetermined time by the controller 18, and the pump of the primer supply source 4 is operated for a certain time to supply a primer, that is, a titanium coupling agent from the primer supply source 4 to the nozzle 8 through the pipe 10. I do. Thereby, an appropriate amount of the primer 22 is discharged from the nozzle 8 and dropped on the glass substrate 102.
At this time, since the solvent 28 remains in the pipe from the junction 24 of the pipes 10 and 12 to the nozzle 8, the supply of the primer 22 is considered in consideration of the time until the solvent is completely discharged. You need to set the time.

Subsequently, the nozzle 18 is driven by controlling the driving means 20 by the controller 18, and the nozzle 8 is moved to a position off the glass substrate 102 as shown in FIG. In this state, the valve 16 is again opened for a predetermined time by the controller 18 and the solvent supply source 6
The above pump is operated for a certain period of time to supply the solvent 28 to the nozzle 8 from the solvent supply source 6 through the pipe 12. As a result, the solvent is discharged from the nozzle 8 and the primer 22 attached to the tip of the nozzle 8 and the like is washed away.

The subsequent steps are basically the same as in the prior art. That is, as shown in FIG. 3D, first, a positive photoresist 112 is supplied through a nozzle onto the glass substrate 102 to which the primer 22 has been applied, and the positive photoresist 112 is applied, and the table 104 is rotated together with the glass substrate 102. And shake off to dry. At this time, by adjusting the number of rotations and the rotation time of the table 104, the photoresist 1
12 can be set appropriately. The photoresist 112 is, for example, an OFP manufactured by Tokyo Ohka.
R77, Shipley S1805, Hoechst A
Novolak resins (quinonediazide-based positive photoresists) such as ZX1122 and GX250ELS manufactured by Nippon Synthetic Rubber Co., Ltd. can be used.

Subsequently, pre-baking is performed, and FIG.
As shown in (D) and (E) of FIG. 3, by exposing with a laser beam and developing with a developing solution 114 to develop and remove the exposed portion, an information signal as shown in (F) of FIG. A stamper master having a concavo-convex pattern corresponding to the above is completed. Then, using this stamper master as a mold, as shown in FIGS.
Is formed, and the electroplating film 12 is formed by electroplating.
0, the metal film 118 and the electroplated film 1
By peeling 20 from the glass substrate 102, the stamper 122 of the optical disk shown in FIG.

As described above, in this embodiment, after the primer 22 is discharged from the nozzle 8 and applied to the glass substrate 102, the solvent of the photoresist 112 is supplied to the nozzle 8 and the nozzle 8 is washed with the solvent. , Nozzle 8
The primer 22 adhering to the tip portion or the like is washed away. Therefore, as in the present embodiment, the primer 2
In the case of 2, when a titanium coupling agent that forms crystals by reacting with moisture in the air and is easily solidified is used, the titanium coupling agent attached to the tip of the nozzle 8 is washed away, and thus solidified. The problem that the titanium coupling agent adheres to the glass substrate 102 by dropping or the like can be solved.

Therefore, the adhesion of the photoresist 112 to the glass substrate 102 can be increased by using a titanium coupling agent, and a good stamper master can be manufactured. By manufacturing a stamper from such a stamper master, it is possible to prevent the photoresist 112 from adhering to the stamper side, and it is possible to improve the manufacturing yield of the optical disc. And since only the nozzle 8 is cleaned, the required equipment is small and the process is simple.

Further, in this embodiment, since the solvent of the photoresist 112 (same as the solvent of the primer 22) is applied to the substrate before applying the primer 22 to the substrate, the water on the glass substrate 102 is Is removed by drying together with the volatilization of the primer, and the wettability of the primer 22 is increased by applying a solvent that dilutes the primer 22 in advance. Therefore, the effect of the primer 22 is further exerted, and the adhesion between the glass substrate 102 and the photoresist 112 is improved. Therefore, it is possible to manufacture a better stamper master 26.

In the present embodiment, the solvent is not applied by providing the nozzle 8 for exclusive use, but is also used by the nozzle 8 for applying the primer 22. Even if it is performed, it is not necessary to newly add a mechanism for moving the nozzle. Further, in the present embodiment, the cleaning of the nozzle 8 with the solvent is performed by the equipment for applying the solvent, that is, by the solvent supply source 6, the pipe 12, the valve 16, and the nozzle 8, so that the solvent is not wastefully configured. And cleaning of the nozzle 8 can be performed.

