JPH01180674U - - Google Patents
Info
- Publication number
- JPH01180674U JPH01180674U JP7227088U JP7227088U JPH01180674U JP H01180674 U JPH01180674 U JP H01180674U JP 7227088 U JP7227088 U JP 7227088U JP 7227088 U JP7227088 U JP 7227088U JP H01180674 U JPH01180674 U JP H01180674U
- Authority
- JP
- Japan
- Prior art keywords
- test chamber
- test
- circulation means
- gas circulation
- blowout nozzle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000012360 testing method Methods 0.000 claims description 8
- 238000001816 cooling Methods 0.000 claims description 2
- 239000003507 refrigerant Substances 0.000 claims 2
- 239000002826 coolant Substances 0.000 claims 1
- 239000007788 liquid Substances 0.000 claims 1
- 238000011056 performance test Methods 0.000 claims 1
- 238000007664 blowing Methods 0.000 description 1
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Tests Of Electronic Circuits (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7227088U JPH0712943Y2 (ja) | 1988-05-30 | 1988-05-30 | Icデバイスの低温試験装置 |
US07/284,547 US4918928A (en) | 1987-12-17 | 1988-12-15 | Apparatus for testing IC devices at low temperature and cooling bag for use in testing IC devices at low temperature |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7227088U JPH0712943Y2 (ja) | 1988-05-30 | 1988-05-30 | Icデバイスの低温試験装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH01180674U true JPH01180674U (enrdf_load_stackoverflow) | 1989-12-26 |
JPH0712943Y2 JPH0712943Y2 (ja) | 1995-03-29 |
Family
ID=31297442
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7227088U Expired - Lifetime JPH0712943Y2 (ja) | 1987-12-17 | 1988-05-30 | Icデバイスの低温試験装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0712943Y2 (enrdf_load_stackoverflow) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0534405A (ja) * | 1991-07-31 | 1993-02-09 | Hitachi Electron Eng Co Ltd | Icハンドラの温度制御方式 |
-
1988
- 1988-05-30 JP JP7227088U patent/JPH0712943Y2/ja not_active Expired - Lifetime
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0534405A (ja) * | 1991-07-31 | 1993-02-09 | Hitachi Electron Eng Co Ltd | Icハンドラの温度制御方式 |
Also Published As
Publication number | Publication date |
---|---|
JPH0712943Y2 (ja) | 1995-03-29 |
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