JPH01184907A - Manufacture of fe-ni magnetic alloy thin plate - Google Patents
Manufacture of fe-ni magnetic alloy thin plateInfo
- Publication number
- JPH01184907A JPH01184907A JP63008404A JP840488A JPH01184907A JP H01184907 A JPH01184907 A JP H01184907A JP 63008404 A JP63008404 A JP 63008404A JP 840488 A JP840488 A JP 840488A JP H01184907 A JPH01184907 A JP H01184907A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- plate
- nitrogen
- conducted
- annealing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910001004 magnetic alloy Inorganic materials 0.000 title claims description 5
- 238000004519 manufacturing process Methods 0.000 title claims description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims abstract description 20
- 238000000137 annealing Methods 0.000 claims abstract description 16
- 229910045601 alloy Inorganic materials 0.000 claims abstract description 15
- 239000000956 alloy Substances 0.000 claims abstract description 15
- 229910052757 nitrogen Inorganic materials 0.000 claims abstract description 10
- 229910052739 hydrogen Inorganic materials 0.000 claims abstract description 9
- 239000001257 hydrogen Substances 0.000 claims abstract description 9
- 238000005097 cold rolling Methods 0.000 claims abstract description 6
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims abstract description 5
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 claims abstract 4
- 239000000463 material Substances 0.000 abstract description 15
- 229910000889 permalloy Inorganic materials 0.000 abstract description 10
- 239000000696 magnetic material Substances 0.000 abstract description 6
- 238000001816 cooling Methods 0.000 abstract description 5
- 238000000034 method Methods 0.000 abstract description 4
- 150000004767 nitrides Chemical class 0.000 abstract description 2
- 230000001590 oxidative effect Effects 0.000 abstract description 2
- 239000002253 acid Substances 0.000 abstract 1
- 238000005554 pickling Methods 0.000 abstract 1
- 238000010438 heat treatment Methods 0.000 description 10
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 8
- 229910052759 nickel Inorganic materials 0.000 description 6
- 239000011888 foil Substances 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 3
- 230000000295 complement effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000005284 excitation Effects 0.000 description 2
- 150000002431 hydrogen Chemical class 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000000465 moulding Methods 0.000 description 2
- 229910052791 calcium Inorganic materials 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- -1 etc.) Of course Inorganic materials 0.000 description 1
- 230000005389 magnetism Effects 0.000 description 1
- 229910052748 manganese Inorganic materials 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000010791 quenching Methods 0.000 description 1
- 230000000171 quenching effect Effects 0.000 description 1
- 229910052761 rare earth metal Inorganic materials 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
Landscapes
- Soft Magnetic Materials (AREA)
Abstract
Description
【発明の詳細な説明】
〔発明の分野〕
本発明は、特に高周波磁界の下で用いるに適した高周波
用数−ニッケル(Fe−Ni)系磁性合金薄板の製造方
法に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Field of the Invention] The present invention relates to a method for producing a high frequency nickel (Fe-Ni) based magnetic alloy thin plate particularly suitable for use under a high frequency magnetic field.
Fe−Ni系合金の代表的な磁性合金としてパーマロイ
がある。パーマロイはA級(70〜80%Ni、残Fe
) 、 B級(40〜50%Ni、残Fe) 、C級(
70〜80%N1の他に特殊成分を含む、残Fe) 、
D級(35〜40%Ni、残Fe) 、E級(45〜
55%Ni、残Fe)など各種のものがあり、これらは
その特性に応じて継電器、磁極片、トランス、変成器な
どに使用されている。Permalloy is a typical magnetic alloy of Fe-Ni alloys. Permalloy is A grade (70-80% Ni, balance Fe)
), B class (40-50% Ni, remainder Fe), C class (
70-80% N1 and special components, balance Fe),
D class (35~40% Ni, balance Fe), E class (45~40% Ni, balance Fe)
There are various types such as 55% Ni, balance Fe), and these are used in relays, magnetic pole pieces, transformers, transformers, etc. depending on their characteristics.
