JPH01209634A - 炭窒化ニオブフィールドエミッターの作製方法 - Google Patents
炭窒化ニオブフィールドエミッターの作製方法Info
- Publication number
- JPH01209634A JPH01209634A JP63035794A JP3579488A JPH01209634A JP H01209634 A JPH01209634 A JP H01209634A JP 63035794 A JP63035794 A JP 63035794A JP 3579488 A JP3579488 A JP 3579488A JP H01209634 A JPH01209634 A JP H01209634A
- Authority
- JP
- Japan
- Prior art keywords
- emitter
- vacuum
- current
- torr
- heating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910052758 niobium Inorganic materials 0.000 title claims abstract description 12
- 239000010955 niobium Substances 0.000 title claims abstract description 12
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 title claims abstract description 12
- 238000004519 manufacturing process Methods 0.000 title claims description 4
- 239000007789 gas Substances 0.000 claims abstract description 13
- 229930195733 hydrocarbon Natural products 0.000 claims abstract description 11
- 150000002430 hydrocarbons Chemical class 0.000 claims abstract description 11
- 239000004215 Carbon black (E152) Substances 0.000 claims abstract description 9
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 claims abstract description 9
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 claims abstract description 9
- 239000005977 Ethylene Substances 0.000 claims abstract description 9
- 229910001882 dioxygen Inorganic materials 0.000 claims abstract description 9
- 230000005684 electric field Effects 0.000 claims abstract description 8
- 239000013078 crystal Substances 0.000 claims description 8
- 238000010438 heat treatment Methods 0.000 abstract description 20
- 230000005855 radiation Effects 0.000 description 6
- 238000000034 method Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- RWSOTUBLDIXVET-UHFFFAOYSA-N Dihydrogen sulfide Chemical compound S RWSOTUBLDIXVET-UHFFFAOYSA-N 0.000 description 1
- 230000001427 coherent effect Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 229910000037 hydrogen sulfide Inorganic materials 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- MTPVUVINMAGMJL-UHFFFAOYSA-N trimethyl(1,1,2,2,2-pentafluoroethyl)silane Chemical compound C[Si](C)(C)C(F)(F)C(F)(F)F MTPVUVINMAGMJL-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
- Cold Cathode And The Manufacture (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63035794A JPH01209634A (ja) | 1988-02-18 | 1988-02-18 | 炭窒化ニオブフィールドエミッターの作製方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63035794A JPH01209634A (ja) | 1988-02-18 | 1988-02-18 | 炭窒化ニオブフィールドエミッターの作製方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01209634A true JPH01209634A (ja) | 1989-08-23 |
| JPH0577135B2 JPH0577135B2 (enrdf_load_stackoverflow) | 1993-10-26 |
Family
ID=12451830
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63035794A Granted JPH01209634A (ja) | 1988-02-18 | 1988-02-18 | 炭窒化ニオブフィールドエミッターの作製方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01209634A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2008121440A3 (en) * | 2007-03-30 | 2008-12-04 | Gen Electric | Thermo-optically functional compositions, systems and methods of making |
| US8278823B2 (en) | 2007-03-30 | 2012-10-02 | General Electric Company | Thermo-optically functional compositions, systems and methods of making |
-
1988
- 1988-02-18 JP JP63035794A patent/JPH01209634A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2008121440A3 (en) * | 2007-03-30 | 2008-12-04 | Gen Electric | Thermo-optically functional compositions, systems and methods of making |
| US8278823B2 (en) | 2007-03-30 | 2012-10-02 | General Electric Company | Thermo-optically functional compositions, systems and methods of making |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0577135B2 (enrdf_load_stackoverflow) | 1993-10-26 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |