JPH01156549U - - Google Patents
Info
- Publication number
- JPH01156549U JPH01156549U JP5240988U JP5240988U JPH01156549U JP H01156549 U JPH01156549 U JP H01156549U JP 5240988 U JP5240988 U JP 5240988U JP 5240988 U JP5240988 U JP 5240988U JP H01156549 U JPH01156549 U JP H01156549U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- suction
- exposure
- suctions
- contracted
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
Description
第１図は本考案の一実施例を示す断面図、第２
図は第１図における吸着装置の下降時を示す断面
図、第３図は従来の露光装置用ウエハ吸着装置を
示す断面図、第４図は第３図における吸着装置の
下降時を示す断面図である。
１……Ｓｉウエハ、２……オートハンド、３…
…取付金具、４……吸着パツト、５……吸着口、
６……フオトレジスト面、７……擦り傷。
Fig. 1 is a sectional view showing one embodiment of the present invention;
The figure is a cross-sectional view showing the suction device in FIG. 1 when it is lowered, FIG. 3 is a cross-sectional view showing a conventional wafer suction device for exposure equipment, and FIG. 4 is a cross-sectional view showing the suction device in FIG. 3 when it is lowered. It is. 1...Si wafer, 2...auto hand, 3...
...Mounting bracket, 4...Suction part, 5...Suction port,
6... Photoresist surface, 7... Scratches.
Claims (1)
アライメントステージから露光部ウエハチヤツク
上に吸着搬送するオートハンドに、ウエハに対し
て垂直方向に収縮可能な吸着パツトを取付けたこ
とを特徴とする露光装置用ウエハ吸着装置。 A wafer suction device for a semiconductor wafer exposure device, characterized in that a suction pad that can be contracted in a direction perpendicular to the wafer is attached to an automatic hand that suctions and transfers the wafer from a pre-alignment stage onto a wafer chuck in an exposure section. .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5240988U JPH01156549U (en) | 1988-04-19 | 1988-04-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5240988U JPH01156549U (en) | 1988-04-19 | 1988-04-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01156549U true JPH01156549U (en) | 1989-10-27 |
Family
ID=31278407
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5240988U Pending JPH01156549U (en) | 1988-04-19 | 1988-04-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01156549U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04290455A (en) * | 1991-03-19 | 1992-10-15 | Hitachi Electron Eng Co Ltd | Wafer prealignment system |
-
1988
- 1988-04-19 JP JP5240988U patent/JPH01156549U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04290455A (en) * | 1991-03-19 | 1992-10-15 | Hitachi Electron Eng Co Ltd | Wafer prealignment system |
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