JPS54115189A - Low temperature conveyor unit - Google Patents

Low temperature conveyor unit

Info

Publication number
JPS54115189A
JPS54115189A JP2226378A JP2226378A JPS54115189A JP S54115189 A JPS54115189 A JP S54115189A JP 2226378 A JP2226378 A JP 2226378A JP 2226378 A JP2226378 A JP 2226378A JP S54115189 A JPS54115189 A JP S54115189A
Authority
JP
Japan
Prior art keywords
unit
low temperature
atmosphere
product
door
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2226378A
Other languages
Japanese (ja)
Inventor
Ikuo Nibari
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP2226378A priority Critical patent/JPS54115189A/en
Publication of JPS54115189A publication Critical patent/JPS54115189A/en
Pending legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Resistance To Weather, Investigating Materials By Mechanical Methods (AREA)

Abstract

PURPOSE: To introduce and transfer a large quantity of semiconductor parts into low temperature atmosphere continuously without disturbing the atmosphere within the apparatus, by providing a means to prevent disturbance of the low temperature atmosphere due to ambient atmosphere.
CONSTITUTION: Entrance and exit gate units 2, 3 are furnished with double doors 9 to 12, which prevent the internal low temperature atmosphere from being disturbed when charging or discharging products, and the frost from depositing of the inner wall due to air flowing inside from the outside. When a product approaches the unit 2, the door 9 is opened. When the product is placed completely inside the unit 2, the door 9 is closed, and the inside of the unit 2 is decompressed to a negative pressure by a duct 13 and the door 10 is opened to permit the product to enter a low temperature unit 1. Thus, the atmosphere in the unit 1 is maintained. When a product leaves the unit 1, the doors 11, 12 of the unit 3 are opened and closed similarly, so that the atmosphere in the unit 1 may be also maintained. Consisting of separated low temperature, gate conveyors 6, 7, 8, this system permit continuous introduction and conveyance into low temperature atmosphere.
COPYRIGHT: (C)1979,JPO&Japio
JP2226378A 1978-02-28 1978-02-28 Low temperature conveyor unit Pending JPS54115189A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2226378A JPS54115189A (en) 1978-02-28 1978-02-28 Low temperature conveyor unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2226378A JPS54115189A (en) 1978-02-28 1978-02-28 Low temperature conveyor unit

Publications (1)

Publication Number Publication Date
JPS54115189A true JPS54115189A (en) 1979-09-07

Family

ID=12077873

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2226378A Pending JPS54115189A (en) 1978-02-28 1978-02-28 Low temperature conveyor unit

Country Status (1)

Country Link
JP (1) JPS54115189A (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59183649U (en) * 1983-05-23 1984-12-06 オリオン機械株式会社 Test piece condensation prevention device for environmental testing equipment
JPS60158168U (en) * 1984-03-30 1985-10-21 日立電子エンジニアリング株式会社 Constant temperature bath for thin IC
JPS61161463A (en) * 1985-01-11 1986-07-22 Hitachi Electronics Eng Co Ltd Shutter device of thermostatic oven for ic handler
JPS6254144A (en) * 1985-09-02 1987-03-09 Tabai Esupetsuku Kk Environment testing method
JPS6280571A (en) * 1985-10-04 1987-04-14 Hitachi Electronics Eng Co Ltd Entrance and exit structure for thermostatic chamber
JPH01163570A (en) * 1987-12-17 1989-06-27 Kobe Steel Ltd Low-temperature test apparatus for ic device
JPH0197189U (en) * 1987-12-17 1989-06-28
JPH01245167A (en) * 1988-03-28 1989-09-29 Asia Electron Inc Ic auto handler

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59183649U (en) * 1983-05-23 1984-12-06 オリオン機械株式会社 Test piece condensation prevention device for environmental testing equipment
JPH0336915Y2 (en) * 1983-05-23 1991-08-05
JPS60158168U (en) * 1984-03-30 1985-10-21 日立電子エンジニアリング株式会社 Constant temperature bath for thin IC
JPS61161463A (en) * 1985-01-11 1986-07-22 Hitachi Electronics Eng Co Ltd Shutter device of thermostatic oven for ic handler
JPS6254144A (en) * 1985-09-02 1987-03-09 Tabai Esupetsuku Kk Environment testing method
JPS6280571A (en) * 1985-10-04 1987-04-14 Hitachi Electronics Eng Co Ltd Entrance and exit structure for thermostatic chamber
JPH01163570A (en) * 1987-12-17 1989-06-27 Kobe Steel Ltd Low-temperature test apparatus for ic device
JPH0197189U (en) * 1987-12-17 1989-06-28
JPH01245167A (en) * 1988-03-28 1989-09-29 Asia Electron Inc Ic auto handler

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