JPH01153632U - - Google Patents
Info
- Publication number
- JPH01153632U JPH01153632U JP4493888U JP4493888U JPH01153632U JP H01153632 U JPH01153632 U JP H01153632U JP 4493888 U JP4493888 U JP 4493888U JP 4493888 U JP4493888 U JP 4493888U JP H01153632 U JPH01153632 U JP H01153632U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- quartz
- stand
- treatment apparatus
- heat treatment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010453 quartz Substances 0.000 claims description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 5
- 238000010438 heat treatment Methods 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 3
- 230000008602 contraction Effects 0.000 claims 1
- 239000011261 inert gas Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4493888U JPH01153632U (enExample) | 1988-04-01 | 1988-04-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4493888U JPH01153632U (enExample) | 1988-04-01 | 1988-04-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01153632U true JPH01153632U (enExample) | 1989-10-23 |
Family
ID=31271271
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4493888U Pending JPH01153632U (enExample) | 1988-04-01 | 1988-04-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01153632U (enExample) |
-
1988
- 1988-04-01 JP JP4493888U patent/JPH01153632U/ja active Pending