JPH01147253U - - Google Patents

Info

Publication number
JPH01147253U
JPH01147253U JP4133188U JP4133188U JPH01147253U JP H01147253 U JPH01147253 U JP H01147253U JP 4133188 U JP4133188 U JP 4133188U JP 4133188 U JP4133188 U JP 4133188U JP H01147253 U JPH01147253 U JP H01147253U
Authority
JP
Japan
Prior art keywords
film
vapor deposition
physical vapor
vacuum
wound
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4133188U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4133188U priority Critical patent/JPH01147253U/ja
Publication of JPH01147253U publication Critical patent/JPH01147253U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP4133188U 1988-03-29 1988-03-29 Pending JPH01147253U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4133188U JPH01147253U (enExample) 1988-03-29 1988-03-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4133188U JPH01147253U (enExample) 1988-03-29 1988-03-29

Publications (1)

Publication Number Publication Date
JPH01147253U true JPH01147253U (enExample) 1989-10-11

Family

ID=31267772

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4133188U Pending JPH01147253U (enExample) 1988-03-29 1988-03-29

Country Status (1)

Country Link
JP (1) JPH01147253U (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006190702A (ja) * 2004-12-08 2006-07-20 Ulvac Japan Ltd フレキシブルプリント基材の製造装置及び製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006190702A (ja) * 2004-12-08 2006-07-20 Ulvac Japan Ltd フレキシブルプリント基材の製造装置及び製造方法

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