上記のようなパーマロイは規則格子変態をもっているの
で熱処理によりその磁性は非常に敏感に変化する性質を
有している。このようなFe−Ni系磁性材料の中で高
周波磁界の下で用いる磁性材料は、実効透磁率が高くて
コア損失の小さいことが要求される。特に最近の各種エ
レクトロニクスデバイスでは、小型化、高性能化、高信
頼性が強く要求されており、その解決法の一つにインダ
クター及びトランスに使用される磁性材料の高周波化が
考えられている。Since permalloy as described above has a regular lattice transformation, its magnetism changes very sensitively by heat treatment. Among such Fe-Ni based magnetic materials, the magnetic material used under a high frequency magnetic field is required to have high effective magnetic permeability and low core loss. In particular, recent electronic devices are strongly required to be smaller in size, higher in performance, and higher in reliability, and one possible solution to these demands is to increase the frequency of magnetic materials used in inductors and transformers.
そこで最近、溶湯急冷法により製造される非晶質金属の
研究開発が行われているが、高製造コストであることや
非晶質構造の緩和にともなう透磁率の経時変化などがあ
るため、実用化に問題点がある。Recently, research and development has been carried out on amorphous metals manufactured by the molten metal quenching method. There are problems with the
このようなことから、従来から高周波磁界中で用いられ
る磁心として、圧延による磁性薄板が用いられており、
そしてこの磁性薄板の渦電流損失の低減を図るために板
厚をなるべく薄くする方策がとられてきた。しかし、板
厚を薄くするほど、部品に組み立てる際に生じる歪の影
響を強く受け、磁気特性が劣化しやすくなる等の問題が
ある。For this reason, rolled magnetic thin plates have traditionally been used as magnetic cores used in high-frequency magnetic fields.
In order to reduce the eddy current loss of this magnetic thin plate, measures have been taken to reduce the thickness of the magnetic thin plate as much as possible. However, the thinner the plate is, the more it is affected by distortion that occurs when it is assembled into parts, causing problems such as the tendency for magnetic properties to deteriorate.
本発明者らは、かかる点に鑑み本発明に至ったものであ
る。すなわち、本発明は、F e −N i系合金を1
00μm以下の板厚に冷間圧延後、磁性焼鈍を行い、次
に窒素或は窒素、水素雰囲気中で500℃以上の温度に
5分間以上保持する焼鈍処理を行うことを特徴とするF
e−Ni系磁性合金薄板の製造方法を提供するものであ
る。The present inventors have arrived at the present invention in view of this point. That is, in the present invention, Fe-Ni alloy is
After cold rolling to a thickness of 00 μm or less, magnetic annealing is performed, and then annealing treatment is performed in which the sheet is held at a temperature of 500° C. or more for 5 minutes or more in a nitrogen, nitrogen, or hydrogen atmosphere.
A method for manufacturing an e-Ni magnetic alloy thin plate is provided.
次に本発明における条件の限定理由などを以下に詳細に
述べる。Next, the reasons for limiting the conditions in the present invention will be described in detail below.
本発明においては、まず素材となるFe−Ni系合金(
パーマロイ)を溶製後インゴットに鋳造し、これを鍛造
、熱間圧延後を行った後、酸洗を行い、続いて冷間圧延
及び焼鈍を必要に応じ繰り返して必要な板厚寸法に圧延
していく。この冷間圧延での目標板厚は、100μm以
下とする。この後、磁性焼鈍を行う。磁性焼鈍は、乾燥
水素などの非酸化性の雰囲気中で、1000 ’C以上
の温度に10分間以上保持した後、適当な冷却速度で室
温まで冷却する。次に、窒素あるいは窒素、水素雰囲気
中で500℃以上の温度に5分間保持し、適当な冷却速
度で室温まで冷却する。これにより、材料の表面に窒化
物が生じて材料表面の硬さが上昇し、薄板に適当な強度
が与えられる。また、磁性材としての実効板厚が薄くな
り交流磁気特性が改善されることになる。この熱処理は
、必要に応じて前記磁性焼鈍と同様な温度で行い、補完
的な磁性焼鈍を兼ねることもできる。以上の熱処理を施
すことによって、交流損失が小さく、歪の影響を受けに
くく、磁気ヘッドとして使用した際には耐摩耗性に富む
極薄板(箔)のFe−Ni系合金(パーマロイ)を得る
ことができる。このようにして交流磁気特性を著しく改
善した極薄板(箔)磁性材を製造することができる。In the present invention, first, the material Fe-Ni alloy (
Permalloy) is melted and cast into an ingot, which is then forged, hot rolled, pickled, and then cold rolled and annealed as necessary to form the required thickness. To go. The target plate thickness in this cold rolling is 100 μm or less. After this, magnetic annealing is performed. In magnetic annealing, the material is held at a temperature of 1000'C or more for 10 minutes or more in a non-oxidizing atmosphere such as dry hydrogen, and then cooled to room temperature at an appropriate cooling rate. Next, it is held at a temperature of 500° C. or higher for 5 minutes in a nitrogen, nitrogen, or hydrogen atmosphere, and then cooled to room temperature at an appropriate cooling rate. As a result, nitrides are formed on the surface of the material, increasing the hardness of the material surface and giving the thin plate appropriate strength. Furthermore, the effective thickness of the magnetic material becomes thinner, resulting in improved AC magnetic properties. This heat treatment can be performed at the same temperature as the magnetic annealing, if necessary, and can also serve as complementary magnetic annealing. By performing the above heat treatment, it is possible to obtain an ultrathin sheet (foil) of Fe-Ni alloy (permalloy) that has low AC loss, is not easily affected by distortion, and has high wear resistance when used as a magnetic head. Can be done. In this way, an ultra-thin sheet (foil) magnetic material with significantly improved AC magnetic properties can be produced.
