JPH01196822A - Semiconductor integrated circuit device - Google Patents

Semiconductor integrated circuit device

Info

Publication number
JPH01196822A
JPH01196822A JP63023166A JP2316688A JPH01196822A JP H01196822 A JPH01196822 A JP H01196822A JP 63023166 A JP63023166 A JP 63023166A JP 2316688 A JP2316688 A JP 2316688A JP H01196822 A JPH01196822 A JP H01196822A
Authority
JP
Japan
Prior art keywords
mark
alignment
integrated circuit
semiconductor integrated
surrounding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP63023166A
Other languages
Japanese (ja)
Inventor
Koukichi Tanaka
Original Assignee
Nec Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nec Corp filed Critical Nec Corp
Priority to JP63023166A priority Critical patent/JPH01196822A/en
Publication of JPH01196822A publication Critical patent/JPH01196822A/en
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09F—DISPLAYING; ADVERTISING; SIGNS; LABELS OR NAME-PLATES; SEALS
    • G09F13/00—Illuminated signs; Luminous advertising
    • G09F13/04—Signs, boards or panels, illuminated from behind the insignia
    • G09F13/14—Arrangements of reflectors therein
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/1336—Illuminating devices
    • G02F1/133602—Direct backlight
    • G02F1/133604—Direct backlight with lamps
    • G02F2001/133607—

Abstract

PURPOSE:To improve an alignment accuracy by forming a recess pattern for surrounding the whole periphery of an alignment mark together with the mark at an equal distance from the mark. CONSTITUTION:An alignment mark 4 is formed in a scribing line 2. A recess pattern 7 having a uniform thickness for surrounding the whole periphery of the mark 4 is formed at an equal distance from the mark 4 simultaneously with a step of forming the mark. With such a configuration, the symmetry of the mark 4 is held. Accordingly, in a method of aligning the mark 4 utilizing scattered light 1a, 1b obtained from the edges of the mark 4 by irradiating the mark 4 with alignment light from H, above the mark 4, the central position of the mark can be accurately detected.
JP63023166A 1988-02-02 1988-02-02 Semiconductor integrated circuit device Granted JPH01196822A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63023166A JPH01196822A (en) 1988-02-02 1988-02-02 Semiconductor integrated circuit device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63023166A JPH01196822A (en) 1988-02-02 1988-02-02 Semiconductor integrated circuit device

Publications (1)

Publication Number Publication Date
JPH01196822A true JPH01196822A (en) 1989-08-08

Family

ID=12103037

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63023166A Granted JPH01196822A (en) 1988-02-02 1988-02-02 Semiconductor integrated circuit device

Country Status (1)

Country Link
JP (1) JPH01196822A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01272116A (en) * 1988-04-25 1989-10-31 Sony Corp Semiconductor device
JP2003224063A (en) * 2002-01-31 2003-08-08 Oki Electric Ind Co Ltd Resist pattern for alignment measurement
US6801313B1 (en) 1999-07-28 2004-10-05 Nec Electronics Corporation Overlay mark, method of measuring overlay accuracy, method of making alignment and semiconductor device therewith
JP2007273727A (en) * 2006-03-31 2007-10-18 Mitsubishi Electric Corp Alignment mark, and forming method therefor, and semiconductor device and manufacturing method therefor
JP2013168472A (en) * 2012-02-15 2013-08-29 River Eletec Kk Alignment mark

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01272116A (en) * 1988-04-25 1989-10-31 Sony Corp Semiconductor device
US6801313B1 (en) 1999-07-28 2004-10-05 Nec Electronics Corporation Overlay mark, method of measuring overlay accuracy, method of making alignment and semiconductor device therewith
JP2003224063A (en) * 2002-01-31 2003-08-08 Oki Electric Ind Co Ltd Resist pattern for alignment measurement
JP2007273727A (en) * 2006-03-31 2007-10-18 Mitsubishi Electric Corp Alignment mark, and forming method therefor, and semiconductor device and manufacturing method therefor
JP4531713B2 (en) * 2006-03-31 2010-08-25 三菱電機株式会社 Alignment mark and method for forming the same, semiconductor device and method for manufacturing the same
JP2013168472A (en) * 2012-02-15 2013-08-29 River Eletec Kk Alignment mark

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