JPH01167297A - ＬｉＮｂ↓１−ｘＴａｘＯ↓３（０≦ｘ≦１）単結晶薄膜の製造方法 - Google Patents

ＬｉＮｂ↓１−ｘＴａｘＯ↓３（０≦ｘ≦１）単結晶薄膜の製造方法

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Publication number
JPH01167297A
JPH01167297A JP32638587A JP32638587A JPH01167297A JP H01167297 A JPH01167297 A JP H01167297A JP 32638587 A JP32638587 A JP 32638587A JP 32638587 A JP32638587 A JP 32638587A JP H01167297 A JPH01167297 A JP H01167297A
Authority
JP
Japan
Prior art keywords
metal
single crystal
thin film
crystal thin
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP32638587A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0511078B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Kimitaka Ono
公隆 大野
Hironori Matsunaga
松永　宏典
Yasunari Okamoto
康成 岡本
Yoshiharu Nakajima
義晴 中嶋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP32638587A priority Critical patent/JPH01167297A/ja
Publication of JPH01167297A publication Critical patent/JPH01167297A/ja
Priority to US07/522,498 priority patent/US4981714A/en
Publication of JPH0511078B2 publication Critical patent/JPH0511078B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP32638587A 1987-12-14 1987-12-22 ＬｉＮｂ↓１−ｘＴａｘＯ↓３（０≦ｘ≦１）単結晶薄膜の製造方法 Granted JPH01167297A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP32638587A JPH01167297A (ja) 1987-12-22 1987-12-22 ＬｉＮｂ↓１−ｘＴａｘＯ↓３（０≦ｘ≦１）単結晶薄膜の製造方法
US07/522,498 US4981714A (en) 1987-12-14 1990-04-30 Method of producing ferroelectric LiNb1-31 x Tax O3 0<x<1) thin film by activated evaporation

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP32638587A JPH01167297A (ja) 1987-12-22 1987-12-22 ＬｉＮｂ↓１−ｘＴａｘＯ↓３（０≦ｘ≦１）単結晶薄膜の製造方法

Publications (2)

Publication Number Publication Date
JPH01167297A true JPH01167297A (ja) 1989-06-30
JPH0511078B2 JPH0511078B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-02-12

Family

ID=18187213

Family Applications (1)

Application Number Title Priority Date Filing Date
JP32638587A Granted JPH01167297A (ja) 1987-12-14 1987-12-22 ＬｉＮｂ↓１−ｘＴａｘＯ↓３（０≦ｘ≦１）単結晶薄膜の製造方法

Country Status (1)

Country Link
JP (1) JPH01167297A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000131546A (ja) 1998-10-26 2000-05-12 Pioneer Electronic Corp リッジ形３次元導波路製造方法
JP2006195383A (ja) * 2005-01-17 2006-07-27 Nippon Telegr & Teleph Corp <Ntt> 光変調器およびその製造方法

Also Published As

Publication number Publication date
JPH0511078B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-02-12

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