JPH01122062U - - Google Patents
Info
- Publication number
- JPH01122062U JPH01122062U JP1560588U JP1560588U JPH01122062U JP H01122062 U JPH01122062 U JP H01122062U JP 1560588 U JP1560588 U JP 1560588U JP 1560588 U JP1560588 U JP 1560588U JP H01122062 U JPH01122062 U JP H01122062U
- Authority
- JP
- Japan
- Prior art keywords
- furnace
- furnace body
- movable mirror
- mirror
- monitoring device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000012806 monitoring device Methods 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 238000012856 packing Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1560588U JPH01122062U (enExample) | 1988-02-08 | 1988-02-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1560588U JPH01122062U (enExample) | 1988-02-08 | 1988-02-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01122062U true JPH01122062U (enExample) | 1989-08-18 |
Family
ID=31227795
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1560588U Pending JPH01122062U (enExample) | 1988-02-08 | 1988-02-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01122062U (enExample) |
-
1988
- 1988-02-08 JP JP1560588U patent/JPH01122062U/ja active Pending