本発明のFe−Ni系合金は上記のようにパーマロイを
包括するものであるが、磁気特性や耐食性、耐摩耗性を
改善するために合金成分(例えば、Cr、Mo、W、C
o、Ca、Mn、Cu、V。The Fe-Ni alloy of the present invention includes permalloy as described above, but in order to improve magnetic properties, corrosion resistance, and wear resistance, alloy components (for example, Cr, Mo, W, C
o, Ca, Mn, Cu, V.
Nb、Ta、Ti、A1.Si、Mg、希土類元素等)
を総量で10%以下含有する合金は当然上記Fe−Ni
系合金に含まれるものである。Nb, Ta, Ti, A1. Si, Mg, rare earth elements, etc.)
Of course, alloys containing 10% or less of the above Fe-Ni
It is included in the alloys.
なお、本発明において薄板又は極薄板と記載しているも
のは箔を包含し、板厚は箔の厚さをも意味している。そ
れは、板厚100μm以下の記載から自ずと明らかであ
る。In addition, in the present invention, what is described as a thin plate or an extremely thin plate includes foil, and the plate thickness also means the thickness of the foil. This is obvious from the description that the plate thickness is 100 μm or less.
本発明は、冷間圧延材をそのまま磁性焼鈍するのみの通
常の製造工程では得られない優れた直流磁気特性と高周
波損失の小さい材料が得られ、このような本発明の開発
によって電子機器の小型化及び性能゛の向上に著しく貢
献することができる。The present invention makes it possible to obtain a material with excellent DC magnetic properties and low high-frequency loss, which cannot be obtained through the normal manufacturing process of magnetically annealing cold-rolled material as it is. It can make a significant contribution to the improvement of optimization and performance.
次に本発明の実施例について説明する。 Next, examples of the present invention will be described.
冷間圧延によって板厚100μm以下としたFe−Ni
系パーマロイ合金に磁性焼鈍を施した後。Fe-Ni plate thickness reduced to 100 μm or less by cold rolling
After magnetic annealing is applied to permalloy alloy.
100%窒素或は75%窒素、25%水素の雰囲気中で
500℃、900℃、1100℃の温度に15分間以上
保持し、炉冷した。磁性焼鈍条件は、乾燥水素雰囲気中
で1100℃、1時間加熱後炉冷する条件で行った。こ
のようにして製作した材料より、磁気特性測定用の10
φ−6φリング試料をフォトエツチング法により作製し
た。本実施例に用いたFe−Ni系合金は、8ONi−
5Mo−FeのパーマロイC系合金である。It was kept at temperatures of 500°C, 900°C, and 1100°C for 15 minutes or more in an atmosphere of 100% nitrogen or 75% nitrogen and 25% hydrogen, and then cooled in a furnace. The magnetic annealing conditions were heating at 1100° C. for 1 hour in a dry hydrogen atmosphere, followed by furnace cooling. From the material produced in this way, 10
A φ-6φ ring sample was prepared by photoetching. The Fe-Ni alloy used in this example was 8ONi-
5Mo-Fe permalloy C-based alloy.
