JPH0114666B2 - - Google Patents

Info

Publication number
JPH0114666B2
JPH0114666B2 JP56175077A JP17507781A JPH0114666B2 JP H0114666 B2 JPH0114666 B2 JP H0114666B2 JP 56175077 A JP56175077 A JP 56175077A JP 17507781 A JP17507781 A JP 17507781A JP H0114666 B2 JPH0114666 B2 JP H0114666B2
Authority
JP
Japan
Prior art keywords
sample
charged particles
pass filter
grid
energy
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56175077A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5875754A (ja
Inventor
Hiroshi Yamauchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP56175077A priority Critical patent/JPS5875754A/ja
Publication of JPS5875754A publication Critical patent/JPS5875754A/ja
Publication of JPH0114666B2 publication Critical patent/JPH0114666B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
    • H01J49/488—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter with retarding grids
JP56175077A 1981-10-30 1981-10-30 荷電粒子エネルギ−分析装置 Granted JPS5875754A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56175077A JPS5875754A (ja) 1981-10-30 1981-10-30 荷電粒子エネルギ−分析装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56175077A JPS5875754A (ja) 1981-10-30 1981-10-30 荷電粒子エネルギ−分析装置

Publications (2)

Publication Number Publication Date
JPS5875754A JPS5875754A (ja) 1983-05-07
JPH0114666B2 true JPH0114666B2 (zh) 1989-03-13

Family

ID=15989827

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56175077A Granted JPS5875754A (ja) 1981-10-30 1981-10-30 荷電粒子エネルギ−分析装置

Country Status (1)

Country Link
JP (1) JPS5875754A (zh)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4737637A (en) * 1986-10-15 1988-04-12 Hughes Aircraft Company Mass separator for ionized cluster beam
DE19701192C2 (de) 1997-01-15 2000-10-05 Staib Instr Gmbh Vorrichtung und Verfahren zum Betrieb eines Spektrometers mit Energie- und Winkelauflösung
DE19929185A1 (de) * 1999-06-25 2001-01-04 Staib Instr Gmbh Vorrichtung und Verfahren zur energie- und winkelaufgelösten Elektronenspektroskopie
JP4774140B2 (ja) * 2000-01-25 2011-09-14 株式会社アルバック 高周波電力印加電極に入射する高速中性粒子のエネルギーの分析方法及び分析装置
WO2008114684A1 (ja) * 2007-03-16 2008-09-25 National University Corporation NARA Institute of Science and Technology エネルギー分析器、２次元表示型エネルギー分析器および光電子顕微鏡

Also Published As

Publication number Publication date
JPS5875754A (ja) 1983-05-07

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