JPH01153364U - - Google Patents
Info
- Publication number
- JPH01153364U JPH01153364U JP4920388U JP4920388U JPH01153364U JP H01153364 U JPH01153364 U JP H01153364U JP 4920388 U JP4920388 U JP 4920388U JP 4920388 U JP4920388 U JP 4920388U JP H01153364 U JPH01153364 U JP H01153364U
- Authority
- JP
- Japan
- Prior art keywords
- injection plate
- gas
- gas injection
- electrode
- introduction pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000002347 injection Methods 0.000 claims description 7
- 239000007924 injection Substances 0.000 claims description 7
- 239000011148 porous material Substances 0.000 claims description 4
- 238000001020 plasma etching Methods 0.000 claims description 2
- 239000007789 gas Substances 0.000 claims 5
- 239000012495 reaction gas Substances 0.000 claims 2
- 238000005530 etching Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4920388U JPH01153364U (OSRAM) | 1988-04-11 | 1988-04-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4920388U JPH01153364U (OSRAM) | 1988-04-11 | 1988-04-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01153364U true JPH01153364U (OSRAM) | 1989-10-23 |
Family
ID=31275319
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4920388U Pending JPH01153364U (OSRAM) | 1988-04-11 | 1988-04-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01153364U (OSRAM) |
-
1988
- 1988-04-11 JP JP4920388U patent/JPH01153364U/ja active Pending
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