第1表に本発明による極薄板パーマロイの化学成分とf
f!5造工程を示す。また、それらの励磁周波数1kH
z及び100kHzにおける1周期当りのコア損失の測
定結果、樹脂モールド後の励磁周波数1 k Hzにお
ける1゛周期当りのコア損失及び熱処理後の試料表面の
ビッカース硬さも第1表に併記する。Table 1 shows the chemical composition and f of the ultrathin permalloy according to the present invention.
f! 5 shows the construction process. Also, their excitation frequency is 1kHz
Table 1 also lists the measurement results of the core loss per cycle at 1 kHz and 100 kHz, the core loss per cycle at an excitation frequency of 1 kHz after resin molding, and the Vickers hardness of the sample surface after heat treatment.
第1表から明らかなように、本発明例の■〜■は、比較
例■〜0に比べ交流コア損失が小さく、ビッカース硬さ
が大きい。また、硬さが大きいほどモールド後の交流コ
ア損失の増大が少なくなっている。比較例■の硬さが大
きいのは、熱処理温度が低く、加工歪が解放されていな
いためで、その磁気特性は本発明例に比較して大きく劣
っている。本発明例■と■は、冷間圧延材を磁性焼鈍後
、1°100℃で熱処理した場合と冷間圧延材をそのま
ま1100℃で熱処理した場合の結果である。As is clear from Table 1, the inventive examples (1) to (2) have lower AC core loss and greater Vickers hardness than comparative examples (2) to (0). Furthermore, the greater the hardness, the less the increase in AC core loss after molding. The reason why the hardness of Comparative Example (2) is large is because the heat treatment temperature was low and the processing strain was not released, and its magnetic properties were significantly inferior to those of the Inventive Example. Examples (2) and (2) of the present invention are the results when a cold-rolled material was magnetically annealed and then heat-treated at 1° 100°C, and when the cold-rolled material was directly heat-treated at 1100°C.
両者の磁気特性及び硬さに差はなく、この熱処理は補完
的な磁性焼鈍を兼ねることが出来ることが分かる。比較
例■は、熱処理温度が200℃と低いため熱処理の効果
が見られない。本発明例に示したように、本発明の熱処
理条件を変えることにより、磁気特性及び材料の硬さの
制御が可能となる。There is no difference in magnetic properties and hardness between the two, indicating that this heat treatment can also serve as complementary magnetic annealing. In Comparative Example (2), the heat treatment temperature was as low as 200°C, so no effect of the heat treatment was observed. As shown in the examples of the present invention, by changing the heat treatment conditions of the present invention, it is possible to control the magnetic properties and hardness of the material.
以下余白Below margin
Claims (1)
圧延後、磁性焼鈍を行い、次に窒素或は窒素、水素雰囲
気中で500℃以上の温度に5分間以上保持する焼鈍処
理を行うことを特徴とするFe−Ni系磁性合金薄板の
製造方法。1) After cold rolling the Fe-Ni alloy to a thickness of 100 μm or less, magnetic annealing is performed, and then annealing treatment is performed in which the alloy is held at a temperature of 500°C or higher for 5 minutes or more in a nitrogen, nitrogen, or hydrogen atmosphere. A method for producing a Fe-Ni magnetic alloy thin plate, characterized in that:
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP63008404A JPH01184907A (en) | 1988-01-20 | 1988-01-20 | Manufacture of fe-ni magnetic alloy thin plate |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP63008404A JPH01184907A (en) | 1988-01-20 | 1988-01-20 | Manufacture of fe-ni magnetic alloy thin plate |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH01184907A true JPH01184907A (en) | 1989-07-24 |
Family
ID=11692233
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP63008404A Pending JPH01184907A (en) | 1988-01-20 | 1988-01-20 | Manufacture of fe-ni magnetic alloy thin plate |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH01184907A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102418058A (en) * | 2011-12-02 | 2012-04-18 | 宁波江丰电子材料有限公司 | Manufacturing method for nickel target billet and nickel target material |
-
1988
- 1988-01-20 JP JP63008404A patent/JPH01184907A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102418058A (en) * | 2011-12-02 | 2012-04-18 | 宁波江丰电子材料有限公司 | Manufacturing method for nickel target billet and nickel target material |
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