JPH0117247B2 - - Google Patents

Info

Publication number
JPH0117247B2
JPH0117247B2 JP55040897A JP4089780A JPH0117247B2 JP H0117247 B2 JPH0117247 B2 JP H0117247B2 JP 55040897 A JP55040897 A JP 55040897A JP 4089780 A JP4089780 A JP 4089780A JP H0117247 B2 JPH0117247 B2 JP H0117247B2
Authority
JP
Japan
Prior art keywords
pattern
resist
space
line
width
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55040897A
Other languages
English (en)
Japanese (ja)
Other versions
JPS56137630A (en
Inventor
Masaki Ito
Sotaro Edokoro
Hiroshi Gokan
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP4089780A priority Critical patent/JPS56137630A/ja
Publication of JPS56137630A publication Critical patent/JPS56137630A/ja
Publication of JPH0117247B2 publication Critical patent/JPH0117247B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P95/00—

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Bipolar Transistors (AREA)
  • Weting (AREA)
JP4089780A 1980-03-28 1980-03-28 Pattern forming Granted JPS56137630A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4089780A JPS56137630A (en) 1980-03-28 1980-03-28 Pattern forming

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4089780A JPS56137630A (en) 1980-03-28 1980-03-28 Pattern forming

Publications (2)

Publication Number Publication Date
JPS56137630A JPS56137630A (en) 1981-10-27
JPH0117247B2 true JPH0117247B2 (enExample) 1989-03-29

Family

ID=12593295

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4089780A Granted JPS56137630A (en) 1980-03-28 1980-03-28 Pattern forming

Country Status (1)

Country Link
JP (1) JPS56137630A (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4480424B2 (ja) * 2004-03-08 2010-06-16 富士通マイクロエレクトロニクス株式会社 パターン形成方法
JP4952009B2 (ja) * 2006-03-23 2012-06-13 凸版印刷株式会社 インプリント用モールドの製造方法

Also Published As

Publication number Publication date
JPS56137630A (en) 1981-10-27

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