JPH0119105Y2 - - Google Patents

Info

Publication number
JPH0119105Y2
JPH0119105Y2 JP1984127472U JP12747284U JPH0119105Y2 JP H0119105 Y2 JPH0119105 Y2 JP H0119105Y2 JP 1984127472 U JP1984127472 U JP 1984127472U JP 12747284 U JP12747284 U JP 12747284U JP H0119105 Y2 JPH0119105 Y2 JP H0119105Y2
Authority
JP
Japan
Prior art keywords
burn
rack
storage zone
door
storage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1984127472U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6142478U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12747284U priority Critical patent/JPS6142478U/ja
Publication of JPS6142478U publication Critical patent/JPS6142478U/ja
Application granted granted Critical
Publication of JPH0119105Y2 publication Critical patent/JPH0119105Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
JP12747284U 1984-08-24 1984-08-24 半導体装置のバ−ンイン装置 Granted JPS6142478U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12747284U JPS6142478U (ja) 1984-08-24 1984-08-24 半導体装置のバ−ンイン装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12747284U JPS6142478U (ja) 1984-08-24 1984-08-24 半導体装置のバ−ンイン装置

Publications (2)

Publication Number Publication Date
JPS6142478U JPS6142478U (ja) 1986-03-19
JPH0119105Y2 true JPH0119105Y2 (enrdf_load_html_response) 1989-06-02

Family

ID=30686116

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12747284U Granted JPS6142478U (ja) 1984-08-24 1984-08-24 半導体装置のバ−ンイン装置

Country Status (1)

Country Link
JP (1) JPS6142478U (enrdf_load_html_response)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100219406B1 (ko) * 1996-04-04 1999-09-01 윤종용 화학기상증착설비의 웨이퍼로딩실 공기흐름 안내장치

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56131476U (enrdf_load_html_response) * 1980-03-06 1981-10-06
JPS59970U (ja) * 1982-06-24 1984-01-06 日本電気株式会社 半導体素子試験用恒温槽

Also Published As

Publication number Publication date
JPS6142478U (ja) 1986-03-19

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