JPH01172294A - ダイヤモンドの気相合成方法 - Google Patents
ダイヤモンドの気相合成方法Info
- Publication number
- JPH01172294A JPH01172294A JP62330130A JP33013087A JPH01172294A JP H01172294 A JPH01172294 A JP H01172294A JP 62330130 A JP62330130 A JP 62330130A JP 33013087 A JP33013087 A JP 33013087A JP H01172294 A JPH01172294 A JP H01172294A
- Authority
- JP
- Japan
- Prior art keywords
- plasma
- diamond
- jets
- vapor phase
- diamond film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910003460 diamond Inorganic materials 0.000 title claims abstract description 41
- 239000010432 diamond Substances 0.000 title claims abstract description 41
- 239000012808 vapor phase Substances 0.000 title claims abstract description 8
- 238000000034 method Methods 0.000 title claims description 11
- 230000002194 synthesizing effect Effects 0.000 title description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 8
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 8
- 239000000758 substrate Substances 0.000 claims description 18
- 230000015572 biosynthetic process Effects 0.000 claims description 6
- 238000003786 synthesis reaction Methods 0.000 claims description 5
- 238000004519 manufacturing process Methods 0.000 claims description 3
- 150000001722 carbon compounds Chemical class 0.000 claims 2
- 238000001308 synthesis method Methods 0.000 claims 1
- 239000002994 raw material Substances 0.000 abstract description 12
- 238000005268 plasma chemical vapour deposition Methods 0.000 abstract description 2
- 210000002381 plasma Anatomy 0.000 description 48
- 239000007789 gas Substances 0.000 description 29
- 239000000112 cooling gas Substances 0.000 description 9
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 6
- 238000005229 chemical vapour deposition Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 150000001875 compounds Chemical class 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 239000000498 cooling water Substances 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000010891 electric arc Methods 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 238000002441 X-ray diffraction Methods 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 238000012733 comparative method Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000010494 dissociation reaction Methods 0.000 description 1
- 230000005593 dissociations Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 238000007710 freezing Methods 0.000 description 1
- 230000008014 freezing Effects 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 1
- 238000002065 inelastic X-ray scattering Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62330130A JPH01172294A (ja) | 1987-12-28 | 1987-12-28 | ダイヤモンドの気相合成方法 |
| DE88302836T DE3884653T2 (de) | 1987-04-03 | 1988-03-30 | Verfahren und Vorrichtung zur Gasphasenabscheidung von Diamant. |
| EP88302836A EP0286306B1 (en) | 1987-04-03 | 1988-03-30 | Method and apparatus for vapor deposition of diamond |
| KR1019880003737A KR910006784B1 (ko) | 1987-04-03 | 1988-04-02 | 다이어몬드 증착장치와 방법 |
| US07/177,504 US5368897A (en) | 1987-04-03 | 1988-04-04 | Method for arc discharge plasma vapor deposition of diamond |
| US07/905,226 US5403399A (en) | 1987-04-03 | 1992-06-29 | Method and apparatus for vapor deposition of diamond |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62330130A JPH01172294A (ja) | 1987-12-28 | 1987-12-28 | ダイヤモンドの気相合成方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01172294A true JPH01172294A (ja) | 1989-07-07 |
| JPH0449520B2 JPH0449520B2 (zh) | 1992-08-11 |
Family
ID=18229143
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62330130A Granted JPH01172294A (ja) | 1987-04-03 | 1987-12-28 | ダイヤモンドの気相合成方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01172294A (zh) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5200231A (en) * | 1989-08-17 | 1993-04-06 | U.S. Philips Corporation | Method of manufacturing polycrystalline diamond layers |
| US5481081A (en) * | 1992-03-30 | 1996-01-02 | Sumitomo Electric Industries, Ltd. | Method and apparatus of synthesizing diamond in vapor phaase |
| EP3159641A1 (en) | 2009-12-22 | 2017-04-26 | Kao Corporation | Method for cooling liquid |
-
1987
- 1987-12-28 JP JP62330130A patent/JPH01172294A/ja active Granted
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5200231A (en) * | 1989-08-17 | 1993-04-06 | U.S. Philips Corporation | Method of manufacturing polycrystalline diamond layers |
| US5481081A (en) * | 1992-03-30 | 1996-01-02 | Sumitomo Electric Industries, Ltd. | Method and apparatus of synthesizing diamond in vapor phaase |
| US5539176A (en) * | 1992-03-30 | 1996-07-23 | Sumitomo Electric Industries, Ltd. | Method and apparatus of synthesizing diamond in vapor phase |
| EP3159641A1 (en) | 2009-12-22 | 2017-04-26 | Kao Corporation | Method for cooling liquid |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0449520B2 (zh) | 1992-08-11 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |