JPH01153631U - - Google Patents
Info
- Publication number
- JPH01153631U JPH01153631U JP4493788U JP4493788U JPH01153631U JP H01153631 U JPH01153631 U JP H01153631U JP 4493788 U JP4493788 U JP 4493788U JP 4493788 U JP4493788 U JP 4493788U JP H01153631 U JPH01153631 U JP H01153631U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- reaction tube
- heat treatment
- magnetic body
- attached
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 5
- 239000010453 quartz Substances 0.000 claims description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 3
- 239000011261 inert gas Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 239000000696 magnetic material Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4493788U JPH01153631U (enExample) | 1988-04-01 | 1988-04-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4493788U JPH01153631U (enExample) | 1988-04-01 | 1988-04-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01153631U true JPH01153631U (enExample) | 1989-10-23 |
Family
ID=31271270
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4493788U Pending JPH01153631U (enExample) | 1988-04-01 | 1988-04-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01153631U (enExample) |
-
1988
- 1988-04-01 JP JP4493788U patent/JPH01153631U/ja active Pending