JPH0120641Y2 - - Google Patents

Info

Publication number
JPH0120641Y2
JPH0120641Y2 JP1983002789U JP278983U JPH0120641Y2 JP H0120641 Y2 JPH0120641 Y2 JP H0120641Y2 JP 1983002789 U JP1983002789 U JP 1983002789U JP 278983 U JP278983 U JP 278983U JP H0120641 Y2 JPH0120641 Y2 JP H0120641Y2
Authority
JP
Japan
Prior art keywords
measured
dimensional
slit light
reflected
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1983002789U
Other languages
English (en)
Japanese (ja)
Other versions
JPS59109905U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP278983U priority Critical patent/JPS59109905U/ja
Publication of JPS59109905U publication Critical patent/JPS59109905U/ja
Application granted granted Critical
Publication of JPH0120641Y2 publication Critical patent/JPH0120641Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
JP278983U 1983-01-14 1983-01-14 一次元センサによる二次元測定装置 Granted JPS59109905U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP278983U JPS59109905U (ja) 1983-01-14 1983-01-14 一次元センサによる二次元測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP278983U JPS59109905U (ja) 1983-01-14 1983-01-14 一次元センサによる二次元測定装置

Publications (2)

Publication Number Publication Date
JPS59109905U JPS59109905U (ja) 1984-07-24
JPH0120641Y2 true JPH0120641Y2 (OSRAM) 1989-06-21

Family

ID=30134443

Family Applications (1)

Application Number Title Priority Date Filing Date
JP278983U Granted JPS59109905U (ja) 1983-01-14 1983-01-14 一次元センサによる二次元測定装置

Country Status (1)

Country Link
JP (1) JPS59109905U (OSRAM)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2256736C3 (de) * 1972-11-18 1979-01-25 Ibm Deutschland Gmbh, 7000 Stuttgart Meßanordnung zur automatischen Prüfung der Oberflächenbeschaffenheit und Ebenheit einer Werkstückoberfläche

Also Published As

Publication number Publication date
JPS59109905U (ja) 1984-07-24

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