JPH0197189U - - Google Patents
Info
- Publication number
- JPH0197189U JPH0197189U JP19198687U JP19198687U JPH0197189U JP H0197189 U JPH0197189 U JP H0197189U JP 19198687 U JP19198687 U JP 19198687U JP 19198687 U JP19198687 U JP 19198687U JP H0197189 U JPH0197189 U JP H0197189U
- Authority
- JP
- Japan
- Prior art keywords
- test chamber
- chamber
- test
- temperature
- cooling disk
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000012360 testing method Methods 0.000 claims description 10
- 238000001816 cooling Methods 0.000 claims description 6
- 239000003507 refrigerant Substances 0.000 claims description 4
- 238000012545 processing Methods 0.000 claims description 3
- 238000001035 drying Methods 0.000 claims description 2
- 238000011056 performance test Methods 0.000 claims 1
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 7
- 229910001873 dinitrogen Inorganic materials 0.000 description 3
- 239000007788 liquid Substances 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 239000007789 gas Substances 0.000 description 1
- 238000012805 post-processing Methods 0.000 description 1
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19198687U JPH0197189U (enrdf_load_stackoverflow) | 1987-12-17 | 1987-12-17 | |
US07/284,547 US4918928A (en) | 1987-12-17 | 1988-12-15 | Apparatus for testing IC devices at low temperature and cooling bag for use in testing IC devices at low temperature |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19198687U JPH0197189U (enrdf_load_stackoverflow) | 1987-12-17 | 1987-12-17 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0197189U true JPH0197189U (enrdf_load_stackoverflow) | 1989-06-28 |
Family
ID=31482868
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP19198687U Pending JPH0197189U (enrdf_load_stackoverflow) | 1987-12-17 | 1987-12-17 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0197189U (enrdf_load_stackoverflow) |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54115189A (en) * | 1978-02-28 | 1979-09-07 | Toshiba Corp | Low temperature conveyor unit |
JPS5717871A (en) * | 1980-07-04 | 1982-01-29 | Mitsubishi Electric Corp | Environment test device |
JPS5759450B2 (enrdf_load_stackoverflow) * | 1975-12-17 | 1982-12-15 | Sumitomo Electric Industries |
-
1987
- 1987-12-17 JP JP19198687U patent/JPH0197189U/ja active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5759450B2 (enrdf_load_stackoverflow) * | 1975-12-17 | 1982-12-15 | Sumitomo Electric Industries | |
JPS54115189A (en) * | 1978-02-28 | 1979-09-07 | Toshiba Corp | Low temperature conveyor unit |
JPS5717871A (en) * | 1980-07-04 | 1982-01-29 | Mitsubishi Electric Corp | Environment test device |