JPH01153364U - - Google Patents

Info

Publication number
JPH01153364U
JPH01153364U JP4920388U JP4920388U JPH01153364U JP H01153364 U JPH01153364 U JP H01153364U JP 4920388 U JP4920388 U JP 4920388U JP 4920388 U JP4920388 U JP 4920388U JP H01153364 U JPH01153364 U JP H01153364U
Authority
JP
Japan
Prior art keywords
injection plate
gas
gas injection
electrode
introduction pipe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4920388U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4920388U priority Critical patent/JPH01153364U/ja
Publication of JPH01153364U publication Critical patent/JPH01153364U/ja
Pending legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
JP4920388U 1988-04-11 1988-04-11 Pending JPH01153364U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4920388U JPH01153364U (enrdf_load_stackoverflow) 1988-04-11 1988-04-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4920388U JPH01153364U (enrdf_load_stackoverflow) 1988-04-11 1988-04-11

Publications (1)

Publication Number Publication Date
JPH01153364U true JPH01153364U (enrdf_load_stackoverflow) 1989-10-23

Family

ID=31275319

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4920388U Pending JPH01153364U (enrdf_load_stackoverflow) 1988-04-11 1988-04-11

Country Status (1)

Country Link
JP (1) JPH01153364U (enrdf_load_stackoverflow)

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