JPH0115555Y2 - - Google Patents
Info
- Publication number
- JPH0115555Y2 JPH0115555Y2 JP17497883U JP17497883U JPH0115555Y2 JP H0115555 Y2 JPH0115555 Y2 JP H0115555Y2 JP 17497883 U JP17497883 U JP 17497883U JP 17497883 U JP17497883 U JP 17497883U JP H0115555 Y2 JPH0115555 Y2 JP H0115555Y2
- Authority
- JP
- Japan
- Prior art keywords
- rail
- top plate
- self
- duct
- magnet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000013459 approach Methods 0.000 claims description 7
- 229920003002 synthetic resin Polymers 0.000 claims description 7
- 239000000057 synthetic resin Substances 0.000 claims description 7
- 230000008054 signal transmission Effects 0.000 claims description 2
- 239000000428 dust Substances 0.000 description 9
- 235000012431 wafers Nutrition 0.000 description 3
- 230000003749 cleanliness Effects 0.000 description 2
- 230000001105 regulatory effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 229920006351 engineering plastic Polymers 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- BFKJFAAPBSQJPD-UHFFFAOYSA-N tetrafluoroethene Chemical group FC(F)=C(F)F BFKJFAAPBSQJPD-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Intermediate Stations On Conveyors (AREA)
- Non-Mechanical Conveyors (AREA)
- Control Of Conveyors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17497883U JPS6081161U (ja) | 1983-11-11 | 1983-11-11 | 荷搬送設備 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17497883U JPS6081161U (ja) | 1983-11-11 | 1983-11-11 | 荷搬送設備 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6081161U JPS6081161U (ja) | 1985-06-05 |
| JPH0115555Y2 true JPH0115555Y2 (enrdf_load_stackoverflow) | 1989-05-10 |
Family
ID=30380797
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17497883U Granted JPS6081161U (ja) | 1983-11-11 | 1983-11-11 | 荷搬送設備 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6081161U (enrdf_load_stackoverflow) |
-
1983
- 1983-11-11 JP JP17497883U patent/JPS6081161U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6081161U (ja) | 1985-06-05 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH0115555Y2 (enrdf_load_stackoverflow) | ||
| JPS61150601A (ja) | 荷搬送設備 | |
| JP3575925B2 (ja) | 分岐軌道を備えた搬送設備 | |
| JP3511619B2 (ja) | 有軌道台車システム | |
| JPS6023244Y2 (ja) | 荷搬送設備 | |
| JPS5939103Y2 (ja) | 荷搬送設備 | |
| JPS6024678Y2 (ja) | 台車利用の搬送装置 | |
| JPH05193742A (ja) | 荷搬送設備 | |
| JPS59124799A (ja) | 荷搬送設備 | |
| JPH0115556Y2 (enrdf_load_stackoverflow) | ||
| JP3562788B2 (ja) | 荷の搬送装置 | |
| JPH05208730A (ja) | 荷搬送設備 | |
| KR100523272B1 (ko) | 분기궤도를 구비한 반송설비 | |
| JPS60213562A (ja) | 荷搬送台車構造 | |
| JPS60166555A (ja) | 無人車輌およびコンベヤ装置 | |
| JPH0115558Y2 (enrdf_load_stackoverflow) | ||
| JPS60107450A (ja) | 半導体基板用搬送車 | |
| JPS60121165A (ja) | 荷搬送設備 | |
| JPH0326731Y2 (enrdf_load_stackoverflow) | ||
| JPS62292562A (ja) | 搬送台車 | |
| JPH046389Y2 (enrdf_load_stackoverflow) | ||
| JPH087761Y2 (ja) | リニアモータ駆動の搬送装置 | |
| CN113060491A (zh) | 轨道输送装置、移动载体以及生产线设备 | |
| JPH11196503A (ja) | リニア搬送車システム | |
| JPH0357762A (ja) | 荷搬送装置 |