In this embodiment, the primer 2
Although a titanium coupling agent was used as 2, even if other primers 22 were used, even if the primers 22 adhered to the tip of the nozzle 8, they would be washed away by the solvent, and thus defective products in the production of the stamper master 26. Can be prevented.

[0031]

As described above, in the present invention, after the primer is discharged from the nozzle and applied to the substrate, the photoresist solvent is supplied to the nozzle and the nozzle is washed with the solvent. The attached primer is washed away. Therefore, there is no problem that the solidified primer is attached to the substrate by dropping or the like and adversely affects, and a good stamper master can be manufactured. As a result, an optical disk free of unevenness and spots can be manufactured by the stamper formed from the stamper master, and the production yield can be increased. In addition, since the nozzle is washed, a strong adhesive force such as a titanium coupling agent can be obtained, but a primer having a disadvantage of being easily solidified can be easily used, and the adhesive force of the photoresist to the substrate is increased. It becomes possible. Thus, when a stamper is manufactured using the stamper master as a mold, it is possible to avoid the photoresist from adhering to the stamper side, and it is possible to manufacture a good stamper and improve the manufacturing yield of the optical disc. And, since only the nozzles are cleaned, the required equipment is small and the process is simple. Furthermore, in the present invention, before applying the primer to the substrate, the solvent of the photoresist is applied to the substrate, so that the water on the substrate is dried and eliminated together with the volatilization of the solvent.
By applying a solvent for the photoresist, that is, a diluting solvent for the primer, the wettability of the substrate is enhanced. Therefore, the effect of the primer is exerted more strongly, and the adhesion between the substrate and the photoresist is improved.

[Brief description of the drawings]

FIG. 1 is a main part process diagram showing a stamper master manufacturing process by an optical disk stamper master manufacturing apparatus according to an embodiment of the present invention.

FIG. 2 is a main part configuration diagram showing an optical disk stamper master manufacturing apparatus according to an embodiment of the present invention.

FIG. 3 is a process diagram showing a conventional stamper master for an optical disc and a process for producing the stamper.

[Explanation of symbols]

2 ... stamper master production device, 4 ... primer supply source, 6 ... solvent supply source, 8 ... nozzle, 10, 12 ...
Piping, 14, 16 ... valve, 18 ... controller, 20
... Driving means, 22 primer, 102 glass substrate, 104 table, 112 photoresist.

Claims (7)

[Claims] 1. A method for producing a stamper master of an optical disc by applying a photoresist on a substrate coated with a primer and patterning the photoresist based on an information signal to be recorded, wherein the primer is applied to the substrate. Before applying the photoresist solvent to the substrate, after applying the primer to the substrate by discharging the primer from a nozzle, supplying the solvent of the photoresist to the nozzle and washing the nozzle with the solvent, A method for producing a master stamper of an optical disc, characterized by comprising: 2. The method according to claim 1, wherein the solvent of the photoresist applied to the substrate is supplied from the supply source of the solvent of the photoresist for cleaning the nozzle to the substrate through the nozzle. A method for producing a stamper master of the optical disc described in the above. 3. The method according to claim 1, wherein the primer is a titanium coupling agent. 4. An apparatus for applying a photoresist on a substrate coated with a primer and patterning the photoresist based on an information signal to be recorded to produce a stamper master for an optical disk, wherein the primer is applied to the substrate. Before, the solvent of the photoresist is applied to a substrate by a solvent application unit, and after the primer is ejected from a nozzle and applied to the substrate, the solvent of the photoresist is supplied to the nozzle and the nozzle is formed by the solvent. And a nozzle cleaning means for cleaning the stamper. 5. An apparatus according to claim 4, wherein said solvent applying means and said nozzle cleaning means share a supply source of said solvent of said photoresist and said nozzle. 6. A primer applying means for applying the primer to the substrate, the primer applying means being provided in the middle of the primer supply pipe, a primer supply pipe connecting the nozzle and the primer supply source, and a primer supply pipe. First
A supply source of the solvent of the photoresist of the solvent coating means and the nozzle cleaning means and the nozzle are connected by a solvent supply pipe, and a second valve is provided in the middle of the solvent supply pipe. 6. The apparatus according to claim 5, wherein the stamper master is provided. 7. The apparatus according to claim 4, wherein the primer is a titanium coupling agent.