JPH01149649U - - Google Patents
Info
- Publication number
- JPH01149649U JPH01149649U JP4757488U JP4757488U JPH01149649U JP H01149649 U JPH01149649 U JP H01149649U JP 4757488 U JP4757488 U JP 4757488U JP 4757488 U JP4757488 U JP 4757488U JP H01149649 U JPH01149649 U JP H01149649U
- Authority
- JP
- Japan
- Prior art keywords
- optical system
- holding frame
- projection
- illumination
- dichroic mirrors
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims description 12
- 238000005286 illumination Methods 0.000 claims description 8
- 238000000206 photolithography Methods 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 3
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
Landscapes
- Light Sources And Details Of Projection-Printing Devices (AREA)
- Projection-Type Copiers In General (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4757488U JPH01149649U (enrdf_load_html_response) | 1988-04-08 | 1988-04-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4757488U JPH01149649U (enrdf_load_html_response) | 1988-04-08 | 1988-04-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01149649U true JPH01149649U (enrdf_load_html_response) | 1989-10-17 |
Family
ID=31273773
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4757488U Pending JPH01149649U (enrdf_load_html_response) | 1988-04-08 | 1988-04-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01149649U (enrdf_load_html_response) |
-
1988
- 1988-04-08 JP JP4757488U patent/JPH01149649U/ja active Pending
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