JPH01146525U - - Google Patents
Info
- Publication number
- JPH01146525U JPH01146525U JP4185388U JP4185388U JPH01146525U JP H01146525 U JPH01146525 U JP H01146525U JP 4185388 U JP4185388 U JP 4185388U JP 4185388 U JP4185388 U JP 4185388U JP H01146525 U JPH01146525 U JP H01146525U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- resist
- light
- guide fiber
- light guide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000835 fiber Substances 0.000 claims description 5
- 230000002093 peripheral effect Effects 0.000 claims description 2
- 230000007246 mechanism Effects 0.000 claims 2
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 claims 1
- 229910052753 mercury Inorganic materials 0.000 claims 1
- 230000003287 optical effect Effects 0.000 claims 1
- 230000032258 transport Effects 0.000 claims 1
- 230000007723 transport mechanism Effects 0.000 claims 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4185388U JPH01146525U (enrdf_load_stackoverflow) | 1988-03-31 | 1988-03-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4185388U JPH01146525U (enrdf_load_stackoverflow) | 1988-03-31 | 1988-03-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01146525U true JPH01146525U (enrdf_load_stackoverflow) | 1989-10-09 |
Family
ID=31268279
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4185388U Pending JPH01146525U (enrdf_load_stackoverflow) | 1988-03-31 | 1988-03-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01146525U (enrdf_load_stackoverflow) |
-
1988
- 1988-03-31 JP JP4185388U patent/JPH01146525U/ja active Pending
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